GB9221520D0 - A method of treating a semiconductor wafer - Google Patents

A method of treating a semiconductor wafer

Info

Publication number
GB9221520D0
GB9221520D0 GB929221520A GB9221520A GB9221520D0 GB 9221520 D0 GB9221520 D0 GB 9221520D0 GB 929221520 A GB929221520 A GB 929221520A GB 9221520 A GB9221520 A GB 9221520A GB 9221520 D0 GB9221520 D0 GB 9221520D0
Authority
GB
United Kingdom
Prior art keywords
treating
semiconductor wafer
wafer
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB929221520A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DOBSON CHRISTOPHER D
Original Assignee
DOBSON CHRISTOPHER D
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DOBSON CHRISTOPHER D filed Critical DOBSON CHRISTOPHER D
Priority to GB929221520A priority Critical patent/GB9221520D0/en
Publication of GB9221520D0 publication Critical patent/GB9221520D0/en
Priority to CA002137928A priority patent/CA2137928C/en
Priority to US08/362,429 priority patent/US5874367A/en
Priority to JP50307594A priority patent/JP3262334B2/en
Priority to AU45069/93A priority patent/AU4506993A/en
Priority to EP93914846A priority patent/EP0731982B1/en
Priority to KR1019950700006A priority patent/KR100286192B1/en
Priority to PCT/GB1993/001368 priority patent/WO1994001885A1/en
Priority to AT93914846T priority patent/ATE187277T1/en
Priority to DE69327176T priority patent/DE69327176T2/en
Priority to CN93108147A priority patent/CN1042577C/en
Priority to TW082106311A priority patent/TW253974B/zh
Priority to US09/174,578 priority patent/US6287989B1/en
Pending legal-status Critical Current

Links

GB929221520A 1992-01-01 1992-10-14 A method of treating a semiconductor wafer Pending GB9221520D0 (en)

Priority Applications (13)

Application Number Priority Date Filing Date Title
GB929221520A GB9221520D0 (en) 1992-10-14 1992-10-14 A method of treating a semiconductor wafer
DE69327176T DE69327176T2 (en) 1992-07-04 1993-06-30 TREATMENT METHOD FOR A SEMICONDUCTOR DISC.
KR1019950700006A KR100286192B1 (en) 1992-01-01 1993-06-30 Semiconductor Wafer Processing Method
US08/362,429 US5874367A (en) 1992-07-04 1993-06-30 Method of treating a semi-conductor wafer
JP50307594A JP3262334B2 (en) 1992-07-04 1993-06-30 Method for processing semiconductor wafers
AU45069/93A AU4506993A (en) 1992-07-04 1993-06-30 A method of treating a semiconductor wafer
EP93914846A EP0731982B1 (en) 1992-07-04 1993-06-30 A method of treating a semiconductor wafer
CA002137928A CA2137928C (en) 1992-07-04 1993-06-30 A method of treating a semiconductor wafer
PCT/GB1993/001368 WO1994001885A1 (en) 1992-07-04 1993-06-30 A method of treating a semiconductor wafer
AT93914846T ATE187277T1 (en) 1992-07-04 1993-06-30 TREATMENT METHOD FOR A SEMICONDUCTOR DISC.
CN93108147A CN1042577C (en) 1992-07-04 1993-07-03 A method of treating a semi-conductor wafer
TW082106311A TW253974B (en) 1992-07-04 1993-08-06
US09/174,578 US6287989B1 (en) 1992-07-04 1998-10-19 Method of treating a semiconductor wafer in a chamber using hydrogen peroxide and silicon containing gas or vapor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929221520A GB9221520D0 (en) 1992-10-14 1992-10-14 A method of treating a semiconductor wafer

Publications (1)

Publication Number Publication Date
GB9221520D0 true GB9221520D0 (en) 1992-11-25

Family

ID=10723394

Family Applications (1)

Application Number Title Priority Date Filing Date
GB929221520A Pending GB9221520D0 (en) 1992-01-01 1992-10-14 A method of treating a semiconductor wafer

Country Status (1)

Country Link
GB (1) GB9221520D0 (en)

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