IL128326A0 - Encapsulated micro-relay modules and methods of fabricating same - Google Patents
Encapsulated micro-relay modules and methods of fabricating sameInfo
- Publication number
- IL128326A0 IL128326A0 IL12832697A IL12832697A IL128326A0 IL 128326 A0 IL128326 A0 IL 128326A0 IL 12832697 A IL12832697 A IL 12832697A IL 12832697 A IL12832697 A IL 12832697A IL 128326 A0 IL128326 A0 IL 128326A0
- Authority
- IL
- Israel
- Prior art keywords
- methods
- fabricating same
- relay modules
- encapsulated micro
- encapsulated
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H50/00—Details of electromagnetic relays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H50/00—Details of electromagnetic relays
- H01H50/005—Details of electromagnetic relays using micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/64—Protective enclosures, baffle plates, or screens for contacts
- H01H1/66—Contacts sealed in an evacuated or gas-filled envelope, e.g. magnetic dry-reed contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H50/00—Details of electromagnetic relays
- H01H50/02—Bases; Casings; Covers
- H01H50/023—Details concerning sealing, e.g. sealing casing with resin
- H01H2050/025—Details concerning sealing, e.g. sealing casing with resin containing inert or dielectric gasses, e.g. SF6, for arc prevention or arc extinction
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/692,502 US6025767A (en) | 1996-08-05 | 1996-08-05 | Encapsulated micro-relay modules and methods of fabricating same |
PCT/US1997/014332 WO1998006118A1 (fr) | 1996-08-05 | 1997-07-30 | Modules de micro-relais encapsules et leurs procedes de fabrication |
Publications (1)
Publication Number | Publication Date |
---|---|
IL128326A0 true IL128326A0 (en) | 2000-01-31 |
Family
ID=24780839
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL12832697A IL128326A0 (en) | 1996-08-05 | 1997-07-30 | Encapsulated micro-relay modules and methods of fabricating same |
Country Status (8)
Country | Link |
---|---|
US (1) | US6025767A (fr) |
EP (1) | EP0916145A1 (fr) |
JP (1) | JP2000515676A (fr) |
KR (1) | KR20000029835A (fr) |
AU (1) | AU3915897A (fr) |
CA (1) | CA2261683A1 (fr) |
IL (1) | IL128326A0 (fr) |
WO (1) | WO1998006118A1 (fr) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6388203B1 (en) | 1995-04-04 | 2002-05-14 | Unitive International Limited | Controlled-shaped solder reservoirs for increasing the volume of solder bumps, and structures formed thereby |
AU5316996A (en) | 1995-04-05 | 1996-10-23 | Mcnc | A solder bump structure for a microelectronic substrate |
EP0899787A3 (fr) * | 1997-07-25 | 2001-05-16 | Mcnc | Réservoirs de soudure formés-contrôlés pour augmenter le volume de bosses de soudure et dtructures ainsi formées |
US6373356B1 (en) | 1999-05-21 | 2002-04-16 | Interscience, Inc. | Microelectromechanical liquid metal current carrying system, apparatus and method |
US6853067B1 (en) | 1999-10-12 | 2005-02-08 | Microassembly Technologies, Inc. | Microelectromechanical systems using thermocompression bonding |
EP1093143A1 (fr) * | 1999-10-15 | 2001-04-18 | Lucent Technologies Inc. | Micro-relais du type "flip-chip" monté sur un circuit integré |
US6472739B1 (en) * | 1999-11-15 | 2002-10-29 | Jds Uniphase Corporation | Encapsulated microelectromechanical (MEMS) devices |
US6531341B1 (en) | 2000-05-16 | 2003-03-11 | Sandia Corporation | Method of fabricating a microelectronic device package with an integral window |
US6384473B1 (en) | 2000-05-16 | 2002-05-07 | Sandia Corporation | Microelectronic device package with an integral window |
US6335224B1 (en) | 2000-05-16 | 2002-01-01 | Sandia Corporation | Protection of microelectronic devices during packaging |
US6364460B1 (en) | 2000-06-13 | 2002-04-02 | Chad R. Sager | Liquid delivery system |
KR100370398B1 (ko) * | 2000-06-22 | 2003-01-30 | 삼성전자 주식회사 | 전자 및 mems 소자의 표면실장형 칩 규모 패키징 방법 |
US6587021B1 (en) | 2000-11-09 | 2003-07-01 | Raytheon Company | Micro-relay contact structure for RF applications |
US20020096421A1 (en) * | 2000-11-29 | 2002-07-25 | Cohn Michael B. | MEMS device with integral packaging |
US6798931B2 (en) * | 2001-03-06 | 2004-09-28 | Digital Optics Corp. | Separating of optical integrated modules and structures formed thereby |
US6639493B2 (en) * | 2001-03-30 | 2003-10-28 | Arizona State University | Micro machined RF switches and methods of operating the same |
KR100387239B1 (ko) * | 2001-04-26 | 2003-06-12 | 삼성전자주식회사 | Mems 릴레이 및 그 제조방법 |
WO2002095784A1 (fr) * | 2001-05-18 | 2002-11-28 | Microlab, Inc. | Boitier pour commutateur de verrouillage micromagnetique |
WO2002096166A1 (fr) * | 2001-05-18 | 2002-11-28 | Corporation For National Research Initiatives | Systemes microelectromecaniques (mems) radiofrequences sur substrats a ceramiques cocuites a basse temperature (ltcc) |
ATE458386T1 (de) * | 2001-09-17 | 2010-03-15 | John Stafford | Kapselung fuer polarisiertes mems relais und verfahren zur kapselung |
US6778046B2 (en) * | 2001-09-17 | 2004-08-17 | Magfusion Inc. | Latching micro magnetic relay packages and methods of packaging |
US20030179057A1 (en) * | 2002-01-08 | 2003-09-25 | Jun Shen | Packaging of a micro-magnetic switch with a patterned permanent magnet |
US20030137374A1 (en) * | 2002-01-18 | 2003-07-24 | Meichun Ruan | Micro-Magnetic Latching switches with a three-dimensional solenoid coil |
US6852926B2 (en) * | 2002-03-26 | 2005-02-08 | Intel Corporation | Packaging microelectromechanical structures |
US6673697B2 (en) * | 2002-04-03 | 2004-01-06 | Intel Corporation | Packaging microelectromechanical structures |
US6713314B2 (en) * | 2002-08-14 | 2004-03-30 | Intel Corporation | Hermetically packaging a microelectromechanical switch and a film bulk acoustic resonator |
US7317232B2 (en) * | 2002-10-22 | 2008-01-08 | Cabot Microelectronics Corporation | MEM switching device |
FR2846318B1 (fr) * | 2002-10-24 | 2005-01-07 | Commissariat Energie Atomique | Microstructure electromecanique integree comportant des moyens de reglage de la pression dans une cavite scellee et procede de reglage de la pression |
US7170155B2 (en) * | 2003-06-25 | 2007-01-30 | Intel Corporation | MEMS RF switch module including a vertical via |
US7795723B2 (en) * | 2004-02-05 | 2010-09-14 | Analog Devices, Inc. | Capped sensor |
US7183622B2 (en) * | 2004-06-30 | 2007-02-27 | Intel Corporation | Module integrating MEMS and passive components |
US7668415B2 (en) | 2004-09-27 | 2010-02-23 | Qualcomm Mems Technologies, Inc. | Method and device for providing electronic circuitry on a backplate |
US7288940B2 (en) * | 2004-12-06 | 2007-10-30 | Analog Devices, Inc. | Galvanically isolated signal conditioning system |
WO2006085825A1 (fr) * | 2005-02-08 | 2006-08-17 | Altus Technologies Pte. Ltd. | Procede de conditionnement de dispositifs mems et boitiers de dispositifs mems produits a l’aide dudit procede |
US7692521B1 (en) | 2005-05-12 | 2010-04-06 | Microassembly Technologies, Inc. | High force MEMS device |
TWI275187B (en) * | 2005-11-30 | 2007-03-01 | Advanced Semiconductor Eng | Flip chip package and manufacturing method of the same |
US7524693B2 (en) * | 2006-05-16 | 2009-04-28 | Freescale Semiconductor, Inc. | Method and apparatus for forming an electrical connection to a semiconductor substrate |
US8044755B2 (en) * | 2008-04-09 | 2011-10-25 | National Semiconductor Corporation | MEMS power inductor |
US7705411B2 (en) * | 2008-04-09 | 2010-04-27 | National Semiconductor Corporation | MEMS-topped integrated circuit with a stress relief layer |
ITTO20120542A1 (it) | 2012-06-20 | 2013-12-21 | St Microelectronics Srl | Dispositivo microelettromeccanico con instradamento dei segnali attraverso un cappuccio protettivo e metodo per controllare un dispositivo microelettromeccanico |
CN114434072B (zh) * | 2022-01-27 | 2023-10-31 | 贵州航天电器股份有限公司 | 一种用于继电器接触片组合焊接的定位机构 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
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US557132A (en) * | 1896-03-31 | Photographic child s support | ||
US3259814A (en) * | 1955-05-20 | 1966-07-05 | Rca Corp | Power semiconductor assembly including heat dispersing means |
DE1182353C2 (de) * | 1961-03-29 | 1973-01-11 | Siemens Ag | Verfahren zum Herstellen eines Halbleiter-bauelements, wie Halbleiterstromtor oder Flaechentransistor, mit einer hochohmigen n-Zone zwischen zwei p-Zonen im Halbleiter-koerper |
US3244947A (en) * | 1962-06-15 | 1966-04-05 | Slater Electric Inc | Semi-conductor diode and manufacture thereof |
US3274458A (en) * | 1964-04-02 | 1966-09-20 | Int Rectifier Corp | Extremely high voltage silicon device |
GB1134998A (en) * | 1967-04-04 | 1968-11-27 | Marconi Co Ltd | Improvements in or relating to insulated gate field effect transistors |
JPS49135749U (fr) * | 1973-03-24 | 1974-11-21 | ||
US3959577A (en) * | 1974-06-10 | 1976-05-25 | Westinghouse Electric Corporation | Hermetic seals for insulating-casing structures |
US3993123A (en) * | 1975-10-28 | 1976-11-23 | International Business Machines Corporation | Gas encapsulated cooling module |
US4257905A (en) * | 1977-09-06 | 1981-03-24 | The United States Of America As Represented By The United States Department Of Energy | Gaseous insulators for high voltage electrical equipment |
US4168480A (en) * | 1978-02-13 | 1979-09-18 | Torr Laboratories, Inc. | Relay assembly |
US4449580A (en) * | 1981-06-30 | 1984-05-22 | International Business Machines Corporation | Vertical wall elevated pressure heat dissipation system |
JPS58146827A (ja) * | 1982-02-25 | 1983-09-01 | Fuji Electric Co Ltd | 半導体式圧力センサ |
CH664040A5 (de) * | 1982-07-19 | 1988-01-29 | Bbc Brown Boveri & Cie | Druckgasisolierter stromwandler. |
JPS602011A (ja) * | 1983-06-14 | 1985-01-08 | 三菱電機株式会社 | ガス絶縁電気装置 |
US4897508A (en) * | 1988-02-10 | 1990-01-30 | Olin Corporation | Metal electronic package |
JPH01214141A (ja) * | 1988-02-23 | 1989-08-28 | Nec Corp | フリップチップ型半導体装置 |
CA2002213C (fr) * | 1988-11-10 | 1999-03-30 | Iwona Turlik | Boitier de puce de circuits integres a haute performance et sa methode de fabrication |
DE4205029C1 (en) * | 1992-02-19 | 1993-02-11 | Siemens Ag, 8000 Muenchen, De | Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate |
US5371431A (en) * | 1992-03-04 | 1994-12-06 | Mcnc | Vertical microelectronic field emission devices including elongate vertical pillars having resistive bottom portions |
JPH0637143A (ja) * | 1992-07-15 | 1994-02-10 | Toshiba Corp | 半導体装置および半導体装置の製造方法 |
US5479042A (en) * | 1993-02-01 | 1995-12-26 | Brooktree Corporation | Micromachined relay and method of forming the relay |
-
1996
- 1996-08-05 US US08/692,502 patent/US6025767A/en not_active Expired - Fee Related
-
1997
- 1997-07-30 WO PCT/US1997/014332 patent/WO1998006118A1/fr not_active Application Discontinuation
- 1997-07-30 CA CA002261683A patent/CA2261683A1/fr not_active Abandoned
- 1997-07-30 EP EP97936502A patent/EP0916145A1/fr not_active Withdrawn
- 1997-07-30 IL IL12832697A patent/IL128326A0/xx unknown
- 1997-07-30 KR KR1019997000989A patent/KR20000029835A/ko not_active Application Discontinuation
- 1997-07-30 JP JP10508265A patent/JP2000515676A/ja active Pending
- 1997-07-30 AU AU39158/97A patent/AU3915897A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2000515676A (ja) | 2000-11-21 |
US6025767A (en) | 2000-02-15 |
EP0916145A1 (fr) | 1999-05-19 |
CA2261683A1 (fr) | 1998-02-12 |
WO1998006118A1 (fr) | 1998-02-12 |
KR20000029835A (ko) | 2000-05-25 |
AU3915897A (en) | 1998-02-25 |
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