GB8723790D0 - Contents verification apparatus - Google Patents
Contents verification apparatusInfo
- Publication number
- GB8723790D0 GB8723790D0 GB878723790A GB8723790A GB8723790D0 GB 8723790 D0 GB8723790 D0 GB 8723790D0 GB 878723790 A GB878723790 A GB 878723790A GB 8723790 A GB8723790 A GB 8723790A GB 8723790 D0 GB8723790 D0 GB 8723790D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- verification apparatus
- contents verification
- contents
- verification
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8723790A GB2210996A (en) | 1987-10-09 | 1987-10-09 | Contents verification apparatus |
PCT/GB1988/000895 WO1989003586A1 (en) | 1987-10-09 | 1988-10-07 | Contents verification apparatus |
JP50844188A JPH02501694A (en) | 1987-10-09 | 1988-10-07 | Content verification device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8723790A GB2210996A (en) | 1987-10-09 | 1987-10-09 | Contents verification apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
GB8723790D0 true GB8723790D0 (en) | 1987-11-11 |
GB2210996A GB2210996A (en) | 1989-06-21 |
Family
ID=10625080
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8723790A Withdrawn GB2210996A (en) | 1987-10-09 | 1987-10-09 | Contents verification apparatus |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPH02501694A (en) |
GB (1) | GB2210996A (en) |
WO (1) | WO1989003586A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0722490A (en) * | 1993-06-30 | 1995-01-24 | Mitsubishi Electric Corp | Device and method for automatically arranging lots |
US5474647A (en) * | 1993-11-15 | 1995-12-12 | Hughes Aircraft Company | Wafer flow architecture for production wafer processing |
DE19921243C2 (en) | 1999-05-07 | 2002-12-05 | Infineon Technologies Ag | Plant for processing wafers |
KR100867069B1 (en) | 2001-07-12 | 2008-11-04 | 도쿄엘렉트론가부시키가이샤 | Wafer processing apparatus and transfer device adjustment system |
CN100413047C (en) * | 2005-01-28 | 2008-08-20 | 大日本网目版制造株式会社 | Substrate processing apparatus |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4027246A (en) * | 1976-03-26 | 1977-05-31 | International Business Machines Corporation | Automated integrated circuit manufacturing system |
JPS56139862A (en) * | 1980-04-03 | 1981-10-31 | Toshiba Mach Co Ltd | Operation control system of machine tool group |
DE3219502C2 (en) * | 1982-05-25 | 1990-04-19 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Device for the automatic transport of disc-shaped objects |
FR2547520B1 (en) * | 1983-06-17 | 1985-10-11 | Prodel Maurice | MODULAR INSTALLATION FOR ASSEMBLING AND / OR MACHINING PARTS, WITH KEYBOARD-DISPLAY DEVICES AT EACH STATION |
US4667403A (en) * | 1984-05-16 | 1987-05-26 | Siemens Aktiengesellschaft | Method for manufacturing electronic card modules |
JPS61128512A (en) * | 1984-11-28 | 1986-06-16 | Toshiba Corp | Control system in semiconductor substrate processing line |
JPH0620091B2 (en) * | 1985-01-31 | 1994-03-16 | 株式会社ニコン | Substrate transfer device |
GB2174215B (en) * | 1985-04-23 | 1988-09-14 | Somar Corp | Master film processing robot |
-
1987
- 1987-10-09 GB GB8723790A patent/GB2210996A/en not_active Withdrawn
-
1988
- 1988-10-07 WO PCT/GB1988/000895 patent/WO1989003586A1/en not_active Application Discontinuation
- 1988-10-07 JP JP50844188A patent/JPH02501694A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
GB2210996A (en) | 1989-06-21 |
JPH02501694A (en) | 1990-06-07 |
WO1989003586A1 (en) | 1989-04-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |