IL135653A0 - A semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system - Google Patents

A semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system

Info

Publication number
IL135653A0
IL135653A0 IL13565300A IL13565300A IL135653A0 IL 135653 A0 IL135653 A0 IL 135653A0 IL 13565300 A IL13565300 A IL 13565300A IL 13565300 A IL13565300 A IL 13565300A IL 135653 A0 IL135653 A0 IL 135653A0
Authority
IL
Israel
Prior art keywords
gas
recovery
semiconductor production
mixture flowing
perfluorocompound
Prior art date
Application number
IL13565300A
Original Assignee
Air Liquide
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from IL12003197A external-priority patent/IL120031A/en
Application filed by Air Liquide filed Critical Air Liquide
Priority to IL13565300A priority Critical patent/IL135653A0/en
Publication of IL135653A0 publication Critical patent/IL135653A0/en

Links

IL13565300A 1997-01-17 2000-04-13 A semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system IL135653A0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL13565300A IL135653A0 (en) 1997-01-17 2000-04-13 A semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL12003197A IL120031A (en) 1996-06-14 1997-01-17 Recovery of at least one perfluorocompound gas from a gas mixture
IL13565300A IL135653A0 (en) 1997-01-17 2000-04-13 A semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system

Publications (1)

Publication Number Publication Date
IL135653A0 true IL135653A0 (en) 2001-05-20

Family

ID=11069709

Family Applications (2)

Application Number Title Priority Date Filing Date
IL13565397A IL135653A (en) 1997-01-17 1997-01-17 Semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system
IL13565300A IL135653A0 (en) 1997-01-17 2000-04-13 A semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system

Family Applications Before (1)

Application Number Title Priority Date Filing Date
IL13565397A IL135653A (en) 1997-01-17 1997-01-17 Semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system

Country Status (1)

Country Link
IL (2) IL135653A (en)

Also Published As

Publication number Publication date
IL135653A (en) 2004-03-28

Similar Documents

Publication Publication Date Title
IL120031A (en) Recovery of at least one perfluorocompound gas from a gas mixture
GB2302892B (en) Downhole gas compressor
SG54348A1 (en) Process and system for separation and recovery of perfluorocompound gases
SG66337A1 (en) Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases
HK1019413A1 (en) Multi-stage process for the separation/recovery of gases
NO996557L (en) Process for condensing a natural gas stream containing at least one freeze component
GB9927646D0 (en) Improved polymer expansion for oil and gas recovery
GB2340863B (en) Tapered flow gas separation system
AU9087498A (en) Installation for separation of co2 from gas turbine flue gas
GB9800693D0 (en) Separation of carbon monoxide from nitrogen-contaminated gaseous mixtures
GB9412310D0 (en) Recovery of substances from exhaust streams
ZA974801B (en) Removal of nitrogen oxides from gas streams.
EP0757918A3 (en) Gas recovery unit
FR2718725B1 (en) Process and installation for the separation of a gas mixture.
ZA94214B (en) Gas separation
FR2769851B1 (en) INSTALLATION FOR SEPARATING A GAS MIXTURE
ZA96105B (en) Recovery of hydrocarbons from gas streams
GB9523517D0 (en) Separation of gases
ZA961295B (en) Separation of gas mixtures
ZA984122B (en) Separation of a gas
ZA9610481B (en) Gas recovery
GB9719512D0 (en) Treatment of a combustible gas stream
IL135653A0 (en) A semiconductor production system and recovery of at least one perfluorocompound gas from a gas mixture flowing from such a system
SG54484A1 (en) Gas separation
PL331044A1 (en) Method of recovering sulphur from so 2 containing gases