FR2747402B1 - BROADCASTING OVEN - Google Patents

BROADCASTING OVEN

Info

Publication number
FR2747402B1
FR2747402B1 FR9604682A FR9604682A FR2747402B1 FR 2747402 B1 FR2747402 B1 FR 2747402B1 FR 9604682 A FR9604682 A FR 9604682A FR 9604682 A FR9604682 A FR 9604682A FR 2747402 B1 FR2747402 B1 FR 2747402B1
Authority
FR
France
Prior art keywords
broadcasting
oven
broadcasting oven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9604682A
Other languages
French (fr)
Other versions
FR2747402A1 (en
Inventor
Christophe Niel
Jean Paul Trivellin
Maurice Nowak
Bernard Piston
Didier Rosso
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
SGS Thomson Microelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SGS Thomson Microelectronics SA filed Critical SGS Thomson Microelectronics SA
Priority to FR9604682A priority Critical patent/FR2747402B1/en
Publication of FR2747402A1 publication Critical patent/FR2747402A1/en
Application granted granted Critical
Publication of FR2747402B1 publication Critical patent/FR2747402B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/04—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the liquid state

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR9604682A 1996-04-15 1996-04-15 BROADCASTING OVEN Expired - Fee Related FR2747402B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9604682A FR2747402B1 (en) 1996-04-15 1996-04-15 BROADCASTING OVEN

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9604682A FR2747402B1 (en) 1996-04-15 1996-04-15 BROADCASTING OVEN

Publications (2)

Publication Number Publication Date
FR2747402A1 FR2747402A1 (en) 1997-10-17
FR2747402B1 true FR2747402B1 (en) 1998-05-22

Family

ID=9491203

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9604682A Expired - Fee Related FR2747402B1 (en) 1996-04-15 1996-04-15 BROADCASTING OVEN

Country Status (1)

Country Link
FR (1) FR2747402B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111188093A (en) * 2020-02-17 2020-05-22 通威太阳能(眉山)有限公司 Air inlet assembly and diffusion device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103696020A (en) * 2013-12-31 2014-04-02 北京七星华创电子股份有限公司 Source flow control system for negative-pressure diffusion furnace
CN115094521B (en) * 2022-06-27 2023-12-19 中南大学 Boron diffusion reaction system and process method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3753809A (en) * 1970-01-09 1973-08-21 Ibm Method for obtaining optimum phosphorous concentration in semiconductor wafers
FR2409791A1 (en) * 1977-11-25 1979-06-22 Silicium Semiconducteur Ssc Doping semiconductor wafers - by diffusion in a furnace-heated tube closed at the ends using an atmosphere of pressurised argon
US4859375A (en) * 1986-12-29 1989-08-22 Air Products And Chemicals, Inc. Chemical refill system
JPH03185717A (en) * 1989-12-14 1991-08-13 Toshiba Corp Manufacture of diffusion-type semiconductor element
JPH05217929A (en) * 1992-01-31 1993-08-27 Tokyo Electron Tohoku Kk Oxidation diffusion treating apparatus
GB9217607D0 (en) * 1992-08-19 1992-09-30 Univ Edingburgh Improved furnace and control method therefor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111188093A (en) * 2020-02-17 2020-05-22 通威太阳能(眉山)有限公司 Air inlet assembly and diffusion device

Also Published As

Publication number Publication date
FR2747402A1 (en) 1997-10-17

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20061230