GB9720575D0 - Clean room ceiling structure and filter replacing system - Google Patents

Clean room ceiling structure and filter replacing system

Info

Publication number
GB9720575D0
GB9720575D0 GBGB9720575.1A GB9720575A GB9720575D0 GB 9720575 D0 GB9720575 D0 GB 9720575D0 GB 9720575 A GB9720575 A GB 9720575A GB 9720575 D0 GB9720575 D0 GB 9720575D0
Authority
GB
United Kingdom
Prior art keywords
clean room
ceiling structure
room ceiling
replacing system
filter replacing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9720575.1A
Other versions
GB2317583A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of GB9720575D0 publication Critical patent/GB9720575D0/en
Publication of GB2317583A publication Critical patent/GB2317583A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0002—Casings; Housings; Frame constructions
    • B01D46/0005—Mounting of filtering elements within casings, housings or frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0002—Casings; Housings; Frame constructions
    • B01D46/0013—Modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/90—Devices for taking out of action one or more units of multi-unit filters, e.g. for regeneration or maintenance
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B9/00—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation
    • E04B9/02—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation having means for ventilation or vapour discharge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/28—Arrangement or mounting of filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2273/30—Means for generating a circulation of a fluid in a filtration system, e.g. using a pump or a fan

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Architecture (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
GB9720575A 1996-09-26 1997-09-26 Clean room ceiling structure and filter replacing system Withdrawn GB2317583A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8254805A JP2914318B2 (en) 1996-09-26 1996-09-26 How to replace the clean room filter

Publications (2)

Publication Number Publication Date
GB9720575D0 true GB9720575D0 (en) 1997-11-26
GB2317583A GB2317583A (en) 1998-04-01

Family

ID=17270141

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9720575A Withdrawn GB2317583A (en) 1996-09-26 1997-09-26 Clean room ceiling structure and filter replacing system

Country Status (3)

Country Link
JP (1) JP2914318B2 (en)
KR (1) KR19980024958A (en)
GB (1) GB2317583A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100416427B1 (en) * 2001-10-08 2004-01-31 주식회사 씨큐브디지탈 Device for blowing and filtering air drawing into a clean room
JP6955984B2 (en) * 2017-12-05 2021-10-27 東京エレクトロン株式会社 Substrate processing equipment, installation method of substrate processing equipment, and computer storage medium
KR102165607B1 (en) 2018-11-01 2020-10-14 원문수 Light emitting stick and light emitting candy including the same
KR102165599B1 (en) 2018-11-01 2020-10-14 원문수 Light emitting stick and light emitting candy including the same
CN110486881B (en) * 2019-08-13 2021-05-14 江西铭祥通风设备有限公司 A high-efficient type air inlet unit for new trend system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3986850A (en) * 1974-12-05 1976-10-19 Flanders Filters, Inc. Flow control apparatus and air filters
US4427427A (en) * 1982-01-19 1984-01-24 Veco S.A. Vertical laminar flow filter module
DE3330536C2 (en) * 1983-08-24 1985-08-22 Fläkt AB, Nacka Ceiling construction for clean rooms
US4530272A (en) * 1984-01-13 1985-07-23 International Business Machines Corporation Method for controlling contamination in a clean room
US4883513A (en) * 1988-02-05 1989-11-28 Donaldson Company, Inc. Filter cap for clean room ceiling grid system
US4883511A (en) * 1988-03-25 1989-11-28 Arnold Gustin Laminar flow multiplane matrix ceiling system

Also Published As

Publication number Publication date
GB2317583A (en) 1998-04-01
KR19980024958A (en) 1998-07-06
JP2914318B2 (en) 1999-06-28
JPH10103730A (en) 1998-04-21

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)