HUT37843A - Method and device for the ion implantation, for making integrated circuits to the purpose - Google Patents
Method and device for the ion implantation, for making integrated circuits to the purposeInfo
- Publication number
- HUT37843A HUT37843A HU269184A HU269184A HUT37843A HU T37843 A HUT37843 A HU T37843A HU 269184 A HU269184 A HU 269184A HU 269184 A HU269184 A HU 269184A HU T37843 A HUT37843 A HU T37843A
- Authority
- HU
- Hungary
- Prior art keywords
- electron
- target
- integrated circuits
- ion implantation
- right angles
- Prior art date
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The proposed method is based on known principles, using electron or ion beam sources of controllable strength, accelerating the particles in the beam and using computer controlled electrostatic or electromagnetic fields to deflect the beam to pre-determined locations on the target. In some cases magnetic focussing is used. The proposed equipment is based on the following:- The source of the electron or ion beam is in the form of a cathode ray tube (1). A control electrode (2) is placed between the tube and the anode (3) which is located on the axis of symmetry of the beam, and continued in the form of an accelerator anode cylinder (4). This cylinder is connected to a computer controlled electrostatic or electromagnetic armature pair (5,6). These are followed by focussing and post-accelerator electrodes (6). The target (9) is located in the vicinity of these electrodes, at right angles or nearly at right angles to the beam. (-pp Dwg.No.0/0)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
HU269184A HU191065B (en) | 1984-07-10 | 1984-07-10 | Method and apparatus for implanting ions, preferably for making integrated circuits |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
HU269184A HU191065B (en) | 1984-07-10 | 1984-07-10 | Method and apparatus for implanting ions, preferably for making integrated circuits |
Publications (2)
Publication Number | Publication Date |
---|---|
HUT37843A true HUT37843A (en) | 1986-02-28 |
HU191065B HU191065B (en) | 1987-01-28 |
Family
ID=10960664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HU269184A HU191065B (en) | 1984-07-10 | 1984-07-10 | Method and apparatus for implanting ions, preferably for making integrated circuits |
Country Status (1)
Country | Link |
---|---|
HU (1) | HU191065B (en) |
-
1984
- 1984-07-10 HU HU269184A patent/HU191065B/en unknown
Also Published As
Publication number | Publication date |
---|---|
HU191065B (en) | 1987-01-28 |
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