GB9917966D0 - Sputtering apparatus - Google Patents

Sputtering apparatus

Info

Publication number
GB9917966D0
GB9917966D0 GBGB9917966.5A GB9917966A GB9917966D0 GB 9917966 D0 GB9917966 D0 GB 9917966D0 GB 9917966 A GB9917966 A GB 9917966A GB 9917966 D0 GB9917966 D0 GB 9917966D0
Authority
GB
United Kingdom
Prior art keywords
sputtering apparatus
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9917966.5A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Priority to GBGB9917966.5A priority Critical patent/GB9917966D0/en
Publication of GB9917966D0 publication Critical patent/GB9917966D0/en
Priority to GB9930606A priority patent/GB2346155B/en
Priority to DE10000019A priority patent/DE10000019A1/en
Priority to US09/477,819 priority patent/US6660140B2/en
Priority to KR1020000000384A priority patent/KR20000053393A/en
Priority to JP2000005744A priority patent/JP4435353B2/en
Ceased legal-status Critical Current

Links

GBGB9917966.5A 1999-01-06 1999-07-31 Sputtering apparatus Ceased GB9917966D0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GBGB9917966.5A GB9917966D0 (en) 1999-07-31 1999-07-31 Sputtering apparatus
GB9930606A GB2346155B (en) 1999-01-06 1999-12-24 Sputtering apparatus
DE10000019A DE10000019A1 (en) 1999-01-06 2000-01-03 Sputter deposition unit, useful for depositing titanium and titanium nitride coatings on semiconductor wafers, has a non-target material surface for receiving and re-sputtering target material onto a workpiece periphery
US09/477,819 US6660140B2 (en) 1999-01-06 2000-01-05 Sputtering apparatus
KR1020000000384A KR20000053393A (en) 1999-01-06 2000-01-06 Sputtering apparatus
JP2000005744A JP4435353B2 (en) 1999-01-06 2000-01-06 Sputtering equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9917966.5A GB9917966D0 (en) 1999-07-31 1999-07-31 Sputtering apparatus

Publications (1)

Publication Number Publication Date
GB9917966D0 true GB9917966D0 (en) 1999-09-29

Family

ID=10858271

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9917966.5A Ceased GB9917966D0 (en) 1999-01-06 1999-07-31 Sputtering apparatus

Country Status (1)

Country Link
GB (1) GB9917966D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)