GB8828078D0 - Wafer chuck with local & global levelling - Google Patents

Wafer chuck with local & global levelling

Info

Publication number
GB8828078D0
GB8828078D0 GB888828078A GB8828078A GB8828078D0 GB 8828078 D0 GB8828078 D0 GB 8828078D0 GB 888828078 A GB888828078 A GB 888828078A GB 8828078 A GB8828078 A GB 8828078A GB 8828078 D0 GB8828078 D0 GB 8828078D0
Authority
GB
United Kingdom
Prior art keywords
levelling
global
local
wafer chuck
chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB888828078A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Salter S H
Original Assignee
Salter S H
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Salter S H filed Critical Salter S H
Priority to GB888828078A priority Critical patent/GB8828078D0/en
Publication of GB8828078D0 publication Critical patent/GB8828078D0/en
Pending legal-status Critical Current

Links

GB888828078A 1988-12-01 1988-12-01 Wafer chuck with local & global levelling Pending GB8828078D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB888828078A GB8828078D0 (en) 1988-12-01 1988-12-01 Wafer chuck with local & global levelling

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB888828078A GB8828078D0 (en) 1988-12-01 1988-12-01 Wafer chuck with local & global levelling

Publications (1)

Publication Number Publication Date
GB8828078D0 true GB8828078D0 (en) 1989-01-05

Family

ID=10647797

Family Applications (1)

Application Number Title Priority Date Filing Date
GB888828078A Pending GB8828078D0 (en) 1988-12-01 1988-12-01 Wafer chuck with local & global levelling

Country Status (1)

Country Link
GB (1) GB8828078D0 (en)

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