GEP20001974B - Method for Production of Boron Carbide Pellicle - Google Patents

Method for Production of Boron Carbide Pellicle

Info

Publication number
GEP20001974B
GEP20001974B GEAP19984550A GEAP1998004550A GEP20001974B GE P20001974 B GEP20001974 B GE P20001974B GE AP19984550 A GEAP19984550 A GE AP19984550A GE AP1998004550 A GEAP1998004550 A GE AP1998004550A GE P20001974 B GEP20001974 B GE P20001974B
Authority
GE
Georgia
Prior art keywords
pellicle
production
boron carbide
laser radiation
base
Prior art date
Application number
GEAP19984550A
Inventor
Archil Eristavui
Paata Kervalishvili
Marlen Kalandadze
Georgi Kalandadze
Sulkhan Shalamberidze
Original Assignee
Archil Eristavui
Paata Kervalishvili
Marlen Kalandadze
Georgi Kalandadze
Sulkhan Shalamberidze
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Archil Eristavui, Paata Kervalishvili, Marlen Kalandadze, Georgi Kalandadze, Sulkhan Shalamberidze filed Critical Archil Eristavui
Priority to GEAP19984550A priority Critical patent/GEP20001974B/en
Publication of GEP20001974B publication Critical patent/GEP20001974B/en

Links

Abstract

1. Technical Result Improvement of technological process. 2. Essence A method comprises vaporization of carbide boron deposition target by means of pulse laser radiation and bulk sputtering the developed vapor on the base. The duration of the laser radiation pulse is no more than 15 Ns, the frequency is no more than 100 Hz, the power density 2,5x109 - 5x109 W/cm². The bulk sputtering is effected on the base heated to temperature 900-1000°C 3. Field of Application Microelectronics
GEAP19984550A 1998-10-29 1998-10-29 Method for Production of Boron Carbide Pellicle GEP20001974B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GEAP19984550A GEP20001974B (en) 1998-10-29 1998-10-29 Method for Production of Boron Carbide Pellicle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GEAP19984550A GEP20001974B (en) 1998-10-29 1998-10-29 Method for Production of Boron Carbide Pellicle

Publications (1)

Publication Number Publication Date
GEP20001974B true GEP20001974B (en) 2000-03-05

Family

ID=82782042

Family Applications (1)

Application Number Title Priority Date Filing Date
GEAP19984550A GEP20001974B (en) 1998-10-29 1998-10-29 Method for Production of Boron Carbide Pellicle

Country Status (1)

Country Link
GE (1) GEP20001974B (en)

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