GB9511503D0 - The coaxial-bladed plasma processing reactor - Google Patents

The coaxial-bladed plasma processing reactor

Info

Publication number
GB9511503D0
GB9511503D0 GBGB9511503.6A GB9511503A GB9511503D0 GB 9511503 D0 GB9511503 D0 GB 9511503D0 GB 9511503 A GB9511503 A GB 9511503A GB 9511503 D0 GB9511503 D0 GB 9511503D0
Authority
GB
United Kingdom
Prior art keywords
bladed
coaxial
plasma processing
processing reactor
reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9511503.6A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DILAB Ltd
Original Assignee
DILAB Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DILAB Ltd filed Critical DILAB Ltd
Priority to GBGB9511503.6A priority Critical patent/GB9511503D0/en
Publication of GB9511503D0 publication Critical patent/GB9511503D0/en
Pending legal-status Critical Current

Links

GBGB9511503.6A 1995-06-07 1995-06-07 The coaxial-bladed plasma processing reactor Pending GB9511503D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GBGB9511503.6A GB9511503D0 (en) 1995-06-07 1995-06-07 The coaxial-bladed plasma processing reactor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9511503.6A GB9511503D0 (en) 1995-06-07 1995-06-07 The coaxial-bladed plasma processing reactor

Publications (1)

Publication Number Publication Date
GB9511503D0 true GB9511503D0 (en) 1995-08-02

Family

ID=10775656

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9511503.6A Pending GB9511503D0 (en) 1995-06-07 1995-06-07 The coaxial-bladed plasma processing reactor

Country Status (1)

Country Link
GB (1) GB9511503D0 (en)

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