GB9217607D0 - Improved furnace and control method therefor - Google Patents

Improved furnace and control method therefor

Info

Publication number
GB9217607D0
GB9217607D0 GB929217607A GB9217607A GB9217607D0 GB 9217607 D0 GB9217607 D0 GB 9217607D0 GB 929217607 A GB929217607 A GB 929217607A GB 9217607 A GB9217607 A GB 9217607A GB 9217607 D0 GB9217607 D0 GB 9217607D0
Authority
GB
United Kingdom
Prior art keywords
control method
method therefor
improved furnace
furnace
improved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB929217607A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Edinburgh
Original Assignee
University of Edinburgh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Edinburgh filed Critical University of Edinburgh
Priority to GB929217607A priority Critical patent/GB9217607D0/en
Publication of GB9217607D0 publication Critical patent/GB9217607D0/en
Priority to PCT/GB1993/001752 priority patent/WO1994004723A2/en
Priority to EP93918049A priority patent/EP0656076A1/en
Priority to AU47281/93A priority patent/AU4728193A/en
Priority to CA002142829A priority patent/CA2142829A1/en
Priority to KR1019950700636A priority patent/KR950703078A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
GB929217607A 1992-08-19 1992-08-19 Improved furnace and control method therefor Pending GB9217607D0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB929217607A GB9217607D0 (en) 1992-08-19 1992-08-19 Improved furnace and control method therefor
PCT/GB1993/001752 WO1994004723A2 (en) 1992-08-19 1993-08-18 Furnace and control method therefor
EP93918049A EP0656076A1 (en) 1992-08-19 1993-08-18 Furnace and control method therefor
AU47281/93A AU4728193A (en) 1992-08-19 1993-08-18 Furnace and control method therefor
CA002142829A CA2142829A1 (en) 1992-08-19 1993-08-18 Furnace and control method therefor
KR1019950700636A KR950703078A (en) 1992-08-19 1993-08-18 Furnace and its control method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929217607A GB9217607D0 (en) 1992-08-19 1992-08-19 Improved furnace and control method therefor

Publications (1)

Publication Number Publication Date
GB9217607D0 true GB9217607D0 (en) 1992-09-30

Family

ID=10720597

Family Applications (1)

Application Number Title Priority Date Filing Date
GB929217607A Pending GB9217607D0 (en) 1992-08-19 1992-08-19 Improved furnace and control method therefor

Country Status (6)

Country Link
EP (1) EP0656076A1 (en)
KR (1) KR950703078A (en)
AU (1) AU4728193A (en)
CA (1) CA2142829A1 (en)
GB (1) GB9217607D0 (en)
WO (1) WO1994004723A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2747402B1 (en) * 1996-04-15 1998-05-22 Sgs Thomson Microelectronics BROADCASTING OVEN

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4351805A (en) * 1981-04-06 1982-09-28 International Business Machines Corporation Single gas flow elevated pressure reactor
US4992044A (en) * 1989-06-28 1991-02-12 Digital Equipment Corporation Reactant exhaust system for a thermal processing furnace
US5174745A (en) * 1990-12-03 1992-12-29 Samsung Electronics Co., Ltd. Impurity diffusing furnace
US5118286A (en) * 1991-01-17 1992-06-02 Amtech Systems Closed loop method and apparatus for preventing exhausted reactant gas from mixing with ambient air and enhancing repeatability of reaction gas results on wafers

Also Published As

Publication number Publication date
EP0656076A1 (en) 1995-06-07
CA2142829A1 (en) 1994-03-03
AU4728193A (en) 1994-03-15
WO1994004723A2 (en) 1994-03-03
WO1994004723A3 (en) 1994-03-31
KR950703078A (en) 1995-08-23

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Legal Events

Date Code Title Description
730A Proceeding under section 30 patents act 1977