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Application filed by Budapesti Mueszaki Es Gazdasag, Mta Mueszaki Fiz Es AnyagtudomfiledCriticalBudapesti Mueszaki Es Gazdasag
Priority to HU0004418ApriorityCriticalpatent/HUP0004418A3/hu
Publication of HU0004418D0publicationCriticalpatent/HU0004418D0/hu
Publication of HUP0004418A2publicationCriticalpatent/HUP0004418A2/hu
Publication of HUP0004418A3publicationCriticalpatent/HUP0004418A3/hu
HU0004418A2000-11-082000-11-08Reactive heat treatment process for epitaxialis production of cubic silicium carbide (3c-sic) an the surface layer of silicium
HUP0004418A3
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