HK1046883A1 - 微型機電器件中的故障檢測 - Google Patents

微型機電器件中的故障檢測

Info

Publication number
HK1046883A1
HK1046883A1 HK02108356.9A HK02108356A HK1046883A1 HK 1046883 A1 HK1046883 A1 HK 1046883A1 HK 02108356 A HK02108356 A HK 02108356A HK 1046883 A1 HK1046883 A1 HK 1046883A1
Authority
HK
Hong Kong
Prior art keywords
fault detection
mechanical device
micro electro
electro
micro
Prior art date
Application number
HK02108356.9A
Other languages
English (en)
Inventor
Silverbrook Kia
Original Assignee
西爾弗布魯克研究股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/AU2000/000586 external-priority patent/WO2001002180A1/en
Application filed by 西爾弗布魯克研究股份有限公司 filed Critical 西爾弗布魯克研究股份有限公司
Publication of HK1046883A1 publication Critical patent/HK1046883A1/zh

Links

HK02108356.9A 1999-06-30 2002-11-19 微型機電器件中的故障檢測 HK1046883A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPP130999 1999-06-30
PCT/AU2000/000586 WO2001002180A1 (en) 1999-06-30 2000-05-24 Fault detection in a micro electro-mechanical device

Publications (1)

Publication Number Publication Date
HK1046883A1 true HK1046883A1 (zh) 2003-01-30

Family

ID=39719819

Family Applications (2)

Application Number Title Priority Date Filing Date
HK02108356.9A HK1046883A1 (zh) 1999-06-30 2002-11-19 微型機電器件中的故障檢測
HK02108353.2A HK1046668A1 (zh) 1999-06-30 2002-11-19 測試微電機裝置的方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
HK02108353.2A HK1046668A1 (zh) 1999-06-30 2002-11-19 測試微電機裝置的方法

Country Status (3)

Country Link
AT (1) ATE405423T1 (zh)
DE (1) DE60039990D1 (zh)
HK (2) HK1046883A1 (zh)

Also Published As

Publication number Publication date
DE60039990D1 (de) 2008-10-02
HK1046668A1 (zh) 2003-01-24
ATE405423T1 (de) 2008-09-15

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