HK1070941A1 - Pressure detection device and method for contact plating - Google Patents

Pressure detection device and method for contact plating

Info

Publication number
HK1070941A1
HK1070941A1 HK05103567A HK05103567A HK1070941A1 HK 1070941 A1 HK1070941 A1 HK 1070941A1 HK 05103567 A HK05103567 A HK 05103567A HK 05103567 A HK05103567 A HK 05103567A HK 1070941 A1 HK1070941 A1 HK 1070941A1
Authority
HK
Hong Kong
Prior art keywords
detection device
pressure detection
contact plating
plating
contact
Prior art date
Application number
HK05103567A
Other languages
English (en)
Inventor
Joern Jacob
Original Assignee
Grieshaber Vega Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Grieshaber Vega Kg filed Critical Grieshaber Vega Kg
Publication of HK1070941A1 publication Critical patent/HK1070941A1/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
HK05103567A 2003-05-08 2005-04-26 Pressure detection device and method for contact plating HK1070941A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10320478A DE10320478B3 (de) 2003-05-08 2003-05-08 Druck-Messanordnung mit einer Durchkontaktierung durch einen Distanzhalter zwischen einer Membran und einem Grundkörper sowie Verfahren zum Kontaktieren

Publications (1)

Publication Number Publication Date
HK1070941A1 true HK1070941A1 (en) 2005-06-30

Family

ID=32731176

Family Applications (1)

Application Number Title Priority Date Filing Date
HK05103567A HK1070941A1 (en) 2003-05-08 2005-04-26 Pressure detection device and method for contact plating

Country Status (5)

Country Link
US (1) US7066030B2 (xx)
EP (1) EP1475623B1 (xx)
CN (1) CN100380106C (xx)
DE (2) DE10320478B3 (xx)
HK (1) HK1070941A1 (xx)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5943914A (en) * 1997-03-27 1999-08-31 Sandia Corporation Master-slave micromanipulator apparatus
DE102007026243A1 (de) * 2007-06-04 2008-12-11 Endress + Hauser Gmbh + Co. Kg Kapazitiver Drucksensor
TWI383130B (zh) * 2009-07-13 2013-01-21 Univ Nat Taiwan 電容式壓力感測器裝置及其製造方法
DE102010003145A1 (de) * 2010-03-23 2011-09-29 Endress + Hauser Gmbh + Co. Kg Drucksensor
JP2012247372A (ja) * 2011-05-30 2012-12-13 Nippon Mektron Ltd 圧力センサ及びその製造方法並びに圧力検出モジュール
DE102011084612A1 (de) 2011-10-17 2013-04-18 Endress + Hauser Gmbh + Co. Kg Keramische Druckmesszelle mit kapazitivem Wandler
DE102014101700A1 (de) * 2014-02-12 2015-08-13 Vega Grieshaber Kg Druckmesszelle
CN110044537A (zh) * 2019-03-27 2019-07-23 西人马联合测控（泉州）科技有限公司 压力传感器及其制造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1450709A (en) * 1973-12-31 1976-09-29 Birchall D J Pressure transducers
US4839700A (en) * 1987-12-16 1989-06-13 California Institute Of Technology Solid-state non-volatile electronically programmable reversible variable resistance device
DE4231120C2 (de) * 1992-09-17 2002-01-24 Mannesmann Vdo Ag Drucksensor
US5561247A (en) * 1993-03-30 1996-10-01 Honda Motor Co., Ltd. Pressure sensor
US5436795A (en) * 1994-03-28 1995-07-25 Texas Instruments Incorporated Pressure transducer apparatus and method for making same
DE59606342D1 (de) * 1996-03-23 2001-02-22 Endress Hauser Gmbh Co Verfahren zum Herstellen von kapazitiven, in Nullpunkt-Langzeit-Fehlerklassen sortierten Keramik-Absolutdruck-Sensoren
US5983727A (en) * 1997-08-19 1999-11-16 Pressure Profile Systems System generating a pressure profile across a pressure sensitive membrane
US6184096B1 (en) * 1997-11-05 2001-02-06 Micron Technology, Inc. Semiconductor processing method of providing dopant impurity into a semiconductor substrate
US6267009B1 (en) * 1998-12-14 2001-07-31 Endress + Hauser Gmbh + Co. Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same
DE19910078A1 (de) * 1999-03-08 2000-09-28 Bosch Gmbh Robert Verfahren zur Erhöung der Fertigungssicherheit von Lötverbindungen
US6578427B1 (en) * 1999-06-15 2003-06-17 Envec Mess- Und Regeltechnik Gmbh + Co. Capacitive ceramic relative-pressure sensor
DE19960338A1 (de) * 1999-12-15 2001-07-05 Bosch Gmbh Robert Gassensor zur Bestimmung der Konzentration von Gaskomponenten in Gasgemischen und dessen Verwendung
DE10052053A1 (de) * 2000-10-19 2002-04-25 Endress Hauser Gmbh Co Druckmeßzelle
DE10122414A1 (de) * 2001-05-09 2002-11-14 Giesecke & Devrient Gmbh Durchkontaktierung von flexiblen Leiterplatten
US6536287B2 (en) * 2001-08-16 2003-03-25 Honeywell International, Inc. Simplified capacitance pressure sensor

Also Published As

Publication number Publication date
US7066030B2 (en) 2006-06-27
EP1475623A1 (de) 2004-11-10
EP1475623B1 (de) 2006-05-31
CN100380106C (zh) 2008-04-09
CN1550767A (zh) 2004-12-01
DE502004000644D1 (de) 2006-07-06
DE10320478B3 (de) 2004-08-19
US20040250627A1 (en) 2004-12-16

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20120426