GB9708459D0 - Pattern-writing machine - Google Patents

Pattern-writing machine

Info

Publication number
GB9708459D0
GB9708459D0 GBGB9708459.4A GB9708459A GB9708459D0 GB 9708459 D0 GB9708459 D0 GB 9708459D0 GB 9708459 A GB9708459 A GB 9708459A GB 9708459 D0 GB9708459 D0 GB 9708459D0
Authority
GB
United Kingdom
Prior art keywords
pattern
writing machine
writing
machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9708459.4A
Other versions
GB2324650A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vistec Lithography Ltd
Original Assignee
Vistec Lithography Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vistec Lithography Ltd filed Critical Vistec Lithography Ltd
Priority to GB9708459A priority Critical patent/GB2324650A/en
Publication of GB9708459D0 publication Critical patent/GB9708459D0/en
Priority to PCT/EP1998/002296 priority patent/WO1998049709A1/en
Publication of GB2324650A publication Critical patent/GB2324650A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Electron Beam Exposure (AREA)
GB9708459A 1997-04-25 1997-04-25 Pattern-writing machine Withdrawn GB2324650A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB9708459A GB2324650A (en) 1997-04-25 1997-04-25 Pattern-writing machine
PCT/EP1998/002296 WO1998049709A1 (en) 1997-04-25 1998-04-17 Pattern-writing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9708459A GB2324650A (en) 1997-04-25 1997-04-25 Pattern-writing machine

Publications (2)

Publication Number Publication Date
GB9708459D0 true GB9708459D0 (en) 1997-06-18
GB2324650A GB2324650A (en) 1998-10-28

Family

ID=10811392

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9708459A Withdrawn GB2324650A (en) 1997-04-25 1997-04-25 Pattern-writing machine

Country Status (2)

Country Link
GB (1) GB2324650A (en)
WO (1) WO1998049709A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2442766B (en) * 2006-10-12 2009-06-24 Vistec Lithography Ltd Workpiece height adjustment in an eletron beam lithography machine

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1193297A (en) * 1966-07-01 1970-05-28 Telefunken Patent Device for the Fine Adjustment of Photomasks with respect to Semiconductor Elements
US4572021A (en) * 1984-10-03 1986-02-25 Rca Corporation Motion transmission system
WO1988005205A1 (en) * 1986-12-29 1988-07-14 Hughes Aircraft Company X-y--z positioning stage
US4885472A (en) * 1988-03-14 1989-12-05 The Perkin-Elmer Corporation Silicon grid as a reference and calibration standard in a particle beam lithography system
FR2644290A1 (en) * 1989-03-10 1990-09-14 Labo Electronique Physique MICROMANIPULATOR
GB9107207D0 (en) * 1991-04-05 1991-05-22 Tycho Technology Ltd Mechanical manipulator
DE69203280T2 (en) * 1991-04-29 1996-03-07 Philips Electronics Nv Displacement device.

Also Published As

Publication number Publication date
WO1998049709A1 (en) 1998-11-05
GB2324650A (en) 1998-10-28

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)