HU168264B - - Google Patents
Info
- Publication number
- HU168264B HU168264B HUMA002555A HU168264B HU 168264 B HU168264 B HU 168264B HU MA002555 A HUMA002555 A HU MA002555A HU 168264 B HU168264 B HU 168264B
- Authority
- HU
- Hungary
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2002—Controlling environment of sample
- H01J2237/2003—Environmental cells
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Biological Materials (AREA)
- Microscoopes, Condenser (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
HUMA002555 HU168264B (en) | 1974-03-28 | 1974-03-28 | |
GB1101575A GB1504984A (en) | 1974-03-28 | 1975-03-17 | Micro-chamber for electron optical examinations |
NL7503645A NL7503645A (en) | 1974-03-28 | 1975-03-26 | MICRO-CHAMBER FOR ELECTRONIC-OPTICAL EXAMINATIONS, MORE PARTICULARLY FOR THE ELECTRONIC-MICROSCOPIC EXAMINATION OF BIOLOGICAL OBJECTS. |
FR7509487A FR2266299B3 (en) | 1974-03-28 | 1975-03-26 | |
DE19752513832 DE2513832C2 (en) | 1974-03-28 | 1975-03-27 | Arrangement for the electron-optical examination of samples |
JP3771775A JPS50141968A (en) | 1974-03-28 | 1975-03-28 | |
US05/683,832 US4071766A (en) | 1974-03-28 | 1976-05-06 | Micro-chamber for electron optical examinations particularly for the electron microscopic examination of biological objects |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
HUMA002555 HU168264B (en) | 1974-03-28 | 1974-03-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
HU168264B true HU168264B (en) | 1976-03-28 |
Family
ID=10998701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HUMA002555 HU168264B (en) | 1974-03-28 | 1974-03-28 |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS50141968A (en) |
DE (1) | DE2513832C2 (en) |
FR (1) | FR2266299B3 (en) |
GB (1) | GB1504984A (en) |
HU (1) | HU168264B (en) |
NL (1) | NL7503645A (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2794471B2 (en) * | 1989-11-24 | 1998-09-03 | 日本電子テクニクス株式会社 | electronic microscope |
IL150056A0 (en) * | 2002-06-05 | 2002-12-01 | Yeda Res & Dev | Low-pressure chamber for scanning electron microscopy in a wet environment |
DE10256718B4 (en) * | 2002-12-04 | 2004-10-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device for examining samples using an atmospheric or pressure-variable scanning electron microscope |
CN1862250A (en) * | 2005-05-09 | 2006-11-15 | 李炳寰 | Method and apparatus for operating liquid and observing in vacuum or low pressure environment |
JP6364167B2 (en) * | 2013-09-30 | 2018-07-25 | 株式会社日立ハイテクノロジーズ | Environmentally controlled charged particle observation system |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE911409C (en) * | 1942-04-29 | 1954-05-13 | Siemens Ag | Corpuscular beam apparatus, in particular an electron microscope |
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1974
- 1974-03-28 HU HUMA002555 patent/HU168264B/hu unknown
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1975
- 1975-03-17 GB GB1101575A patent/GB1504984A/en not_active Expired
- 1975-03-26 NL NL7503645A patent/NL7503645A/en not_active Application Discontinuation
- 1975-03-26 FR FR7509487A patent/FR2266299B3/fr not_active Expired
- 1975-03-27 DE DE19752513832 patent/DE2513832C2/en not_active Expired
- 1975-03-28 JP JP3771775A patent/JPS50141968A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS50141968A (en) | 1975-11-15 |
NL7503645A (en) | 1975-09-30 |
FR2266299B3 (en) | 1977-07-01 |
FR2266299A1 (en) | 1975-10-24 |
DE2513832C2 (en) | 1981-10-08 |
GB1504984A (en) | 1978-03-22 |
DE2513832A1 (en) | 1975-10-02 |