HU167114B - - Google Patents
Info
- Publication number
- HU167114B HU167114B HUEE002160A HU167114B HU 167114 B HU167114 B HU 167114B HU EE002160 A HUEE002160 A HU EE002160A HU 167114 B HU167114 B HU 167114B
- Authority
- HU
- Hungary
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| HUEE002160 HU167114B (en) | 1973-07-24 | 1973-07-24 | |
| DE19742406117 DE2406117A1 (en) | 1973-07-24 | 1974-02-06 | Etching semiconductor slices before doping - with mixt. of metaperiodic and hydrofluoric acids |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| HUEE002160 HU167114B (en) | 1973-07-24 | 1973-07-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| HU167114B true HU167114B (en) | 1975-08-28 |
Family
ID=10995517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| HUEE002160 HU167114B (en) | 1973-07-24 | 1973-07-24 |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE2406117A1 (en) |
| HU (1) | HU167114B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5580828A (en) * | 1992-12-16 | 1996-12-03 | Semiconductor Physics Laboratory Rt | Method for chemical surface passivation for in-situ bulk lifetime measurement of silicon semiconductor material |
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1973
- 1973-07-24 HU HUEE002160 patent/HU167114B/hu unknown
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1974
- 1974-02-06 DE DE19742406117 patent/DE2406117A1/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| DE2406117A1 (en) | 1975-02-20 |