GB9403815D0 - Scanning electron microscope grain imaging - Google Patents

Scanning electron microscope grain imaging

Info

Publication number
GB9403815D0
GB9403815D0 GB9403815A GB9403815A GB9403815D0 GB 9403815 D0 GB9403815 D0 GB 9403815D0 GB 9403815 A GB9403815 A GB 9403815A GB 9403815 A GB9403815 A GB 9403815A GB 9403815 D0 GB9403815 D0 GB 9403815D0
Authority
GB
United Kingdom
Prior art keywords
electron microscope
scanning electron
grain imaging
microscope grain
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB9403815A
Other versions
GB2285169A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Trade and Industry
Original Assignee
UK Secretary of State for Trade and Industry
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB939326053A external-priority patent/GB9326053D0/en
Application filed by UK Secretary of State for Trade and Industry filed Critical UK Secretary of State for Trade and Industry
Priority to GB9403815A priority Critical patent/GB2285169A/en
Publication of GB9403815D0 publication Critical patent/GB9403815D0/en
Publication of GB2285169A publication Critical patent/GB2285169A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/22—Treatment of data
    • H01J2237/221—Image processing
    • H01J2237/225—Displaying image using synthesised colours
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24475—Scattered electron detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24495—Signal processing, e.g. mixing of two or more signals
GB9403815A 1993-12-21 1994-02-28 Scanning electron microscope grain imaging Withdrawn GB2285169A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9403815A GB2285169A (en) 1993-12-21 1994-02-28 Scanning electron microscope grain imaging

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB939326053A GB9326053D0 (en) 1993-12-21 1993-12-21 Scanning electron microscopes
GB9403815A GB2285169A (en) 1993-12-21 1994-02-28 Scanning electron microscope grain imaging

Publications (2)

Publication Number Publication Date
GB9403815D0 true GB9403815D0 (en) 1994-04-20
GB2285169A GB2285169A (en) 1995-06-28

Family

ID=26304056

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9403815A Withdrawn GB2285169A (en) 1993-12-21 1994-02-28 Scanning electron microscope grain imaging

Country Status (1)

Country Link
GB (1) GB2285169A (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1076857A (en) * 1963-10-11 1967-07-26 Jeol Ltd Electron beam apparatus
GB1195271A (en) * 1967-02-16 1970-06-17 Cambridge Instr Co Ltd Electron Beam Apparatus
US4041311A (en) * 1976-07-12 1977-08-09 Iowa State University Research Foundation, Inc. Scanning electron microscope with color image display
EP0443410B1 (en) * 1990-02-23 1994-09-21 International Business Machines Corporation Multiple detector system for specimen inspection using high energy backscatter electrons
EP0460305B1 (en) * 1990-06-04 1995-12-27 Nobuo Mikoshiba Method for observing microscopic surface structure
NL9001512A (en) * 1990-07-03 1992-02-03 Philips Nv ELECTRON BUNDLE DEVICE FOR TOPOGRAPHIC DETECTION.
US5212383A (en) * 1991-07-29 1993-05-18 David Scharf Color synthesizing scanning electron microscope

Also Published As

Publication number Publication date
GB2285169A (en) 1995-06-28

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)