HK1170065A1 - Exposure apparatus, exposure method, and method for producing device - Google Patents

Exposure apparatus, exposure method, and method for producing device

Info

Publication number
HK1170065A1
HK1170065A1 HK12110801.4A HK12110801A HK1170065A1 HK 1170065 A1 HK1170065 A1 HK 1170065A1 HK 12110801 A HK12110801 A HK 12110801A HK 1170065 A1 HK1170065 A1 HK 1170065A1
Authority
HK
Hong Kong
Prior art keywords
exposure
producing device
exposure apparatus
producing
exposure method
Prior art date
Application number
HK12110801.4A
Other languages
Chinese (zh)
Inventor
Hiroyuki Nagasaka
Soichi Owa
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of HK1170065A1 publication Critical patent/HK1170065A1/en

Links

HK12110801.4A 2003-02-26 2012-10-29 Exposure apparatus, exposure method, and method for producing device HK1170065A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003049365 2003-02-26
JP2003110748 2003-04-15

Publications (1)

Publication Number Publication Date
HK1170065A1 true HK1170065A1 (en) 2013-02-15

Family

ID=54842967

Family Applications (1)

Application Number Title Priority Date Filing Date
HK12110801.4A HK1170065A1 (en) 2003-02-26 2012-10-29 Exposure apparatus, exposure method, and method for producing device

Country Status (1)

Country Link
HK (1) HK1170065A1 (en)

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20200225