GB961089A - Improvements in regulating devices for the correction of image defects of an electron-optical system - Google Patents

Improvements in regulating devices for the correction of image defects of an electron-optical system

Info

Publication number
GB961089A
GB961089A GB26033/62A GB2603362A GB961089A GB 961089 A GB961089 A GB 961089A GB 26033/62 A GB26033/62 A GB 26033/62A GB 2603362 A GB2603362 A GB 2603362A GB 961089 A GB961089 A GB 961089A
Authority
GB
United Kingdom
Prior art keywords
resistance elements
control potentiometer
stigmator
electron
july
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB26033/62A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electrical Industries Ltd
Original Assignee
Philips Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electrical Industries Ltd filed Critical Philips Electrical Industries Ltd
Publication of GB961089A publication Critical patent/GB961089A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Adjustable Resistors (AREA)
GB26033/62A 1961-07-10 1962-07-06 Improvements in regulating devices for the correction of image defects of an electron-optical system Expired GB961089A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL266898 1961-07-10

Publications (1)

Publication Number Publication Date
GB961089A true GB961089A (en) 1964-06-17

Family

ID=19753149

Family Applications (1)

Application Number Title Priority Date Filing Date
GB26033/62A Expired GB961089A (en) 1961-07-10 1962-07-06 Improvements in regulating devices for the correction of image defects of an electron-optical system

Country Status (4)

Country Link
US (1) US3197635A (cs)
DE (1) DE1464282A1 (cs)
GB (1) GB961089A (cs)
NL (1) NL266898A (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5041731A (en) * 1989-01-20 1991-08-20 Fujitsu Limited Deflection compensating device for converging lens
DE3901980C2 (de) * 1989-01-24 2001-06-28 Ceos Gmbh Multipolelement und Verfahren zur Herstellung eines Multipolelements
US4962309A (en) * 1989-08-21 1990-10-09 Rockwell International Corporation Magnetic optics adaptive technique
US5546319A (en) * 1994-01-28 1996-08-13 Fujitsu Limited Method of and system for charged particle beam exposure

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1826673A (en) * 1925-10-03 1931-10-06 Mcilvaine Patent Corp Resistance apparatus
US2432029A (en) * 1945-10-05 1947-12-02 Howe & Fant Inc Correction of selsyn transmitter errors
FR944238A (fr) * 1947-03-13 1949-03-30 Csf Méthode de correction des optiques électroniques
BE481554A (cs) * 1947-06-26
US2919381A (en) * 1956-07-25 1959-12-29 Farrand Optical Co Inc Electron lens

Also Published As

Publication number Publication date
DE1464282A1 (de) 1968-12-12
US3197635A (en) 1965-07-27
NL266898A (cs)

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