HK35076A - Method of forming an iron oxide film - Google Patents
Method of forming an iron oxide filmInfo
- Publication number
- HK35076A HK35076A HK350/76*UA HK35076A HK35076A HK 35076 A HK35076 A HK 35076A HK 35076 A HK35076 A HK 35076A HK 35076 A HK35076 A HK 35076A
- Authority
- HK
- Hong Kong
- Prior art keywords
- forming
- oxide film
- iron oxide
- iron
- film
- Prior art date
Links
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 title 2
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/085—Oxides of iron group metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10147870A | 1970-12-28 | 1970-12-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
HK35076A true HK35076A (en) | 1976-06-18 |
Family
ID=22284863
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK350/76*UA HK35076A (en) | 1970-12-28 | 1976-06-10 | Method of forming an iron oxide film |
Country Status (13)
Country | Link |
---|---|
US (1) | US3669863A (xx) |
JP (1) | JPS5128080B1 (xx) |
KR (1) | KR780000519B1 (xx) |
BE (1) | BE777203A (xx) |
CA (1) | CA937199A (xx) |
CH (1) | CH585603A5 (xx) |
DE (1) | DE2163077C3 (xx) |
FR (1) | FR2120025B1 (xx) |
GB (1) | GB1373416A (xx) |
HK (1) | HK35076A (xx) |
IT (1) | IT945644B (xx) |
NL (1) | NL170025C (xx) |
SE (1) | SE370727B (xx) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4096026A (en) * | 1976-07-27 | 1978-06-20 | Toppan Printing Co., Ltd. | Method of manufacturing a chromium oxide film |
US5942090A (en) | 1996-04-12 | 1999-08-24 | Asahi Glass Company Ltd. | Methods of producing a laminate |
US10964590B2 (en) * | 2017-11-15 | 2021-03-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Contact metallization process |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1104935A (en) * | 1964-05-08 | 1968-03-06 | Standard Telephones Cables Ltd | Improvements in or relating to a method of forming a layer of an inorganic compound |
US3461054A (en) * | 1966-03-24 | 1969-08-12 | Bell Telephone Labor Inc | Cathodic sputtering from a cathodically biased target electrode having an rf potential superimposed on the cathodic bias |
-
1970
- 1970-12-28 US US101478A patent/US3669863A/en not_active Expired - Lifetime
-
1971
- 1971-07-30 CA CA119541A patent/CA937199A/en not_active Expired
- 1971-12-15 SE SE7116061A patent/SE370727B/xx unknown
- 1971-12-18 DE DE2163077A patent/DE2163077C3/de not_active Expired
- 1971-12-23 GB GB5990371A patent/GB1373416A/en not_active Expired
- 1971-12-23 BE BE777203A patent/BE777203A/xx not_active IP Right Cessation
- 1971-12-24 IT IT54995/71A patent/IT945644B/it active
- 1971-12-27 KR KR7101869A patent/KR780000519B1/ko active
- 1971-12-27 NL NLAANVRAGE7117890,A patent/NL170025C/xx not_active IP Right Cessation
- 1971-12-27 FR FR7146745A patent/FR2120025B1/fr not_active Expired
- 1971-12-27 CH CH1898871A patent/CH585603A5/xx not_active IP Right Cessation
- 1971-12-28 JP JP47003650A patent/JPS5128080B1/ja active Pending
-
1976
- 1976-06-10 HK HK350/76*UA patent/HK35076A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
JPS5128080B1 (xx) | 1976-08-17 |
DE2163077B2 (de) | 1974-07-25 |
FR2120025B1 (xx) | 1974-06-07 |
NL7117890A (xx) | 1972-06-30 |
US3669863A (en) | 1972-06-13 |
CH585603A5 (xx) | 1977-03-15 |
IT945644B (it) | 1973-05-10 |
KR780000519B1 (en) | 1978-10-26 |
BE777203A (fr) | 1972-04-17 |
NL170025C (nl) | 1982-09-16 |
SE370727B (xx) | 1974-10-28 |
DE2163077C3 (de) | 1975-03-06 |
DE2163077A1 (de) | 1972-07-13 |
CA937199A (en) | 1973-11-20 |
NL170025B (nl) | 1982-04-16 |
GB1373416A (en) | 1974-11-13 |
FR2120025A1 (xx) | 1972-08-11 |
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