GB908605A - Improvements in or relating to methods of fabricating semi-conductor devices - Google Patents

Improvements in or relating to methods of fabricating semi-conductor devices

Info

Publication number
GB908605A
GB908605A GB15713/60A GB1571360A GB908605A GB 908605 A GB908605 A GB 908605A GB 15713/60 A GB15713/60 A GB 15713/60A GB 1571360 A GB1571360 A GB 1571360A GB 908605 A GB908605 A GB 908605A
Authority
GB
United Kingdom
Prior art keywords
silicon
aluminium
wafers
flow
emitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB15713/60A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fairchild Semiconductor Corp
Original Assignee
Fairchild Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fairchild Semiconductor Corp filed Critical Fairchild Semiconductor Corp
Publication of GB908605A publication Critical patent/GB908605A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/14—Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase
    • H10P32/1404—Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase using predeposition followed by drive-in of impurities into the semiconductor surface, e.g. predeposition from a gaseous phase
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/17—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material
    • H10P32/171—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material being group IV material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/43—Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/033—Diffusion of aluminum

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Thyristors (AREA)
GB15713/60A 1959-06-30 1960-05-04 Improvements in or relating to methods of fabricating semi-conductor devices Expired GB908605A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US823838A US3108359A (en) 1959-06-30 1959-06-30 Method for fabricating transistors

Publications (1)

Publication Number Publication Date
GB908605A true GB908605A (en) 1962-10-24

Family

ID=25239870

Family Applications (1)

Application Number Title Priority Date Filing Date
GB15713/60A Expired GB908605A (en) 1959-06-30 1960-05-04 Improvements in or relating to methods of fabricating semi-conductor devices

Country Status (5)

Country Link
US (1) US3108359A (enExample)
CH (1) CH394399A (enExample)
DE (1) DE1182750B (enExample)
GB (1) GB908605A (enExample)
NL (1) NL252131A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3421206A (en) * 1965-10-19 1969-01-14 Sylvania Electric Prod Method of forming leads on semiconductor devices
US3342884A (en) * 1965-11-18 1967-09-19 Phillips Petroleum Co Novel cyclohexyl derivatives of ethylene and methods for their preparation
US3357871A (en) * 1966-01-12 1967-12-12 Ibm Method for fabricating integrated circuits
DE1564608B2 (de) * 1966-05-23 1976-11-18 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen eines transistors
US4349691A (en) * 1977-04-05 1982-09-14 Solarex Corporation Method of making constant voltage solar cell and product formed thereby utilizing low-temperature aluminum diffusion
US4486946A (en) * 1983-07-12 1984-12-11 Control Data Corporation Method for using titanium-tungsten alloy as a barrier metal in silicon semiconductor processing
US6543617B2 (en) * 2001-03-09 2003-04-08 International Business Machines Corporation Packaged radiation sensitive coated workpiece process for making and method of storing same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2680220A (en) * 1950-06-09 1954-06-01 Int Standard Electric Corp Crystal diode and triode
US2695852A (en) * 1952-02-15 1954-11-30 Bell Telephone Labor Inc Fabrication of semiconductors for signal translating devices
US2796562A (en) * 1952-06-02 1957-06-18 Rca Corp Semiconductive device and method of fabricating same
NL204361A (enExample) * 1955-04-22 1900-01-01
NL251064A (enExample) * 1955-11-04
NL210216A (enExample) * 1955-12-02
US2806983A (en) * 1956-06-01 1957-09-17 Gen Electric Remote base transistor
US2845375A (en) * 1956-06-11 1958-07-29 Itt Method for making fused junction semiconductor devices
BE570082A (enExample) * 1957-08-07 1900-01-01
US2984775A (en) * 1958-07-09 1961-05-16 Hoffman Electronics Corp Ruggedized solar cell and process for making the same or the like

Also Published As

Publication number Publication date
NL252131A (enExample)
CH394399A (de) 1965-06-30
US3108359A (en) 1963-10-29
DE1182750B (de) 1964-12-03

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