GB9806387D0 - Producing electrolyzed water e.g. for use as cleaning/etching agent in semiconductor manufacture - Google Patents

Producing electrolyzed water e.g. for use as cleaning/etching agent in semiconductor manufacture

Info

Publication number
GB9806387D0
GB9806387D0 GBGB9806387.8A GB9806387A GB9806387D0 GB 9806387 D0 GB9806387 D0 GB 9806387D0 GB 9806387 A GB9806387 A GB 9806387A GB 9806387 D0 GB9806387 D0 GB 9806387D0
Authority
GB
United Kingdom
Prior art keywords
cleaning
electrolyzed water
etching agent
semiconductor manufacture
producing electrolyzed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB9806387.8A
Other versions
GB2320928B (en
GB2320928A8 (en
GB2320928A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6056107A external-priority patent/JP2830733B2/en
Application filed by NEC Corp filed Critical NEC Corp
Publication of GB9806387D0 publication Critical patent/GB9806387D0/en
Publication of GB2320928A publication Critical patent/GB2320928A/en
Application granted granted Critical
Publication of GB2320928B publication Critical patent/GB2320928B/en
Publication of GB2320928A8 publication Critical patent/GB2320928A8/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/34—Treatment of water, waste water, or sewage with mechanical oscillations
    • C02F1/36—Treatment of water, waste water, or sewage with mechanical oscillations ultrasonic vibrations
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C02F1/46104—Devices therefor; Their operating or servicing
    • C02F1/4618—Devices therefor; Their operating or servicing for producing "ionised" acidic or basic water
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C02F1/46104—Devices therefor; Their operating or servicing
    • C02F1/46109—Electrodes
    • C02F2001/46123—Movable electrodes
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C02F1/46104—Devices therefor; Their operating or servicing
    • C02F1/46109—Electrodes
    • C02F2001/46133—Electrodes characterised by the material
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/46—Apparatus for electrochemical processes
    • C02F2201/461—Electrolysis apparatus
    • C02F2201/46105—Details relating to the electrolytic devices
    • C02F2201/4611—Fluid flow
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/46—Apparatus for electrochemical processes
    • C02F2201/461—Electrolysis apparatus
    • C02F2201/46105—Details relating to the electrolytic devices
    • C02F2201/46115—Electrolytic cell with membranes or diaphragms
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/46—Apparatus for electrochemical processes
    • C02F2201/461—Electrolysis apparatus
    • C02F2201/46105—Details relating to the electrolytic devices
    • C02F2201/4612—Controlling or monitoring
    • C02F2201/46125—Electrical variables
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/46—Apparatus for electrochemical processes
    • C02F2201/461—Electrolysis apparatus
    • C02F2201/46105—Details relating to the electrolytic devices
    • C02F2201/46155—Heating or cooling
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/46—Apparatus for electrochemical processes
    • C02F2201/461—Electrolysis apparatus
    • C02F2201/46105—Details relating to the electrolytic devices
    • C02F2201/4618—Supplying or removing reactants or electrolyte
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/46—Apparatus for electrochemical processes
    • C02F2201/461—Electrolysis apparatus
    • C02F2201/46105—Details relating to the electrolytic devices
    • C02F2201/4619—Supplying gas to the electrolyte
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2209/00—Controlling or monitoring parameters in water treatment
    • C02F2209/02—Temperature
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2209/00—Controlling or monitoring parameters in water treatment
    • C02F2209/04—Oxidation reduction potential [ORP]
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2209/00—Controlling or monitoring parameters in water treatment
    • C02F2209/05—Conductivity or salinity
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2209/00—Controlling or monitoring parameters in water treatment
    • C02F2209/06—Controlling or monitoring parameters in water treatment pH
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2301/00—General aspects of water treatment
    • C02F2301/06—Pressure conditions
    • C02F2301/066—Overpressure, high pressure
GB9806387A 1994-03-25 1995-03-23 Method for producing electrolyzed water Expired - Fee Related GB2320928B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6056107A JP2830733B2 (en) 1994-03-25 1994-03-25 Electrolytic water generation method and electrolysis water generation mechanism
GB9505967A GB2287718B (en) 1994-03-25 1995-03-23 Method for producing electrolyzed water

Publications (4)

Publication Number Publication Date
GB9806387D0 true GB9806387D0 (en) 1998-05-20
GB2320928A GB2320928A (en) 1998-07-08
GB2320928B GB2320928B (en) 1998-10-28
GB2320928A8 GB2320928A8 (en) 1998-11-24

Family

ID=26306738

Family Applications (2)

Application Number Title Priority Date Filing Date
GB9814071A Expired - Fee Related GB2322868B (en) 1994-03-25 1995-03-23 Method for producing electrolyzed water and apparatus for the same
GB9806387A Expired - Fee Related GB2320928B (en) 1994-03-25 1995-03-23 Method for producing electrolyzed water

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB9814071A Expired - Fee Related GB2322868B (en) 1994-03-25 1995-03-23 Method for producing electrolyzed water and apparatus for the same

Country Status (1)

Country Link
GB (2) GB2322868B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITMI20011453A1 (en) * 2001-07-09 2003-01-09 Arturo Guerini DEVICE AND OXYGENATION PROCEDURE OF A WATER SOLUTION THROUGH ELECTROLYSIS
JP4216892B1 (en) * 2007-04-13 2009-01-28 優章 荒井 Electrolyzed water production apparatus, electrolyzed water production method, and electrolyzed water
CN102515317A (en) * 2012-01-10 2012-06-27 刘景亮 Method and device for producing acid and ammonia water by using ammonia-nitrogen waste water
IT201600127410A1 (en) * 2016-12-16 2018-06-16 Carlo Francesca Di DEVICE FOR THE REALIZATION OF A MICROBIOLOGICAL ABATEMENT TREATMENT OF LIQUID FOOD PRODUCTS
CN113429057B (en) * 2020-07-13 2022-09-06 天津工业大学 Oxidizing active water preparation device and natural fiber dyeing and finishing treatment device thereof

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4116889A (en) * 1976-08-19 1978-09-26 Allied Chemical Corporation Bipolar membranes and method of making same
US4661218A (en) * 1979-11-27 1987-04-28 Asahi Glass Company, Ltd. Ion exchange membrane cell and electrolysis with use thereof
JPS57172927A (en) * 1981-03-20 1982-10-25 Asahi Glass Co Ltd Cation exchange membrane for electrolysis
JPS57174482A (en) * 1981-03-24 1982-10-27 Asahi Glass Co Ltd Cation exchange membrane for electrolysis
JPS6049718B2 (en) * 1983-08-12 1985-11-05 旭硝子株式会社 Alkali chloride electrolyzer
JPS61130347A (en) * 1984-11-30 1986-06-18 Asahi Glass Co Ltd Novel double-layered diaphragm for electrolysis
US4627899A (en) * 1985-02-15 1986-12-09 The United States Of America As Represented By The Secretary Of The Interior Electrolytic cell and methods combining electrowinning and electrochemical reactions employing a membrane or diaphragm
GB2202551B (en) * 1987-02-13 1990-12-19 Sanden Corp Apparatus and method for producing sodium hypochlorite
JPH03236488A (en) * 1990-02-09 1991-10-22 Permelec Electrode Ltd Method for controlling electrolysis reaction for generating ozone
SU1754798A1 (en) * 1990-10-25 1992-08-15 Московский Технологический Институт Министерства Бытового Обслуживания Населения Рсфср Device for automatic control of water electrolysis for production of hydrogen and oxygen
JPH05154479A (en) * 1991-12-04 1993-06-22 Kanbayashi Seisakusho:Kk Equipment for producing electrolytically ionized water
JPH05202510A (en) * 1992-01-28 1993-08-10 Mitsubishi Heavy Ind Ltd Dc-power source for marine organism-antifouling device
JPH05245476A (en) * 1992-03-03 1993-09-24 Funai Electric Co Ltd Alkali ion water producing device
EP0600470A3 (en) * 1992-12-04 1995-01-04 Asahi Glass Co Ltd Bipolar membrane.
WO1995032321A1 (en) * 1994-05-24 1995-11-30 Aquagas New Zealand Limited Electrolytic cell control method and apparatus

Also Published As

Publication number Publication date
GB2322868A (en) 1998-09-09
GB2320928B (en) 1998-10-28
GB9814071D0 (en) 1998-08-26
GB2320928A8 (en) 1998-11-24
GB2320928A (en) 1998-07-08
GB2322868B (en) 1998-10-28

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20040323