GB9922801D0 - A method of processing a polymer layer - Google Patents

A method of processing a polymer layer

Info

Publication number
GB9922801D0
GB9922801D0 GBGB9922801.7A GB9922801A GB9922801D0 GB 9922801 D0 GB9922801 D0 GB 9922801D0 GB 9922801 A GB9922801 A GB 9922801A GB 9922801 D0 GB9922801 D0 GB 9922801D0
Authority
GB
United Kingdom
Prior art keywords
processing
polymer layer
polymer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9922801.7A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Priority to GBGB9922801.7A priority Critical patent/GB9922801D0/en
Publication of GB9922801D0 publication Critical patent/GB9922801D0/en
Priority to PCT/GB2000/000671 priority patent/WO2000051174A1/en
Priority to AU28140/00A priority patent/AU2814000A/en
Priority to DE10083897T priority patent/DE10083897T1/en
Priority to GB0115769A priority patent/GB2361809B/en
Priority to JP2000601683A priority patent/JP2002538604A/en
Priority to CNB008012040A priority patent/CN1185694C/en
Priority to GB0102179A priority patent/GB2355992B/en
Priority to JP2001506599A priority patent/JP2003503849A/en
Priority to US09/763,641 priority patent/US7309662B1/en
Priority to DE10081808T priority patent/DE10081808T1/en
Priority to KR1020017001796A priority patent/KR20010072415A/en
Priority to PCT/GB2000/002301 priority patent/WO2001001472A1/en
Priority to US09/942,933 priority patent/US6653247B2/en
Priority to US10/638,424 priority patent/US6846757B2/en
Ceased legal-status Critical Current

Links

GBGB9922801.7A 1999-02-26 1999-09-28 A method of processing a polymer layer Ceased GB9922801D0 (en)

Priority Applications (15)

Application Number Priority Date Filing Date Title
GBGB9922801.7A GB9922801D0 (en) 1999-09-28 1999-09-28 A method of processing a polymer layer
PCT/GB2000/000671 WO2000051174A1 (en) 1999-02-26 2000-02-24 A method of processing a polymer layer
AU28140/00A AU2814000A (en) 1999-02-26 2000-02-24 A method of processing a polymer layer
DE10083897T DE10083897T1 (en) 1999-02-26 2000-02-24 Process for processing a polymer layer
GB0115769A GB2361809B (en) 1999-02-26 2000-02-24 A method of processing a polymer layer
JP2000601683A JP2002538604A (en) 1999-02-26 2000-02-24 Processing method of polymer layer
PCT/GB2000/002301 WO2001001472A1 (en) 1999-06-26 2000-06-26 Method and apparatus for forming a film on a substrate
CNB008012040A CN1185694C (en) 1999-06-26 2000-06-26 Method and apparatus for forming film on substrate
GB0102179A GB2355992B (en) 1999-06-26 2000-06-26 Method and apparatus for forming a film on a substrate
JP2001506599A JP2003503849A (en) 1999-06-26 2000-06-26 Method and apparatus for forming a film on a substrate
US09/763,641 US7309662B1 (en) 1999-06-26 2000-06-26 Method and apparatus for forming a film on a substrate
DE10081808T DE10081808T1 (en) 1999-06-26 2000-06-26 Method and device for forming a film on a substrate
KR1020017001796A KR20010072415A (en) 1999-06-26 2000-06-26 Method and apparatus for forming a film on a substrate
US09/942,933 US6653247B2 (en) 1999-02-26 2001-08-31 Dielectric layer for a semiconductor device and method of producing the same
US10/638,424 US6846757B2 (en) 1999-02-26 2003-08-12 Dielectric layer for a semiconductor device and method of producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9922801.7A GB9922801D0 (en) 1999-09-28 1999-09-28 A method of processing a polymer layer

Publications (1)

Publication Number Publication Date
GB9922801D0 true GB9922801D0 (en) 1999-11-24

Family

ID=10861658

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9922801.7A Ceased GB9922801D0 (en) 1999-02-26 1999-09-28 A method of processing a polymer layer

Country Status (1)

Country Link
GB (1) GB9922801D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)