GB9704594D0 - Cryogenic vacuum pump with electronically controlled regeneration - Google Patents

Cryogenic vacuum pump with electronically controlled regeneration

Info

Publication number
GB9704594D0
GB9704594D0 GBGB9704594.2A GB9704594A GB9704594D0 GB 9704594 D0 GB9704594 D0 GB 9704594D0 GB 9704594 A GB9704594 A GB 9704594A GB 9704594 D0 GB9704594 D0 GB 9704594D0
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
electronically controlled
cryogenic vacuum
controlled regeneration
regeneration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB9704594.2A
Other versions
GB2309750A (en
GB2309750B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/023,697 external-priority patent/US5375424A/en
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Priority claimed from GB9615938A external-priority patent/GB2300885B/en
Publication of GB9704594D0 publication Critical patent/GB9704594D0/en
Publication of GB2309750A publication Critical patent/GB2309750A/en
Application granted granted Critical
Publication of GB2309750B publication Critical patent/GB2309750B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
GB9704594A 1993-02-26 1994-02-23 Cryogenic vacuum pump with electronically controlled regeneration Expired - Fee Related GB2309750B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/023,697 US5375424A (en) 1993-02-26 1993-02-26 Cryopump with electronically controlled regeneration
GB9615938A GB2300885B (en) 1993-02-26 1994-02-23 Cryogenic vacuum pump with electronically controlled regeneration

Publications (3)

Publication Number Publication Date
GB9704594D0 true GB9704594D0 (en) 1997-04-23
GB2309750A GB2309750A (en) 1997-08-06
GB2309750B GB2309750B (en) 1997-09-24

Family

ID=26309774

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9704594A Expired - Fee Related GB2309750B (en) 1993-02-26 1994-02-23 Cryogenic vacuum pump with electronically controlled regeneration

Country Status (1)

Country Link
GB (1) GB2309750B (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3811794A (en) * 1972-11-22 1974-05-21 Bell Telephone Labor Inc Ultrahigh vacuum sublimation pump
DE2949092A1 (en) * 1979-12-06 1981-06-11 Leybold-Heraeus GmbH, 5000 Köln Cryopump
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
US4918930A (en) * 1988-09-13 1990-04-24 Helix Technology Corporation Electronically controlled cryopump
US5265431A (en) * 1991-06-18 1993-11-30 Helix Technology Corporation Electronically controlled cryopump and network interface

Also Published As

Publication number Publication date
GB2309750A (en) 1997-08-06
GB2309750B (en) 1997-09-24

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20080223