HUT43910A - Circuit arrangement for controlling electron-beam of the evaporators of electron-beam - Google Patents

Circuit arrangement for controlling electron-beam of the evaporators of electron-beam

Info

Publication number
HUT43910A
HUT43910A HU87729A HU72987A HUT43910A HU T43910 A HUT43910 A HU T43910A HU 87729 A HU87729 A HU 87729A HU 72987 A HU72987 A HU 72987A HU T43910 A HUT43910 A HU T43910A
Authority
HU
Hungary
Prior art keywords
electron
evaporators
circuit arrangement
controlling
controlling electron
Prior art date
Application number
HU87729A
Other languages
English (en)
Hungarian (hu)
Inventor
Vassil B Pentschev
Venzislav I Valkov
Venzislav G Dimitrov
Vladimir S Eterski
Original Assignee
Vtu Angel Kantschev
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vtu Angel Kantschev filed Critical Vtu Angel Kantschev
Publication of HUT43910A publication Critical patent/HUT43910A/hu

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Physical Vapour Deposition (AREA)
HU87729A 1986-03-06 1987-02-25 Circuit arrangement for controlling electron-beam of the evaporators of electron-beam HUT43910A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BG8673938A BG45024A1 (US07166745-20070123-C00083.png) 1986-03-06 1986-03-06

Publications (1)

Publication Number Publication Date
HUT43910A true HUT43910A (en) 1987-12-28

Family

ID=3916884

Family Applications (1)

Application Number Title Priority Date Filing Date
HU87729A HUT43910A (en) 1986-03-06 1987-02-25 Circuit arrangement for controlling electron-beam of the evaporators of electron-beam

Country Status (7)

Country Link
US (1) US4980615A (US07166745-20070123-C00083.png)
JP (1) JPS62219444A (US07166745-20070123-C00083.png)
BG (1) BG45024A1 (US07166745-20070123-C00083.png)
DD (1) DD274347A7 (US07166745-20070123-C00083.png)
DE (1) DE3706269A1 (US07166745-20070123-C00083.png)
FR (1) FR2595505B3 (US07166745-20070123-C00083.png)
HU (1) HUT43910A (US07166745-20070123-C00083.png)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2611983A1 (fr) * 1987-04-29 1988-09-09 Vtu Angel Kantchev Circuit d'alimentation electrique pour un evaporateur a faisceau d'electrons
US6707429B1 (en) * 2002-12-09 2004-03-16 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Self-contained sub-millimeter wave rectifying antenna integrated circuit
CN115464246B (zh) * 2022-09-26 2023-12-22 河北众航高能科技有限公司 一种电子束聚焦磁透镜驱动电路及其电子束焊接设备

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3371185A (en) * 1964-10-05 1968-02-27 United Aircraft Corp Electron beam maintenance device
DE1639010A1 (de) * 1967-09-04 1971-01-21 Elektromat Veb Verfahren zur Regelung eines magnetisch fokussierten und ablenkbaren Ladungstraegerstrahles,insbesondere groesserer Leistung
US3714505A (en) * 1970-12-01 1973-01-30 Bell Telephone Labor Inc Dynamic focus correction apparatus for a rectilinearly raster scanned electron beam
US3952228A (en) * 1974-11-18 1976-04-20 Ion Tech, Inc. Electron-bombardment ion source including alternating potential means for cyclically varying the focussing of ion beamlets
US4039899A (en) * 1976-05-03 1977-08-02 Tektronix, Inc. Geometry and focus correction circuit
SU1050011A1 (ru) * 1982-07-16 1983-10-23 Институт Проблем Литья Усср Устройство стабилизации фокусировки электронного луча в электронно-лучевой установке

Also Published As

Publication number Publication date
FR2595505B3 (fr) 1988-08-26
DD274347A7 (de) 1989-12-20
DE3706269A1 (de) 1987-09-17
US4980615A (en) 1990-12-25
BG45024A1 (US07166745-20070123-C00083.png) 1989-03-15
JPS62219444A (ja) 1987-09-26
FR2595505A1 (fr) 1987-09-11

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Legal Events

Date Code Title Description
DFD9 Temporary prot. cancelled due to non-payment of fee