HK1170065A1 - 曝光設備、曝光方法和製造裝置的方法 - Google Patents

曝光設備、曝光方法和製造裝置的方法

Info

Publication number
HK1170065A1
HK1170065A1 HK12110801.4A HK12110801A HK1170065A1 HK 1170065 A1 HK1170065 A1 HK 1170065A1 HK 12110801 A HK12110801 A HK 12110801A HK 1170065 A1 HK1170065 A1 HK 1170065A1
Authority
HK
Hong Kong
Prior art keywords
exposure
producing device
exposure apparatus
producing
exposure method
Prior art date
Application number
HK12110801.4A
Other languages
English (en)
Inventor
Hiroyuki Nagasaka
Soichi Owa
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of HK1170065A1 publication Critical patent/HK1170065A1/zh

Links

HK12110801.4A 2003-02-26 2012-10-29 曝光設備、曝光方法和製造裝置的方法 HK1170065A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003049365 2003-02-26
JP2003110748 2003-04-15

Publications (1)

Publication Number Publication Date
HK1170065A1 true HK1170065A1 (zh) 2013-02-15

Family

ID=54842967

Family Applications (1)

Application Number Title Priority Date Filing Date
HK12110801.4A HK1170065A1 (zh) 2003-02-26 2012-10-29 曝光設備、曝光方法和製造裝置的方法

Country Status (1)

Country Link
HK (1) HK1170065A1 (zh)

Similar Documents

Publication Publication Date Title
HK1259349A1 (zh) 曝光裝置、曝光方法及生產設備的方法
HK1247997A1 (zh) 曝光裝置、曝光方法以及器件製造方法
HK1244547A1 (zh) 曝光方法和裝置以及製造裝置的方法
HK1206112A1 (zh) 曝光設備、曝光方法和用於產生裝置的方法
HK1151107A1 (en) Exposure apparatus, method for producing device, and exposure method
HK1205282A1 (zh) 曝光方法、曝光設備和生産器件的方法
IL223536A0 (en) Exposure apparatus, exposure method, method for producing device and optical part
IL179826A0 (en) Exposure apparatus, exposure method, and device producing method
HK1091596A1 (zh) 曝光裝置、曝光方法以及設備製造方法
SG10201607457PA (en) Exposure apparatus, exposure method and device manufacturing method
HK1225810B (zh) 曝光裝置、曝光方法以及元件製造方法
HK1100791A1 (en) Exposure apparatus and exposure method, and device producing method
HK1170065A1 (zh) 曝光設備、曝光方法和製造裝置的方法

Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20200225