GB9720575D0 - Clean room ceiling structure and filter replacing system - Google Patents
Clean room ceiling structure and filter replacing systemInfo
- Publication number
- GB9720575D0 GB9720575D0 GBGB9720575.1A GB9720575A GB9720575D0 GB 9720575 D0 GB9720575 D0 GB 9720575D0 GB 9720575 A GB9720575 A GB 9720575A GB 9720575 D0 GB9720575 D0 GB 9720575D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- clean room
- ceiling structure
- room ceiling
- replacing system
- filter replacing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0002—Casings; Housings; Frame constructions
- B01D46/0005—Mounting of filtering elements within casings, housings or frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0002—Casings; Housings; Frame constructions
- B01D46/0013—Modules
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/90—Devices for taking out of action one or more units of multi-unit filters, e.g. for regeneration or maintenance
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
- E04B9/00—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation
- E04B9/02—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation having means for ventilation or vapour discharge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/28—Arrangement or mounting of filters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
- B01D2273/30—Means for generating a circulation of a fluid in a filtration system, e.g. using a pump or a fan
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Architecture (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8254805A JP2914318B2 (en) | 1996-09-26 | 1996-09-26 | How to replace the clean room filter |
Publications (2)
Publication Number | Publication Date |
---|---|
GB9720575D0 true GB9720575D0 (en) | 1997-11-26 |
GB2317583A GB2317583A (en) | 1998-04-01 |
Family
ID=17270141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9720575A Withdrawn GB2317583A (en) | 1996-09-26 | 1997-09-26 | Clean room ceiling structure and filter replacing system |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2914318B2 (en) |
KR (1) | KR19980024958A (en) |
GB (1) | GB2317583A (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100416427B1 (en) * | 2001-10-08 | 2004-01-31 | 주식회사 씨큐브디지탈 | Device for blowing and filtering air drawing into a clean room |
JP6955984B2 (en) * | 2017-12-05 | 2021-10-27 | 東京エレクトロン株式会社 | Substrate processing equipment, installation method of substrate processing equipment, and computer storage medium |
KR102165607B1 (en) | 2018-11-01 | 2020-10-14 | 원문수 | Light emitting stick and light emitting candy including the same |
KR102165599B1 (en) | 2018-11-01 | 2020-10-14 | 원문수 | Light emitting stick and light emitting candy including the same |
CN110486881B (en) * | 2019-08-13 | 2021-05-14 | 江西铭祥通风设备有限公司 | A high-efficient type air inlet unit for new trend system |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3986850A (en) * | 1974-12-05 | 1976-10-19 | Flanders Filters, Inc. | Flow control apparatus and air filters |
US4427427A (en) * | 1982-01-19 | 1984-01-24 | Veco S.A. | Vertical laminar flow filter module |
DE3330536C2 (en) * | 1983-08-24 | 1985-08-22 | Fläkt AB, Nacka | Ceiling construction for clean rooms |
US4530272A (en) * | 1984-01-13 | 1985-07-23 | International Business Machines Corporation | Method for controlling contamination in a clean room |
US4883513A (en) * | 1988-02-05 | 1989-11-28 | Donaldson Company, Inc. | Filter cap for clean room ceiling grid system |
US4883511A (en) * | 1988-03-25 | 1989-11-28 | Arnold Gustin | Laminar flow multiplane matrix ceiling system |
-
1996
- 1996-09-26 JP JP8254805A patent/JP2914318B2/en not_active Expired - Lifetime
-
1997
- 1997-09-25 KR KR1019970048698A patent/KR19980024958A/en not_active Application Discontinuation
- 1997-09-26 GB GB9720575A patent/GB2317583A/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
GB2317583A (en) | 1998-04-01 |
KR19980024958A (en) | 1998-07-06 |
JP2914318B2 (en) | 1999-06-28 |
JPH10103730A (en) | 1998-04-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |