GB895866A - Optical phase noise filters and their application to photography and photolithography - Google Patents
Optical phase noise filters and their application to photography and photolithographyInfo
- Publication number
- GB895866A GB895866A GB3330158A GB3330158A GB895866A GB 895866 A GB895866 A GB 895866A GB 3330158 A GB3330158 A GB 3330158A GB 3330158 A GB3330158 A GB 3330158A GB 895866 A GB895866 A GB 895866A
- Authority
- GB
- United Kingdom
- Prior art keywords
- filter
- spots
- lens
- photography
- photolithography
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/46—Systems using spatial filters
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Blocking Light For Cameras (AREA)
Abstract
895,866. Optical filters. CANON CAMERA CO. Inc. Oct. 17, 1958, No. 33301/58. Class 97(1). An optical filter for use with an imaging lens to modify the intensity distribution in the image comprises a transparent support and a transparent layer on it in the form of a large number of small spots of non-uniform size and shape and in random distribution, wherein the fraction of the whole area of the surface of the support covered by the spots is between 1/10th and 1/2 and the mean diameter of the spots is not greater than 1/1000th of the focal length of the lens with which the filter is to be used. The filter may be used in a rescreening apparatus as shown to prevent move in which an original 25 is photographed using a filter 26 (as defined above), a lens 27, a half-tone image screen 28 and photosensitive material 29. The filter is designed so that Ï = #/25.4 k L f (1 + 1/m), where Ï is the mean diameter of the layer spots k is a constant between 2 and 2.8 L is the number of lines per inch on screen 28 f is the focal length of the lens in millimeters m is the image magnification # is the wave length of light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB3330158A GB895866A (en) | 1958-10-17 | 1958-10-17 | Optical phase noise filters and their application to photography and photolithography |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB3330158A GB895866A (en) | 1958-10-17 | 1958-10-17 | Optical phase noise filters and their application to photography and photolithography |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB895866A true GB895866A (en) | 1962-05-09 |
Family
ID=10351162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3330158A Expired GB895866A (en) | 1958-10-17 | 1958-10-17 | Optical phase noise filters and their application to photography and photolithography |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB895866A (en) |
-
1958
- 1958-10-17 GB GB3330158A patent/GB895866A/en not_active Expired
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