IL135653A0 - A semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system - Google Patents
A semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a systemInfo
- Publication number
- IL135653A0 IL135653A0 IL13565300A IL13565300A IL135653A0 IL 135653 A0 IL135653 A0 IL 135653A0 IL 13565300 A IL13565300 A IL 13565300A IL 13565300 A IL13565300 A IL 13565300A IL 135653 A0 IL135653 A0 IL 135653A0
- Authority
- IL
- Israel
- Prior art keywords
- gas
- recovery
- semiconductor production
- mixture flowing
- perfluorocompound
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IL13565300A IL135653A0 (en) | 1997-01-17 | 2000-04-13 | A semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IL12003197A IL120031A (en) | 1996-06-14 | 1997-01-17 | Recovery of at least one perfluorocompound gas from a gas mixture |
IL13565300A IL135653A0 (en) | 1997-01-17 | 2000-04-13 | A semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system |
Publications (1)
Publication Number | Publication Date |
---|---|
IL135653A0 true IL135653A0 (en) | 2001-05-20 |
Family
ID=11069709
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL13565397A IL135653A (en) | 1997-01-17 | 1997-01-17 | Semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system |
IL13565300A IL135653A0 (en) | 1997-01-17 | 2000-04-13 | A semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL13565397A IL135653A (en) | 1997-01-17 | 1997-01-17 | Semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system |
Country Status (1)
Country | Link |
---|---|
IL (2) | IL135653A (en) |
-
1997
- 1997-01-17 IL IL13565397A patent/IL135653A/en not_active IP Right Cessation
-
2000
- 2000-04-13 IL IL13565300A patent/IL135653A0/en unknown
Also Published As
Publication number | Publication date |
---|---|
IL135653A (en) | 2004-03-28 |
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