GB8828078D0 - Wafer chuck with local & global levelling - Google Patents
Wafer chuck with local & global levellingInfo
- Publication number
- GB8828078D0 GB8828078D0 GB888828078A GB8828078A GB8828078D0 GB 8828078 D0 GB8828078 D0 GB 8828078D0 GB 888828078 A GB888828078 A GB 888828078A GB 8828078 A GB8828078 A GB 8828078A GB 8828078 D0 GB8828078 D0 GB 8828078D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- levelling
- global
- local
- wafer chuck
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB888828078A GB8828078D0 (en) | 1988-12-01 | 1988-12-01 | Wafer chuck with local & global levelling |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB888828078A GB8828078D0 (en) | 1988-12-01 | 1988-12-01 | Wafer chuck with local & global levelling |
Publications (1)
Publication Number | Publication Date |
---|---|
GB8828078D0 true GB8828078D0 (en) | 1989-01-05 |
Family
ID=10647797
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB888828078A Pending GB8828078D0 (en) | 1988-12-01 | 1988-12-01 | Wafer chuck with local & global levelling |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB8828078D0 (en) |
-
1988
- 1988-12-01 GB GB888828078A patent/GB8828078D0/en active Pending
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