GB9917966D0 - Sputtering apparatus - Google Patents
Sputtering apparatusInfo
- Publication number
- GB9917966D0 GB9917966D0 GBGB9917966.5A GB9917966A GB9917966D0 GB 9917966 D0 GB9917966 D0 GB 9917966D0 GB 9917966 A GB9917966 A GB 9917966A GB 9917966 D0 GB9917966 D0 GB 9917966D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- sputtering apparatus
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9917966.5A GB9917966D0 (en) | 1999-07-31 | 1999-07-31 | Sputtering apparatus |
GB9930606A GB2346155B (en) | 1999-01-06 | 1999-12-24 | Sputtering apparatus |
DE10000019A DE10000019A1 (en) | 1999-01-06 | 2000-01-03 | Sputter deposition unit, useful for depositing titanium and titanium nitride coatings on semiconductor wafers, has a non-target material surface for receiving and re-sputtering target material onto a workpiece periphery |
US09/477,819 US6660140B2 (en) | 1999-01-06 | 2000-01-05 | Sputtering apparatus |
KR1020000000384A KR20000053393A (en) | 1999-01-06 | 2000-01-06 | Sputtering apparatus |
JP2000005744A JP4435353B2 (en) | 1999-01-06 | 2000-01-06 | Sputtering equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9917966.5A GB9917966D0 (en) | 1999-07-31 | 1999-07-31 | Sputtering apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB9917966D0 true GB9917966D0 (en) | 1999-09-29 |
Family
ID=10858271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB9917966.5A Ceased GB9917966D0 (en) | 1999-01-06 | 1999-07-31 | Sputtering apparatus |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB9917966D0 (en) |
-
1999
- 1999-07-31 GB GBGB9917966.5A patent/GB9917966D0/en not_active Ceased
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |