HK1066262A1 - Method for treating exhaust gas - Google Patents

Method for treating exhaust gas

Info

Publication number
HK1066262A1
HK1066262A1 HK04109106A HK04109106A HK1066262A1 HK 1066262 A1 HK1066262 A1 HK 1066262A1 HK 04109106 A HK04109106 A HK 04109106A HK 04109106 A HK04109106 A HK 04109106A HK 1066262 A1 HK1066262 A1 HK 1066262A1
Authority
HK
Hong Kong
Prior art keywords
exhaust gas
treating exhaust
treating
gas
exhaust
Prior art date
Application number
HK04109106A
Inventor
Hiroyasu Taguchi
Yasuyiki Hoshino
Byoung-Sup Park
Bingzhe Jin
Original Assignee
Showa Denko Kk
Koike Sanso Kogyo Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko Kk, Koike Sanso Kogyo Kk filed Critical Showa Denko Kk
Publication of HK1066262A1 publication Critical patent/HK1066262A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2215/00—Preventing emissions
    • F23J2215/30—Halogen; Compounds thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Treating Waste Gases (AREA)
  • Incineration Of Waste (AREA)
  • Drying Of Semiconductors (AREA)
HK04109106A 2002-02-14 2004-11-18 Method for treating exhaust gas HK1066262A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002037344A JP4172938B2 (en) 2002-02-14 2002-02-14 Exhaust gas treatment method and treatment apparatus
PCT/JP2003/001507 WO2003069228A1 (en) 2002-02-14 2003-02-13 Method for treating exhaust gas

Publications (1)

Publication Number Publication Date
HK1066262A1 true HK1066262A1 (en) 2005-03-18

Family

ID=27678109

Family Applications (1)

Application Number Title Priority Date Filing Date
HK04109106A HK1066262A1 (en) 2002-02-14 2004-11-18 Method for treating exhaust gas

Country Status (8)

Country Link
US (1) US20050115674A1 (en)
JP (1) JP4172938B2 (en)
KR (1) KR100544760B1 (en)
CN (1) CN1259524C (en)
AU (1) AU2003211966A1 (en)
HK (1) HK1066262A1 (en)
TW (1) TW592797B (en)
WO (1) WO2003069228A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4751091B2 (en) * 2005-04-08 2011-08-17 関東電化工業株式会社 Exhaust gas treatment method
GB0509944D0 (en) * 2005-05-16 2005-06-22 Boc Group Plc Gas combustion apparatus
JP4912163B2 (en) * 2007-01-12 2012-04-11 ステラケミファ株式会社 Carbon steel or special steel formed with a fluorinated passive film and method for forming the same
JP5659491B2 (en) * 2009-01-30 2015-01-28 セントラル硝子株式会社 Semiconductor manufacturing equipment including fluorine gas generator
JP2010276307A (en) * 2009-05-29 2010-12-09 Japan Pionics Co Ltd Thermal decomposition device
CN102163643B (en) * 2010-10-09 2013-01-02 浙江哈氟龙新能源有限公司 Waste gas treatment thermal cycle drying system
US9084975B2 (en) * 2012-08-20 2015-07-21 Sabic Global Technologies B.V. Real-time online determination of caustic in process scrubbers using near infrared spectroscopy and chemometrics
JP6257442B2 (en) * 2014-05-15 2018-01-10 東京エレクトロン株式会社 Exhaust gas explosion-proof method in vacuum processing equipment
FR3043080B1 (en) * 2015-11-04 2021-01-08 Haffner Energy HYPERGAS SYNTHETIC GAS PRODUCTION PROCESS
CN106884134B (en) * 2015-12-16 2020-07-03 中国科学院上海应用物理研究所 Surface passivation treatment method of nickel-based alloy
GB2554406A (en) * 2016-09-26 2018-04-04 Edwards Korea Ltd Plasma abatement
CN106524191A (en) * 2016-10-31 2017-03-22 江苏优瑞德环境科技有限公司 Fluorine-contained alkane waste gas incineration treatment process and device
JPWO2021106602A1 (en) * 2019-11-27 2021-06-03
CN113767281A (en) * 2019-11-27 2021-12-07 昭和电工株式会社 Method for measuring fluorine gas concentration in halogen-containing fluoride gas by mass spectrometer
CN112827341B (en) * 2020-12-25 2022-05-17 北京京仪自动化装备技术股份有限公司 Waste gas treatment system of semiconductor process and waste gas treatment method thereof

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4236464A (en) * 1978-03-06 1980-12-02 Aerojet-General Corporation Incineration of noxious materials
JPS63166783A (en) * 1986-12-27 1988-07-09 三石耐火煉瓦株式会社 Refractory brick for trash incinerator
DE68907366T2 (en) * 1988-04-11 1993-12-02 Mitsui Toatsu Chemicals Process for refining nitrogen trifluoride gas.
JPH01261208A (en) * 1988-04-11 1989-10-18 Mitsui Toatsu Chem Inc Method for purifying nitrogen trifluoride gas
US5009963A (en) * 1988-07-20 1991-04-23 Tadahiro Ohmi Metal material with film passivated by fluorination and apparatus composed of the metal material
FR2667134B1 (en) * 1990-09-24 1995-07-21 Pavese Guy METHOD FOR IMPROVING COMBUSTION FOR A BLOW AIR BURNER AND MEANS FOR CARRYING OUT IT.
US5510093A (en) * 1994-07-25 1996-04-23 Alzeta Corporation Combustive destruction of halogenated compounds
JPH1179871A (en) * 1997-08-27 1999-03-23 Harima Ceramic Co Ltd Lining structure of incinerator
US6146606A (en) * 1999-02-09 2000-11-14 Showa Denko Kabushiki Kaisha Reactive agent and process for decomposing nitrogen fluoride
US6630421B1 (en) * 1999-04-28 2003-10-07 Showa Denko Kabushiki Kaisha Reactive agent and process for decomposing fluorine compounds and use thereof
JP3460122B2 (en) * 1999-07-14 2003-10-27 日本酸素株式会社 Combustion type abatement system and burner for combustion abatement system
JP4127447B2 (en) * 1999-08-26 2008-07-30 日新製鋼株式会社 Incinerator body with excellent high temperature corrosion resistance and incinerator facilities
WO2001033141A1 (en) * 1999-11-02 2001-05-10 Ebara Corporation Combustor for exhaust gas treatment

Also Published As

Publication number Publication date
JP2003236337A (en) 2003-08-26
AU2003211966A1 (en) 2003-09-04
CN1259524C (en) 2006-06-14
WO2003069228A1 (en) 2003-08-21
KR100544760B1 (en) 2006-01-24
TW592797B (en) 2004-06-21
TW200303236A (en) 2003-09-01
JP4172938B2 (en) 2008-10-29
US20050115674A1 (en) 2005-06-02
KR20030085596A (en) 2003-11-05
CN1498328A (en) 2004-05-19

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20120213