IL129559A0 - Plasma treatment method - Google Patents

Plasma treatment method

Info

Publication number
IL129559A0
IL129559A0 IL12955999A IL12955999A IL129559A0 IL 129559 A0 IL129559 A0 IL 129559A0 IL 12955999 A IL12955999 A IL 12955999A IL 12955999 A IL12955999 A IL 12955999A IL 129559 A0 IL129559 A0 IL 129559A0
Authority
IL
Israel
Prior art keywords
treatment method
plasma treatment
plasma
treatment
Prior art date
Application number
IL12955999A
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to IL12955999A priority Critical patent/IL129559A0/en
Publication of IL129559A0 publication Critical patent/IL129559A0/en

Links

IL12955999A 1999-04-22 1999-04-22 Plasma treatment method IL129559A0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL12955999A IL129559A0 (en) 1999-04-22 1999-04-22 Plasma treatment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL12955999A IL129559A0 (en) 1999-04-22 1999-04-22 Plasma treatment method

Publications (1)

Publication Number Publication Date
IL129559A0 true IL129559A0 (en) 2000-02-29

Family

ID=11072722

Family Applications (1)

Application Number Title Priority Date Filing Date
IL12955999A IL129559A0 (en) 1999-04-22 1999-04-22 Plasma treatment method

Country Status (1)

Country Link
IL (1) IL129559A0 (en)

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