HUT54424A - Apparatus for vacuum-evaporative applying layers - Google Patents

Apparatus for vacuum-evaporative applying layers

Info

Publication number
HUT54424A
HUT54424A HU894783A HU478389A HUT54424A HU T54424 A HUT54424 A HU T54424A HU 894783 A HU894783 A HU 894783A HU 478389 A HU478389 A HU 478389A HU T54424 A HUT54424 A HU T54424A
Authority
HU
Hungary
Prior art keywords
vacuum
evaporative
applying layers
chamber
sleeve
Prior art date
Application number
HU894783A
Other languages
Hungarian (hu)
Inventor
Georgijj Timofeevich Levchenko
Aleksandr Nikola Radzikovskijj
Original Assignee
Ki Polt I
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SU884434256A external-priority patent/SU1678899A1/en
Priority claimed from SU884601812A external-priority patent/SU1758084A2/en
Application filed by Ki Polt I filed Critical Ki Polt I
Publication of HUT54424A publication Critical patent/HUT54424A/en

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

Appts. for the vapour deposition in a vacuum of films on substrates comprises evaporating chamber with the material to be evaporated and surrounded by a heating element. A sleeve connects this chamber to an identical collimation chamber. A sleeve on the other side of the latter faces the substrate to be coated.
HU894783A 1988-05-31 1989-01-20 Apparatus for vacuum-evaporative applying layers HUT54424A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SU884434256A SU1678899A1 (en) 1988-05-31 1988-05-31 Device for applying coats in vacuum
SU4601808 1988-11-15
SU884601812A SU1758084A2 (en) 1988-11-15 1988-11-15 Device for application of coatings in vacuo

Publications (1)

Publication Number Publication Date
HUT54424A true HUT54424A (en) 1991-02-28

Family

ID=27356446

Family Applications (1)

Application Number Title Priority Date Filing Date
HU894783A HUT54424A (en) 1988-05-31 1989-01-20 Apparatus for vacuum-evaporative applying layers

Country Status (1)

Country Link
HU (1) HUT54424A (en)

Similar Documents

Publication Publication Date Title
EP0931853A3 (en) Method of depositing barrier coatings by plasma assisted chemical vapour deposition
MY139695A (en) Thin film, method and apparatus for forming the same, and electronic component incorporating the same
WO2000035782A3 (en) Distributed control system architecture and method for a material transport system
JPS57134558A (en) Production of organic vapor deposited thin film
DK0605534T3 (en) Apparatus and Method for Rapid Plasma Treatments
TW263613B (en) Uniform film thickness deposition of sputtered materials
WO1987007651A1 (en) Semiconductor manufacturing apparatus
EP0376333A3 (en) Method for manufacturing polyimide thin film and apparatus
DE3852500D1 (en) PHYSICAL VAPOR DEPOSIT DOUBLE COATING DEVICE AND METHOD.
AU3058789A (en) Method for obtaining transverse uniformity during thin film deposition on extended substrate
AU5935790A (en) Process for coating a glass surface
AU4001097A (en) Laminates
IE800421L (en) Applying a metal layer to a non-conductor
EP1134063A4 (en) Method of producing thin resin films
CA2198983A1 (en) Device for coating a substrate surface
HUT54424A (en) Apparatus for vacuum-evaporative applying layers
JPS53108885A (en) Evaporating device
JPS5620162A (en) Vapor depositing method
JPS5670501A (en) Manufacture of material with function of polarization
DE3882704D1 (en) METHOD FOR VAPOR DEPOSITION.
JPS6442576A (en) Composite sputtering target
JPH04210466A (en) Vacuum film forming device
JPS56142869A (en) Vacuum vapor deposition method
JPS646922A (en) Liquid crystal optical element
JPS57199218A (en) Morecular beam epitaxial growth equipment

Legal Events

Date Code Title Description
DFD9 Temporary prot. cancelled due to non-payment of fee