GB998239A - A method of manufacturing thin metal films - Google Patents
A method of manufacturing thin metal filmsInfo
- Publication number
- GB998239A GB998239A GB814564A GB814564A GB998239A GB 998239 A GB998239 A GB 998239A GB 814564 A GB814564 A GB 814564A GB 814564 A GB814564 A GB 814564A GB 998239 A GB998239 A GB 998239A
- Authority
- GB
- United Kingdom
- Prior art keywords
- film
- oxygen
- resistance
- substrate
- agglomeration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/02—Pretreatment of the material to be coated
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Physical Vapour Deposition (AREA)
Abstract
<PICT:0998239/C6-C7/1> A metal film of, e.g., Sb, In, Pb, Zn or Cd, is vapour deposited on to a substrate which is cooled during the deposition, after which the film is heated and reacted with a gas, e.g. oxygen, water vapour or hydrogen. A substrate 6, on to which lands 16 have been deposited, is supported in a housing 2 and cooled by a source 14 of liquid oxygen. With a low pressure in the housing maintained by a pump 11, a metal 10 in a crucible 80 is heated and evaporated on to the substrate through a mask (not shown) to form a film 12 in contact with the lands 16 from which probes 18, 20 extend to a suitable meter 22 to monitor the electrical resistance of the film. When evaporation is completed, cooling is stopped and the substrate heats to room temperature causing agglomeration of the film which increases its resistance. At a given resistance, oxygen from a reservoir 24 is introduced into the housing to react with the film and stop further agglomeration. The oxygen supply is stopped when a constant resistance reading indicates that agglomeration has ceased. If oxygen is introduced sooner, agglomeration is prevented and a film free of voids is obtained. The film resistance may be monitored optically by a photocell sensing light passing through the film. The metal film may then be covered with an insulating material, e.g. silicon monoxide.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US26313663A | 1963-03-26 | 1963-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB998239A true GB998239A (en) | 1965-07-14 |
Family
ID=23000522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB814564A Expired GB998239A (en) | 1963-03-26 | 1964-02-27 | A method of manufacturing thin metal films |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB998239A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008134467A1 (en) * | 2007-04-26 | 2008-11-06 | Air Products And Chemicals, Inc. | Apparatuses and methods for cryogenic cooling in thermal surface treatment processes |
| US8293035B2 (en) | 2006-10-12 | 2012-10-23 | Air Products And Chemicals, Inc. | Treatment method, system and product |
| US8715772B2 (en) | 2005-04-12 | 2014-05-06 | Air Products And Chemicals, Inc. | Thermal deposition coating method |
-
1964
- 1964-02-27 GB GB814564A patent/GB998239A/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8715772B2 (en) | 2005-04-12 | 2014-05-06 | Air Products And Chemicals, Inc. | Thermal deposition coating method |
| US8293035B2 (en) | 2006-10-12 | 2012-10-23 | Air Products And Chemicals, Inc. | Treatment method, system and product |
| WO2008134467A1 (en) * | 2007-04-26 | 2008-11-06 | Air Products And Chemicals, Inc. | Apparatuses and methods for cryogenic cooling in thermal surface treatment processes |
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