GB9708459D0 - Pattern-writing machine - Google Patents
Pattern-writing machineInfo
- Publication number
- GB9708459D0 GB9708459D0 GBGB9708459.4A GB9708459A GB9708459D0 GB 9708459 D0 GB9708459 D0 GB 9708459D0 GB 9708459 A GB9708459 A GB 9708459A GB 9708459 D0 GB9708459 D0 GB 9708459D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- pattern
- writing machine
- writing
- machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9708459A GB2324650A (en) | 1997-04-25 | 1997-04-25 | Pattern-writing machine |
PCT/EP1998/002296 WO1998049709A1 (en) | 1997-04-25 | 1998-04-17 | Pattern-writing machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9708459A GB2324650A (en) | 1997-04-25 | 1997-04-25 | Pattern-writing machine |
Publications (2)
Publication Number | Publication Date |
---|---|
GB9708459D0 true GB9708459D0 (en) | 1997-06-18 |
GB2324650A GB2324650A (en) | 1998-10-28 |
Family
ID=10811392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9708459A Withdrawn GB2324650A (en) | 1997-04-25 | 1997-04-25 | Pattern-writing machine |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB2324650A (en) |
WO (1) | WO1998049709A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2442766B (en) * | 2006-10-12 | 2009-06-24 | Vistec Lithography Ltd | Workpiece height adjustment in an eletron beam lithography machine |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1193297A (en) * | 1966-07-01 | 1970-05-28 | Telefunken Patent | Device for the Fine Adjustment of Photomasks with respect to Semiconductor Elements |
US4572021A (en) * | 1984-10-03 | 1986-02-25 | Rca Corporation | Motion transmission system |
EP0296192A1 (en) * | 1986-12-29 | 1988-12-28 | Hughes Aircraft Company | X-Y-$g(U)-Z POSITIONING STAGE |
US4885472A (en) * | 1988-03-14 | 1989-12-05 | The Perkin-Elmer Corporation | Silicon grid as a reference and calibration standard in a particle beam lithography system |
FR2644290A1 (en) * | 1989-03-10 | 1990-09-14 | Labo Electronique Physique | MICROMANIPULATOR |
GB9107207D0 (en) * | 1991-04-05 | 1991-05-22 | Tycho Technology Ltd | Mechanical manipulator |
DE69203280T2 (en) * | 1991-04-29 | 1996-03-07 | Philips Electronics Nv | Displacement device. |
-
1997
- 1997-04-25 GB GB9708459A patent/GB2324650A/en not_active Withdrawn
-
1998
- 1998-04-17 WO PCT/EP1998/002296 patent/WO1998049709A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO1998049709A1 (en) | 1998-11-05 |
GB2324650A (en) | 1998-10-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |