IL130054A0 - Plasma treatment method - Google Patents

Plasma treatment method

Info

Publication number
IL130054A0
IL130054A0 IL13005499A IL13005499A IL130054A0 IL 130054 A0 IL130054 A0 IL 130054A0 IL 13005499 A IL13005499 A IL 13005499A IL 13005499 A IL13005499 A IL 13005499A IL 130054 A0 IL130054 A0 IL 130054A0
Authority
IL
Israel
Prior art keywords
treatment method
plasma treatment
plasma
treatment
Prior art date
Application number
IL13005499A
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to IL13005499A priority Critical patent/IL130054A0/en
Publication of IL130054A0 publication Critical patent/IL130054A0/en

Links

IL13005499A 1999-05-19 1999-05-19 Plasma treatment method IL130054A0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL13005499A IL130054A0 (en) 1999-05-19 1999-05-19 Plasma treatment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL13005499A IL130054A0 (en) 1999-05-19 1999-05-19 Plasma treatment method

Publications (1)

Publication Number Publication Date
IL130054A0 true IL130054A0 (en) 2000-02-29

Family

ID=11072829

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13005499A IL130054A0 (en) 1999-05-19 1999-05-19 Plasma treatment method

Country Status (1)

Country Link
IL (1) IL130054A0 (en)

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