IL130054A0 - Plasma treatment method
- Google Patents
Plasma treatment method
Info
Publication number
IL130054A0
IL130054A0IL13005499AIL13005499AIL130054A0IL 130054 A0IL130054 A0IL 130054A0IL 13005499 AIL13005499 AIL 13005499AIL 13005499 AIL13005499 AIL 13005499AIL 130054 A0IL130054 A0IL 130054A0
Authority
IL
Israel
Prior art keywords
treatment method
plasma treatment
plasma
treatment
Prior art date
Application number
IL13005499A
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron LtdfiledCriticalTokyo Electron Ltd
Priority to IL13005499ApriorityCriticalpatent/IL130054A0/en
Publication of IL130054A0publicationCriticalpatent/IL130054A0/en