GB8600328D0 - Production of semiconductors - Google Patents

Production of semiconductors

Info

Publication number
GB8600328D0
GB8600328D0 GB868600328A GB8600328A GB8600328D0 GB 8600328 D0 GB8600328 D0 GB 8600328D0 GB 868600328 A GB868600328 A GB 868600328A GB 8600328 A GB8600328 A GB 8600328A GB 8600328 D0 GB8600328 D0 GB 8600328D0
Authority
GB
United Kingdom
Prior art keywords
semiconductors
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB868600328A
Other versions
GB2171556B (en
GB2171556A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of GB8600328D0 publication Critical patent/GB8600328D0/en
Publication of GB2171556A publication Critical patent/GB2171556A/en
Application granted granted Critical
Publication of GB2171556B publication Critical patent/GB2171556B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/2654—Bombardment with radiation with high-energy radiation producing ion implantation in AIIIBV compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
GB08600328A 1985-01-10 1986-01-08 Method and apparatus for the production of semiconductor devices Expired GB2171556B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60003066A JPS61161713A (en) 1985-01-10 1985-01-10 Parts for manufacture of semiconductor

Publications (3)

Publication Number Publication Date
GB8600328D0 true GB8600328D0 (en) 1986-02-12
GB2171556A GB2171556A (en) 1986-08-28
GB2171556B GB2171556B (en) 1988-08-17

Family

ID=11546956

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08600328A Expired GB2171556B (en) 1985-01-10 1986-01-08 Method and apparatus for the production of semiconductor devices

Country Status (2)

Country Link
JP (1) JPS61161713A (en)
GB (1) GB2171556B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3428303B2 (en) * 1996-07-11 2003-07-22 日新電機株式会社 Ion irradiation equipment
DE10027931C1 (en) * 2000-05-31 2002-01-10 Infineon Technologies Ag Method for rear-side electrical contacting of a semiconductor substrate during its processing

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD143131A1 (en) * 1979-04-26 1980-07-30 Ute Bergner DEVICE FOR ELECTROSTATIC HOLDING OF WORKPIECES, PARTICULARLY SEMICONDUCTED DISCS
GB2126417A (en) * 1982-08-26 1984-03-21 Heraeus Schott Quarzschmelze Support systems for conveying semiconductor devices into hostile environments during manufacture
JPS5961043A (en) * 1982-09-29 1984-04-07 Nec Corp Sample holder for ion implantation

Also Published As

Publication number Publication date
GB2171556B (en) 1988-08-17
GB2171556A (en) 1986-08-28
JPS61161713A (en) 1986-07-22

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Legal Events

Date Code Title Description
746 Register noted 'licences of right' (sect. 46/1977)

Effective date: 20011018

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20040108