IL129559A0 - Plasma treatment method
- Google Patents
Plasma treatment method
Info
Publication number
IL129559A0
IL129559A0IL12955999AIL12955999AIL129559A0IL 129559 A0IL129559 A0IL 129559A0IL 12955999 AIL12955999 AIL 12955999AIL 12955999 AIL12955999 AIL 12955999AIL 129559 A0IL129559 A0IL 129559A0
Authority
IL
Israel
Prior art keywords
treatment method
plasma treatment
plasma
treatment
Prior art date
Application number
IL12955999A
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron LtdfiledCriticalTokyo Electron Ltd
Priority to IL12955999ApriorityCriticalpatent/IL129559A0/en
Publication of IL129559A0publicationCriticalpatent/IL129559A0/en