HUE064902T2 - Interferometria elektromágneses mezõk egy akromatikus interferometrikus szuperpozíciójával - Google Patents

Interferometria elektromágneses mezõk egy akromatikus interferometrikus szuperpozíciójával

Info

Publication number
HUE064902T2
HUE064902T2 HUE18750340A HUE18750340A HUE064902T2 HU E064902 T2 HUE064902 T2 HU E064902T2 HU E18750340 A HUE18750340 A HU E18750340A HU E18750340 A HUE18750340 A HU E18750340A HU E064902 T2 HUE064902 T2 HU E064902T2
Authority
HU
Hungary
Prior art keywords
interferometry
electromagnetic fields
achromatic
interferometric superposition
superposition
Prior art date
Application number
HUE18750340A
Other languages
English (en)
Inventor
Ioachim Pupeza
Ferenc Krausz
Theresa Buberl
Original Assignee
Max Planck Gesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft filed Critical Max Planck Gesellschaft
Publication of HUE064902T2 publication Critical patent/HUE064902T2/hu

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0224—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4535—Devices with moving mirror
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/65—Spatial scanning object beam

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • Signal Processing (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
HUE18750340A 2018-07-16 2018-07-16 Interferometria elektromágneses mezõk egy akromatikus interferometrikus szuperpozíciójával HUE064902T2 (hu)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/EP2018/069229 WO2020015809A1 (en) 2018-07-16 2018-07-16 Interferometry with an achromatic interferometric superposition of electromagnetic fields
EP18750340.4A EP3824245B1 (en) 2018-07-16 2018-07-16 Interferometry with an achromatic interferometric superposition of electromagnetic fields

Publications (1)

Publication Number Publication Date
HUE064902T2 true HUE064902T2 (hu) 2024-04-28

Family

ID=63113473

Family Applications (1)

Application Number Title Priority Date Filing Date
HUE18750340A HUE064902T2 (hu) 2018-07-16 2018-07-16 Interferometria elektromágneses mezõk egy akromatikus interferometrikus szuperpozíciójával

Country Status (8)

Country Link
US (1) US11408724B2 (hu)
EP (1) EP3824245B1 (hu)
JP (1) JP7185756B2 (hu)
KR (1) KR102613120B1 (hu)
CN (1) CN112424560B (hu)
CA (1) CA3103494A1 (hu)
HU (1) HUE064902T2 (hu)
WO (1) WO2020015809A1 (hu)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3872464B1 (en) 2020-02-28 2024-05-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for imaging or spectroscopy with a non-linear interferometer
US20240069261A1 (en) * 2022-08-23 2024-02-29 Photonic Inc. Suppression of excitation field for quantum light emitters using optical interferometers

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2169141A1 (en) * 1995-04-07 1996-10-08 Ivan Prikryl Interferometer having a micromirror
US5995223A (en) * 1998-06-01 1999-11-30 Power; Joan Fleurette Apparatus for rapid phase imaging interferometry and method therefor
US7583710B2 (en) * 2001-01-30 2009-09-01 Board Of Trustees Operating Michigan State University Laser and environmental monitoring system
US6806965B2 (en) 2001-05-22 2004-10-19 Zygo Corporation Wavefront and intensity analyzer for collimated beams
US6760499B2 (en) * 2001-07-31 2004-07-06 Jds Uniphase Corporation Birefringence compensated integrated optical switching or modulation device
US7126131B2 (en) * 2003-01-16 2006-10-24 Metrosol, Inc. Broad band referencing reflectometer
CN103082996A (zh) 2003-10-27 2013-05-08 通用医疗公司 用于使用频域干涉测量法进行光学成像的方法和设备
TWI428582B (zh) * 2005-01-20 2014-03-01 Zygo Corp 用於檢測物體表面之特性的干涉裝置以及干涉方法
CN101055336A (zh) * 2006-04-13 2007-10-17 中国科学院半导体研究所 一种非对称马赫泽德干涉仪及其设计方法
CN102109732B (zh) * 2009-12-23 2013-10-30 菲尼萨公司 差分正交相移键控解调器
CN101806733B (zh) * 2010-03-11 2011-11-09 中国科学院上海光学精密机械研究所 飞秒数字全息动态观察测量装置
US8922787B2 (en) * 2013-01-07 2014-12-30 Si-Ware Systems Spatial splitting-based optical MEMS interferometers
DE102014111979A1 (de) 2014-08-21 2016-02-25 Martin Berz Interferometer

Also Published As

Publication number Publication date
WO2020015809A1 (en) 2020-01-23
JP7185756B2 (ja) 2022-12-07
EP3824245A1 (en) 2021-05-26
US11408724B2 (en) 2022-08-09
US20210270596A1 (en) 2021-09-02
EP3824245B1 (en) 2023-08-23
CN112424560B (zh) 2023-10-17
KR102613120B1 (ko) 2023-12-13
CN112424560A (zh) 2021-02-26
JP2021530685A (ja) 2021-11-11
CA3103494A1 (en) 2020-01-23
KR20210033021A (ko) 2021-03-25

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