HUT37843A - Method and device for the ion implantation, for making integrated circuits to the purpose - Google Patents

Method and device for the ion implantation, for making integrated circuits to the purpose

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Publication number
HUT37843A
HUT37843A HU269184A HU269184A HUT37843A HU T37843 A HUT37843 A HU T37843A HU 269184 A HU269184 A HU 269184A HU 269184 A HU269184 A HU 269184A HU T37843 A HUT37843 A HU T37843A
Authority
HU
Hungary
Prior art keywords
electron
target
integrated circuits
ion implantation
right angles
Prior art date
Application number
HU269184A
Other languages
Hungarian (hu)
Other versions
HU191065B (en
Inventor
Tivadar Foeldi
Tibor Balogh
Original Assignee
Tivadar Foeldi
Tibor Balogh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tivadar Foeldi, Tibor Balogh filed Critical Tivadar Foeldi
Priority to HU269184A priority Critical patent/HU191065B/en
Publication of HUT37843A publication Critical patent/HUT37843A/en
Publication of HU191065B publication Critical patent/HU191065B/en

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Abstract

The proposed method is based on known principles, using electron or ion beam sources of controllable strength, accelerating the particles in the beam and using computer controlled electrostatic or electromagnetic fields to deflect the beam to pre-determined locations on the target. In some cases magnetic focussing is used. The proposed equipment is based on the following:- The source of the electron or ion beam is in the form of a cathode ray tube (1). A control electrode (2) is placed between the tube and the anode (3) which is located on the axis of symmetry of the beam, and continued in the form of an accelerator anode cylinder (4). This cylinder is connected to a computer controlled electrostatic or electromagnetic armature pair (5,6). These are followed by focussing and post-accelerator electrodes (6). The target (9) is located in the vicinity of these electrodes, at right angles or nearly at right angles to the beam. (-pp Dwg.No.0/0)
HU269184A 1984-07-10 1984-07-10 Method and apparatus for implanting ions, preferably for making integrated circuits HU191065B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
HU269184A HU191065B (en) 1984-07-10 1984-07-10 Method and apparatus for implanting ions, preferably for making integrated circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HU269184A HU191065B (en) 1984-07-10 1984-07-10 Method and apparatus for implanting ions, preferably for making integrated circuits

Publications (2)

Publication Number Publication Date
HUT37843A true HUT37843A (en) 1986-02-28
HU191065B HU191065B (en) 1987-01-28

Family

ID=10960664

Family Applications (1)

Application Number Title Priority Date Filing Date
HU269184A HU191065B (en) 1984-07-10 1984-07-10 Method and apparatus for implanting ions, preferably for making integrated circuits

Country Status (1)

Country Link
HU (1) HU191065B (en)

Also Published As

Publication number Publication date
HU191065B (en) 1987-01-28

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