IL151760A - Transmission photocathode manufacturing intermediate product for night vision device image intensifier tube - Google Patents

Description

ητιποτ-Γΐ 1013 rmnj? Π2_1Ϋ7 WTI ism TRANSMISSION PHOTOCATHODE MANUFACTURING INTERMEDIATE 15119/02 151760/2 1 Transmission Photocathode Manufacturing Intermediate Product Cross Reference to Related Application The subject matter of this application is technically related to the subject matter of Israeli patent application No.133807, filed December 30, 1999.

Background of the Invention Field of the Invention The present invention is specifically in the field of manufacturing photocathodes and is concerned with a photocathode manufacturing intermediate product .

An example of the use of the present invention is in the field of night vision devices which provide a visible image from low-level visible light or from light in the near- infrared (invisible) portion of the spectrum by use of an image intensifier tube. As used herein, the term "light" means electromagnetic radiation, regardless of whether or not this light is visible to the human eye.

Image intensifier tubes of such night vision devices generally include a photocathode which is responsive to light in the infrared spectral range to release photoelectrons . Thus, the present invention is also in the field of such photocathodes. The photoelectrons released within such an image intensifier tube may be amplified or multiplied by conventional devices such as a microchannel plate or dynode to provide, for example, a current indicative of a light flux, or to produce an image of a light source or of an object illuminated with infrared light.

The present photocathode manufacturing intermediate product includes an active layer of indium gallium arsenide (InGaAs) . 15119/02 151760/02 2 Related Technology Night vision devices which use an image intensifier tube are well known. Generally, such devices include an objective lens by which light from a distant scene is received and focused upon a photocathode of the image intensifier tube. A power supply of the device provides appropriate voltage levels to various connections of the image intensifier tube so that this tube responsively provides a visible image. An eyepiece lens of the device provides the visible image to a user of the device .

Particularly, the image intensifier tube includes a photocathode responsive to light photons within a certain band of wavelengths to liberate photoelectrons . Because the photons are focused on the photocathode in a pattern replicating an image of a scene, the photoelectrons are liberated from the photocathode in shower having a pattern replicating this image of the scene. Within the image intensifier tube, the photoelectrons are moved by an applied electrostatic field to a microchannel plate, which includes a great multitude of microchannels . Each of the microchannels is effectively a dynode, which liberates secondary emission electrons in response to photoelectrons liberated at the photocathode. The shower of secondary emission electrons from the microchannel plate are moved to a phosphorescent screen which provides a visible image in yellow-green phosphorescent light.

Conventional photocathodes are disclosed in each of the following United States or foreign patents: 15119/02 United States patent No. 3,814,996, issued 4 June 1974, is believed to disclose a photocathode of an ternary alloy of indium, gallium, and arsenide of the formula InxGai-xAs, in which "x" has a value of from 0.15 to 0.21.

United States patent No. 4,286,373, issued 1 September 1981, is believed to disclose a photocathode of gallium arsenide at the photo-emitting layer, and is associated with a layer of gallium, aluminum, arsenide as a passivating layer.

United State-s patent No. 4, 477, 294, issued 16 October 1984, is believed to relate to a photocathode of gallium arsenide as the photo-emitting layer, which is formed by hybrid epitaxy.

United States patent No. 4,498,225, issued 12 February 1985, is thought to disclose a photocathode of gallium arsenide, formed on a glass substrate with intervening layers of gallium, aluminum, arsenide as passivation and anti-reflection layers.

United States patent No. 5,268,570, relates to a photocathode of indium gallium arsenide, grown on an aluminum indium arsenide window layer.

Similarly, United States patent No. 5,506,402, relates to a photocathode of indium gallium arsenide, grown on an aluminum gallium arsenide window layer.

British patent No. 1,478,453, issued 29 June 1977, is believed to disclose a photocathode comprising (Gai_x Alx) i-2InzAs , wherein (0 < z < y) .

It appears that none of these conventional photocathodes are optimized to provide imaging at wavelengths above 950 nm. Such imaging is desired in order to allow active illumination of a scene with a laser. Conventional GaAs photocathodes have a long- 15119/02 151760/02 4 wavelength cutoff of about 900 nm. The cutoff wavelength can be extended to the range of 900-1100 nm by using a ternary compound of indium, gallium, and arsenide. While the quantum efficiency of such photocathodes is less than conventional GaAs photocathodes, the greater photon availability under night-sight conditions compensates for this loss of efficiency. The photon activity of the night sky in the 800-900 nm band is five to seven times as great as in the visible region. Conventional photocathodes of the InGaAs type have a white-light response of about 300μ/1ιτι, with a radiant response at 1060 nm of about 0.025mA/W.

A photocathode which achieves a white-light sensitivity of 500μ/1τη while maintaining a radiant response of greater than 30 mA/W to light of 980 nm wavelength is desirable.

Summary of the Invention In view of the deficiencies of the related technology, a primary object for this invention is to avoid one or more of these deficiencies.

A particular object of the present invention is to provide a photocathode manufacturing intermediate product for use in manufacturing a photocathode .

A further object for this invention is to provide a photocathode manufacturing intermediate product for use in manufacturing a photocathode having a spectral response optimized at the 980 nm wavelength.

Another objective for this invention is to provide a photocathode manufacturing intermediate product for use in manufacturing a photocathode for an image intensifier tube.

Yet another object for this invention is to provide a photocathode manufacturing intermediate product for use in manufacturing a photocathode for an image intensifier tube of a night vision device. 15119/02 151760/02 Another particular objective for this invention is to provide a photocathode manufacturing intermediate product for use in manufacturing a photocathode which achieves a white-light sensitivity of about 500μ/1πι while maintaining a radiant response of greater than about 30 mA/ to light of 980 nm wavelength.

The invention of IL 133807 provides, according to one aspect, a photocathode for receiving photons of light and responsively emitting photoelectrons and being optimized for a quantum response level to light having a wavelength of substantially 980 nm, the photocathode comprising: a face plate; a window layer; an active layer of indium gallium arsenide (InGaAs) , in which the percentage of indium compared to the total of indium and gallium together in the active layer is in the range from about 9.5 % to about 15%.

According to another aspect, the invention of IL 133807 provides a method of making a photocathode which is responsive to photons of infrared light to emit photoelectrons, said method comprising the steps of: providing a face plate; providing a window layer on the face plate; attaching an active layer of indium gallium arsenide on the window layer; and providing the active layer with a percentage of indium of substantially 12 to 13 percent in comparison to the total of indium and gallium in the active layer.

An advantage of the photocathode of IL 133807 and image intensifier tubes and night vision devices including such image intensifier tubes is that the advantageously high quantum response of the photocathode to light having a wavelength of about 980 nm makes possible imaging with laser light of this wavelength, as well as sighting by use of a laser beam having this wavelength (i.e., laser designation). Thus, a user of 15119/02 6 such a night vision device can see dimly illuminated scenes by use of infrared which is richly present in the night time sky. Further, the user can, if necessary, further illuminate an object in such a scene with a laser having this wavelength and can see the object so illuminated. That is, the user can see a designator laser spot of this wavelength when such a spot is projected onto an object in the field of view of the night vision device.

The present invention relates to a photocathode manufacturing intermediate product comprising a substrate layer, a stop layer on the substrate layer, and an active layer carried by the substrate layer. The active layer includes indium gallium arsenide (InGaAs) material responsive to photons of light in a certain wavelength band to release photoelectrons . The percentage of indium compared to the total of. indium and gallium together in the InGaAs material of theactive layer is in the range from about 9.5 % to about 15%.

These and additional objects and advantages of the present invention will be apparent from a reading of the following detailed description of a preferred exemplary embodiment of the invention taken in conjunction with the appended drawing Figures. In the appended drawing Figures the same features, or features which are analogous in structure or function, are indicated with the same reference numeral.

Brief Description of the Drawing Figures Figure 1 provides a diagrammatic cross sectional view of a night vision device; Figure 2 provides a cross sectional view of an image intensifier tube which may be used in a night 15119/02 151760/02 7 vision device, and which may include a photocathode according to the invention of IL 133807; Figure 3 is a cross sectional view of a photocathode assembly for use in an image intensifier tube ; Figure 4 provides a graph showing a typical spectral response of photoelectron emission for a photocathode embodying the invention as a function of wavelength of incident light, and also includes a comparison graph of a conventional GEN III photocathode; Figure 5 provides a diagrammatic cross sectional view of a manufacturing intermediate product which is used to make a photocathode as seen in Figure 3 , and which also illustrates steps in the method of making such a photocathode.

Detailed Description of a Preferred Exemplary Embodiment of the Invention of IL 133807 The following is a description of a single exemplary preferred embodiment of the invention of IL 133807, and as such is not to be taken as limiting or exhaustive of all possible embodiments of the invention, nor indicative of the entire and complete scope of the invention to the exclusion of all other possible embodiments. Other possible embodiments of the present invention will certainly suggest themselves to those ordinarily skilled in the pertinent arts, and will be recognized as being within the scope of this invention. Accordingly, the invention is to be seen as being limited and defined only by the spirit and scope of the appended claims, giving cognizance to equivalents in structure and function in all respects.

Viewing the appended drawing Figures in conjunction with one another, and viewing first Figure 1, an 15119/02 8 exemplary and highly diagrammatic night vision device 10 is illustrated. This night vision device 10 includes an objective lens 12 focusing light 12a from a distant scene through an input window 14a of an image intensifier tube 14. It will be understood that although a single objective lens 12 is illustrated, the night vision device 10 may include more than one lens providing an objective for the image intensifier tube 14. The image intensifier tube 14 includes an output window 14b at which a visible image is provided. This visible image is provided by an eyepiece lens 16 to a user 18. Again, the eyepiece 16 may include more than one lens. A power supply 20 including a battery 20a, (see Fig. 2) provides power over connections 20b for operation of the image intensifier tube 14.

Considered more particularly, the image intensifier tube 14 is seen in Figure 2 to include a photocathode assembly 22 which is carried by the input window 14a, and upon which the light is focused by objective lens 12. his photocathode assembly 22 responsively liberates photoelectrons, indicated by arrows 22a (see Fig. 1), in a pattern replicating the image focused on this photocathode. The photoelectrons 22a are moved by a prevailing electrostatic field maintained by power supply 20 to a microchannel plate 24 having opposite faces 24a and 24b. Face 24a is an input face, while face 24b is an output face, as will be seen. Extending between the opposite faces 24a and 24b is a great multitude of microchannels, indicated generally be arrowed numeral 24c. These microchannels have an inner surface formed of a material which is an emitter of secondary electrons, so that each microchannel is individually a dynode . The photoelectrons from photocathode assembly 22 thus enter the microchannels 151 19/02 9 24c and cause the emission of a correspondingly greater number of secondary emission electrons.

As a result, a great number of secondary emission electrons (indicated by arrows 24d) still in a pattern replicating the image focused on photocathode assembly 22, is released by the microchannel plate 24. This shower of secondary emission electrons travels under the influence of another electrostatic field to an output electrode 26. The output electrode 26 may take a variety of forms, but preferably includes an aluminized phosphorescent screen coating, indicated with arrowed numeral 26a. This phosphorescent screen coating may be carried by the output window 14b. Also, in response to the shower of secondary emission electrons the phosphorescent screen produces a visible image in response to the shower of secondary emission electrons, and this image is transmitted out of the tube 14 via the output window 14b.

Photocathode assembly 22 in overview (now particularly viewing Figure 3) is supported on a transparent and supportive face plate portion 28, which in this instance will form the input window 14a of the image intensifier tube 14 when this face plate is joined with other parts of the tube 14 to become a part of the tube. As will be seen, the face plate portion 28 serves to support active portions of the photocathode assembly 22, to transmit photons of light to the active portions of the photocathode assembly 22, and to sealingly close a vacuum envelope of the image intensifier tube 14. Preferably, the face plate portion 28 is formed of glass, such as Corning 7056 glass. This Corning 7056 glass may be used advantageously as the face plate portion 28 because its coefficient of thermal expansion closely matches that of other portions of the 151 19/02 photocathode 22. Alternatively, other materials may be used for the face plate portion 28. For example, single-crystalline sapphire (AI2O3) might be used as the material for face plate portion 28. Thus, the present invention is not limited to user of any particular material for face plate portion 28.

Supported by the face plate portion 28 are the active portions of the photocathode assembly 22, collectively generally indicated with the numeral 30. These active portions are configured as successive layers, each cooperating with the whole of the structure of photocathode assembly 22 to achieve the objects of this invention. More particularly, adjacent to the face plate portion 28 is an anti-reflection (and thermal bonding) coating 32 of silicon " nitride and silicon dioxide. Upon this layer 32 is carried a window layer 34. In this case, the window layer 34 is most preferably made of aluminum gallium arsenide (AlGaAs) .

As will be further discussed below, the window layer 34 serves to provide a structural transition between the glass face plate portion 28 and the crystalline structure of an active layer carried on the window layer 34. Additionally, the. window layer serves as a potential barrier effectively. "reflecting" thermalized electrons in the active layer back toward a crystal-vacuum interface at which photoelectrons are released into the image intensifier tube.

An active layer 36 is carried on window layer 34, and is responsive to photon of light to release photoelectrons (recalling arrows 22a) . Preferably, the active layer 36 is formed of the ternary compound indium gallium arsenide (InGaAs), having the formula InxGai-xAs . This active layer 36 is conventionally activated to achieve negative electron affinity, and thus includes 15119/02 1 1 activation atoms of cesium and oxygen (indicated with the arrowed numeral 38) . An electrode 40 is formed in the shape of a band or collar circumscribing the photocathode assembly 22, and providing electrical connection from power supply 20 in the completed image intensifier tube 14 to the active layer 36, recalling connections 20b seen in Figure 1. Preferably, the electrode 40 is formed of chrome/gold alloy having advantages in the vacuum furnace brazing operation which is used to sealingly unite the components of tube 14, as those who are ordinarily skilled in the pertinent arts will understand. In other words, the photocathode assembly 22 seen in Figure 3 will be sealingly united with other components of the tube 14 of Figure 3 to form a vacuum envelope within which photoelectrons and secondary emission electrons may freely move.

In order to optimize both white-light and 980nm sensitivity of the photocathode assembly 22, preferably the band gap of the active material of layer 36 is selected to be approximately equal to the quantum energy level of 980 nm light. Particularly, the band gap is selected to be about equal to the quantum energy of 1.265 eV for 980 nm light. Determining the band gap energy Eg(x)of InGaAs material as a function of the indium constituent (x) may be accomplished by use of the following equation: Eg(x) = 0.36 + 0.79x + 0.28x2 Solving the above equation for (x) , gives a result of x = 12.55%. This percentage of indium in the InGaAs active layer of a photocathode may be considered to be an analytical optimum level, but is an. optimum level which need not be achieved precisely in order to realize the benefits and objectives of this invention. 151 19/02 12 Construction and evaluation of photocathodes according to this invention has lead the inventors to believe that a usable range of values for photocathodes having desirably high white-light and 980 nm sensitivities may be achieved if the percentage of indium in the composition of the active layer 36 (i.e., in the material InxGai-xAs) varies in a range extending from about 9.5 % to about 15%. More preferably, the indium percentage in the composition of the active layer 36 is controlled to be in the range of from about 11% to about 14%. Most · preferably, the indium percentage in the active layer 36 is controlled to be in the range from 12% to 13%. Viewing Figure 4 for an indication of the spectral response performance of a photocathode embodying the present invention, it is seen that such a photocathode achieved a white-light sensitivity of 500μ/1ιη while maintaining a radiant response of greater than 30 mA/W to light of 980 nm wavelength.

Turning now to Figure 5, a manufacturing intermediate product 42 used to make a photocathode assembly 22 as seen in Figure 3 is depicted. Accordingly, the following description of the structure of the product 42 may also be taken as a description of the method steps used in making this product and the photocathode assembly 22. This manufacturing intermediate product 42 includes a substrate 44, a stop layer 46, active layer 36, window layer 34, and a protective cap layer 48. Preferably, the product 42 is fabricated using manufacturing methods, techniques, and equipment conventionally used in making GEN III image intensifier tubes. Accordingly, much of what is seen in Figure 5 will be familiar to those ordinarily skilled, although the constituent percentages of the structures depicted differ from the conventional. 15119/02 151760/02 13 The substrate 44 is preferably a wafer of gallium arsenide (GaAs) single crystal material having a low density of crystalline defects. Other types of substrates could be used, but the substrate 44 serves as a base upon which the layers 34, 36, 46, and 48 are grown epitaxially (not recited in the order of their growth on this substrate) . Conventional fabrication processes such as OCVD, MBE, and MO BE, which are conventional both to the semiconductor circuit industry and to the art of photocathodes, may be used to form the layers on substrate 44. First, the stop layer 46 is formed of aluminum gallium arsenide (AlGaAs) . On this stop layer, the active layer 36 is formed, followed by window layer 34. Both the active layer 36 and window layer 34 are doped during formation with a P-type impurity (such as zinc) in order to provide electron mobility in these layers and a reduced work function for electron escape from the active layer 36 into the vacuum free-space environment inside of tube 14. Preferably, doping levels of from about 1 x 1019 to about 9 x 1019 atoms/cm3 is used in the layers 34 and 36, and these doping levels need not be the same in each of these layers .

Finally, the cap layer 48 is grown on the window layer 34. This cap layer may be formed of gallium arsenide, for example, and provides for protection of the window layer 34 and the active layer 36 during cool down and subsequent transport of the manufacturing intermediate product 42 (i.e., which transport may include exposure to ambient atmospheric conditions) until further manufacturing steps complete its transition to a photocathode assembly as seen in Figure 3 and subsequent sealing incorporation into an image intensifier tube. 15119/02 14 As those ordinarily skilled will know, after the cap layer is removed and coating 32 applied, the substrate 44 with the layers 34, 36, and 46 are thermally bonded to the face plate portion 28 (i.e., by thermal bonding of the layer 32 which serves as a thermal bonding layer also. Next, the stop layer 46 serves to prevent an etch operation which is used to remove the substrate 44 from etching into the active layer of the photocathode . Next, the stop layer 46 is selectively etched off, the electrode 40 is applied using standard thin-film techniques, the surface of active layer 36 is cleaned to remove oxides and moisture, and the photocathode assembly is activated using evaporation of cesium and oxygen gas onto the active layer 36.

While the present invention has been depicted, described, and is defined by reference to particularly preferred embodiments of the invention, such reference does not imply a limitation on the invention, and no such limitation is to be inferred. The invention is capable of considerable modification, alteration, and equivalents in form and function, as will occur to those ordinarily skilled in the pertinent arts. The depicted and described preferred embodiments of the invention are exemplary only, and are not exhaustive of the scope of the invention. Consequently, the invention is intended to. be limited only by the spirit and scope of the appended claims, giving full cognizance to equivalents in all respects. 151 19/02 Material which is outside the scope of the claims does not constitute a part of the claimed invention.

Claims (8)

15119/02 151760/2 16 We Claim: a

1. A product for use in manufacturing layer, said active layer including indium gallium arsenide (InGaAs) material responsive to photons of light in a certain wavelength band to release photoelectrons ; in which the percentage of indium compared to the total of indium and gallium together in the InGaAs material of said active layer is in the range from about 9.5 % to about 15%; wherein said photocathodes have a maximum photoresponse at 980nm.

2. The product of Claim 1 further including a window layer carried by said active layer.

3. The product of Claim 2 further including an environmentally protective cap layer carried by said window layer.

4. The product of Claim 1 in which the percentage of indium in the active layer in comparison to the total of indium and gallium together in the active layer is in the range from about 11% to about 14%.

5. The product of Claim 1 in which the percentage of indium in the active layer in comparison to the total of indium and gallium together in the active layer is in the range from about 12% to about 13%. 15119/02 151760/2 17

6. The product of Claim 1 in which one of said window layer and said active layer includes a P-type dopant .

7. The product of Claim 6 in which said P-type dopant is present in said one layer at a concentration substantially in the range from about 1 x 1019 to about 9 x 1019 atoms/cm3.

8. The product of Claim 2 in which said window layer comprises aluminum gallium arsenide material. UlZZATTO & LUZZATTO