HK1110113A1 - Humidity sensor and semiconductor device including the same - Google Patents

Humidity sensor and semiconductor device including the same

Info

Publication number
HK1110113A1
HK1110113A1 HK08100452.3A HK08100452A HK1110113A1 HK 1110113 A1 HK1110113 A1 HK 1110113A1 HK 08100452 A HK08100452 A HK 08100452A HK 1110113 A1 HK1110113 A1 HK 1110113A1
Authority
HK
Hong Kong
Prior art keywords
humidity sensor
same
semiconductor device
device including
humidity
Prior art date
Application number
HK08100452.3A
Other languages
English (en)
Inventor
Minoru Sudo
Original Assignee
Seiko Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instr Inc filed Critical Seiko Instr Inc
Publication of HK1110113A1 publication Critical patent/HK1110113A1/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
HK08100452.3A 2006-01-18 2008-01-14 Humidity sensor and semiconductor device including the same HK1110113A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006009908A JP4732902B2 (ja) 2006-01-18 2006-01-18 湿度センサおよびそれを有する半導体装置

Publications (1)

Publication Number Publication Date
HK1110113A1 true HK1110113A1 (en) 2008-07-04

Family

ID=38366927

Family Applications (1)

Application Number Title Priority Date Filing Date
HK08100452.3A HK1110113A1 (en) 2006-01-18 2008-01-14 Humidity sensor and semiconductor device including the same

Country Status (4)

Country Link
US (1) US7594435B2 (zh)
JP (1) JP4732902B2 (zh)
CN (1) CN101004398B (zh)
HK (1) HK1110113A1 (zh)

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JP2009092633A (ja) * 2007-10-12 2009-04-30 Denso Corp インピーダンスセンサ
EP2336758B1 (en) * 2009-12-16 2012-08-29 Nxp B.V. Capacitive sensor
US20120167392A1 (en) 2010-12-30 2012-07-05 Stmicroelectronics Pte. Ltd. Razor with chemical and biological sensor
US9027400B2 (en) * 2011-12-02 2015-05-12 Stmicroelectronics Pte Ltd. Tunable humidity sensor with integrated heater
US9019688B2 (en) 2011-12-02 2015-04-28 Stmicroelectronics Pte Ltd. Capacitance trimming with an integrated heater
CN102692432B (zh) * 2012-05-29 2014-04-30 张家港丽恒光微电子科技有限公司 集成式湿度传感器及制造方法
KR20150028929A (ko) * 2013-09-06 2015-03-17 매그나칩 반도체 유한회사 정전용량형 습도센서
KR102187614B1 (ko) * 2014-07-02 2020-12-08 주식회사 키 파운드리 커패시터형 습도센서
CN104089986A (zh) * 2014-07-04 2014-10-08 河海大学 一种湿度传感器的制备及检测方法
JP6535185B2 (ja) * 2015-03-04 2019-06-26 エイブリック株式会社 湿度センサ
WO2017130962A1 (ja) * 2016-01-29 2017-08-03 シャープ株式会社 センサ装置
US10618376B2 (en) * 2016-10-28 2020-04-14 Hyundai America Technical Center, Inc Automatic vehicular defogging system
JP6923657B2 (ja) * 2017-08-25 2021-08-25 京セラ株式会社 センサ基板およびそれを備えるセンサ装置
CN107748184B (zh) * 2017-08-31 2020-11-24 南方科技大学 湿度传感器及其制备方法
CN110779956B (zh) * 2018-07-31 2022-06-24 北京纳米能源与系统研究所 湿度传感器及其制备方法
CN109655492A (zh) * 2018-11-12 2019-04-19 浙江大学 一种基于摩擦纳米发电机的湿度传感器及其方法
CN110108762A (zh) * 2019-04-08 2019-08-09 浙江省北大信息技术高等研究院 一种湿度传感器及其制造方法
CN113252741A (zh) * 2021-05-17 2021-08-13 东南大学 一种柔性湿度传感器及其制备方法

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
DE1598446A1 (de) * 1966-05-03 1969-06-26 Hoechst Ag Feuchtigkeitsmessfuehler
US4845421A (en) * 1986-10-10 1989-07-04 Mineral Control Instrumentation Ltd. Method and apparatus for measuring the moisture content of a substance
DE4016434A1 (de) * 1990-05-22 1991-11-28 Bosch Gmbh Robert Kapazitiver stellungsgeber
CN2085963U (zh) * 1991-01-31 1991-10-02 中国建筑科学研究院空调研究所 薄膜型结露传感器
JPH08145932A (ja) * 1994-09-20 1996-06-07 Nippon Soken Inc 湿度センサおよびその製造方法
US5767867A (en) * 1995-11-27 1998-06-16 Sun Microsystems, Inc. Method for alpha blending images utilizing a visual instruction set
JP2001004579A (ja) * 1999-06-16 2001-01-12 Shinei Kk 容量式感湿素子
JP2001056310A (ja) * 1999-08-20 2001-02-27 Sony Corp 半導体装置の検査方法
TW507073B (en) * 2000-03-31 2002-10-21 Tdk Corp Humidity sensor and method for making
JP2002365256A (ja) * 2001-06-07 2002-12-18 Denso Corp 湿度センサ
US20020142478A1 (en) * 2001-03-28 2002-10-03 Hiroyuki Wado Gas sensor and method of fabricating a gas sensor
JP2003156464A (ja) * 2001-11-19 2003-05-30 Denso Corp 容量式湿度センサ
US6765793B2 (en) * 2002-08-30 2004-07-20 Themis Corporation Ruggedized electronics enclosure
JP3994975B2 (ja) * 2004-02-27 2007-10-24 株式会社デンソー 容量式湿度センサ

Also Published As

Publication number Publication date
JP2007192622A (ja) 2007-08-02
US7594435B2 (en) 2009-09-29
US20070186649A1 (en) 2007-08-16
JP4732902B2 (ja) 2011-07-27
CN101004398A (zh) 2007-07-25
CN101004398B (zh) 2013-03-06

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20210120