IL128326A0 - Encapsulated micro-relay modules and methods of fabricating same - Google Patents

Encapsulated micro-relay modules and methods of fabricating same

Info

Publication number
IL128326A0
IL128326A0 IL12832697A IL12832697A IL128326A0 IL 128326 A0 IL128326 A0 IL 128326A0 IL 12832697 A IL12832697 A IL 12832697A IL 12832697 A IL12832697 A IL 12832697A IL 128326 A0 IL128326 A0 IL 128326A0
Authority
IL
Israel
Prior art keywords
methods
fabricating same
relay modules
encapsulated micro
encapsulated
Prior art date
Application number
IL12832697A
Other languages
English (en)
Original Assignee
Mcnc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mcnc filed Critical Mcnc
Publication of IL128326A0 publication Critical patent/IL128326A0/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00Details of electromagnetic relays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00Details of electromagnetic relays
    • H01H50/005Details of electromagnetic relays using micromechanics
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/64Protective enclosures, baffle plates, or screens for contacts
    • H01H1/66Contacts sealed in an evacuated or gas-filled envelope, e.g. magnetic dry-reed contacts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00Details of electromagnetic relays
    • H01H50/02Bases; Casings; Covers
    • H01H50/023Details concerning sealing, e.g. sealing casing with resin
    • H01H2050/025Details concerning sealing, e.g. sealing casing with resin containing inert or dielectric gasses, e.g. SF6, for arc prevention or arc extinction

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
IL12832697A 1996-08-05 1997-07-30 Encapsulated micro-relay modules and methods of fabricating same IL128326A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/692,502 US6025767A (en) 1996-08-05 1996-08-05 Encapsulated micro-relay modules and methods of fabricating same
PCT/US1997/014332 WO1998006118A1 (fr) 1996-08-05 1997-07-30 Modules de micro-relais encapsules et leurs procedes de fabrication

Publications (1)

Publication Number Publication Date
IL128326A0 true IL128326A0 (en) 2000-01-31

Family

ID=24780839

Family Applications (1)

Application Number Title Priority Date Filing Date
IL12832697A IL128326A0 (en) 1996-08-05 1997-07-30 Encapsulated micro-relay modules and methods of fabricating same

Country Status (8)

Country Link
US (1) US6025767A (fr)
EP (1) EP0916145A1 (fr)
JP (1) JP2000515676A (fr)
KR (1) KR20000029835A (fr)
AU (1) AU3915897A (fr)
CA (1) CA2261683A1 (fr)
IL (1) IL128326A0 (fr)
WO (1) WO1998006118A1 (fr)

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EP1093143A1 (fr) * 1999-10-15 2001-04-18 Lucent Technologies Inc. Micro-relais du type "flip-chip" monté sur un circuit integré
US6472739B1 (en) * 1999-11-15 2002-10-29 Jds Uniphase Corporation Encapsulated microelectromechanical (MEMS) devices
US6531341B1 (en) 2000-05-16 2003-03-11 Sandia Corporation Method of fabricating a microelectronic device package with an integral window
US6384473B1 (en) 2000-05-16 2002-05-07 Sandia Corporation Microelectronic device package with an integral window
US6335224B1 (en) 2000-05-16 2002-01-01 Sandia Corporation Protection of microelectronic devices during packaging
US6364460B1 (en) 2000-06-13 2002-04-02 Chad R. Sager Liquid delivery system
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US6587021B1 (en) 2000-11-09 2003-07-01 Raytheon Company Micro-relay contact structure for RF applications
US20020096421A1 (en) * 2000-11-29 2002-07-25 Cohn Michael B. MEMS device with integral packaging
US6798931B2 (en) * 2001-03-06 2004-09-28 Digital Optics Corp. Separating of optical integrated modules and structures formed thereby
US6639493B2 (en) * 2001-03-30 2003-10-28 Arizona State University Micro machined RF switches and methods of operating the same
KR100387239B1 (ko) * 2001-04-26 2003-06-12 삼성전자주식회사 Mems 릴레이 및 그 제조방법
WO2002095784A1 (fr) * 2001-05-18 2002-11-28 Microlab, Inc. Boitier pour commutateur de verrouillage micromagnetique
WO2002096166A1 (fr) * 2001-05-18 2002-11-28 Corporation For National Research Initiatives Systemes microelectromecaniques (mems) radiofrequences sur substrats a ceramiques cocuites a basse temperature (ltcc)
ATE458386T1 (de) * 2001-09-17 2010-03-15 John Stafford Kapselung fuer polarisiertes mems relais und verfahren zur kapselung
US6778046B2 (en) * 2001-09-17 2004-08-17 Magfusion Inc. Latching micro magnetic relay packages and methods of packaging
US20030179057A1 (en) * 2002-01-08 2003-09-25 Jun Shen Packaging of a micro-magnetic switch with a patterned permanent magnet
US20030137374A1 (en) * 2002-01-18 2003-07-24 Meichun Ruan Micro-Magnetic Latching switches with a three-dimensional solenoid coil
US6852926B2 (en) * 2002-03-26 2005-02-08 Intel Corporation Packaging microelectromechanical structures
US6673697B2 (en) * 2002-04-03 2004-01-06 Intel Corporation Packaging microelectromechanical structures
US6713314B2 (en) * 2002-08-14 2004-03-30 Intel Corporation Hermetically packaging a microelectromechanical switch and a film bulk acoustic resonator
US7317232B2 (en) * 2002-10-22 2008-01-08 Cabot Microelectronics Corporation MEM switching device
FR2846318B1 (fr) * 2002-10-24 2005-01-07 Commissariat Energie Atomique Microstructure electromecanique integree comportant des moyens de reglage de la pression dans une cavite scellee et procede de reglage de la pression
US7170155B2 (en) * 2003-06-25 2007-01-30 Intel Corporation MEMS RF switch module including a vertical via
US7795723B2 (en) * 2004-02-05 2010-09-14 Analog Devices, Inc. Capped sensor
US7183622B2 (en) * 2004-06-30 2007-02-27 Intel Corporation Module integrating MEMS and passive components
US7668415B2 (en) 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US7288940B2 (en) * 2004-12-06 2007-10-30 Analog Devices, Inc. Galvanically isolated signal conditioning system
WO2006085825A1 (fr) * 2005-02-08 2006-08-17 Altus Technologies Pte. Ltd. Procede de conditionnement de dispositifs mems et boitiers de dispositifs mems produits a l’aide dudit procede
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TWI275187B (en) * 2005-11-30 2007-03-01 Advanced Semiconductor Eng Flip chip package and manufacturing method of the same
US7524693B2 (en) * 2006-05-16 2009-04-28 Freescale Semiconductor, Inc. Method and apparatus for forming an electrical connection to a semiconductor substrate
US8044755B2 (en) * 2008-04-09 2011-10-25 National Semiconductor Corporation MEMS power inductor
US7705411B2 (en) * 2008-04-09 2010-04-27 National Semiconductor Corporation MEMS-topped integrated circuit with a stress relief layer
ITTO20120542A1 (it) 2012-06-20 2013-12-21 St Microelectronics Srl Dispositivo microelettromeccanico con instradamento dei segnali attraverso un cappuccio protettivo e metodo per controllare un dispositivo microelettromeccanico
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Also Published As

Publication number Publication date
JP2000515676A (ja) 2000-11-21
US6025767A (en) 2000-02-15
EP0916145A1 (fr) 1999-05-19
CA2261683A1 (fr) 1998-02-12
WO1998006118A1 (fr) 1998-02-12
KR20000029835A (ko) 2000-05-25
AU3915897A (en) 1998-02-25

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