HUP0004418A3 - Reactive heat treatment process for epitaxialis production of cubic silicium carbide (3c-sic) an the surface layer of silicium
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Reactive heat treatment process for epitaxialis production of cubic silicium carbide (3c-sic) an the surface layer of silicium
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Publication number
HUP0004418A3
HUP0004418A3HU0004418AHUP0004418AHUP0004418A3HU P0004418 A3HUP0004418 A3HU P0004418A3HU 0004418 AHU0004418 AHU 0004418AHU P0004418 AHUP0004418 AHU P0004418AHU P0004418 A3HUP0004418 A3HU P0004418A3
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Application filed by Budapesti Mueszaki Es GazdasagfiledCriticalBudapesti Mueszaki Es Gazdasag
Priority to HU0004418ApriorityCriticalpatent/HUP0004418A3/hu
Publication of HU0004418D0publicationCriticalpatent/HU0004418D0/hu
Publication of HUP0004418A2publicationCriticalpatent/HUP0004418A2/hu
Publication of HUP0004418A3publicationCriticalpatent/HUP0004418A3/hu
HU0004418A2000-11-082000-11-08Reactive heat treatment process for epitaxialis production of cubic silicium carbide (3c-sic) an the surface layer of silicium
HUP0004418A3
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