GB8528826D0 - Alignment techniques - Google Patents

Alignment techniques

Info

Publication number
GB8528826D0
GB8528826D0 GB858528826A GB8528826A GB8528826D0 GB 8528826 D0 GB8528826 D0 GB 8528826D0 GB 858528826 A GB858528826 A GB 858528826A GB 8528826 A GB8528826 A GB 8528826A GB 8528826 D0 GB8528826 D0 GB 8528826D0
Authority
GB
United Kingdom
Prior art keywords
alignment techniques
alignment
techniques
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB858528826A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co PLC
Original Assignee
General Electric Co PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co PLC filed Critical General Electric Co PLC
Priority to GB858528826A priority Critical patent/GB8528826D0/en
Publication of GB8528826D0 publication Critical patent/GB8528826D0/en
Priority to GB8627434A priority patent/GB2183364B/en
Pending legal-status Critical Current

Links

GB858528826A 1985-11-22 1985-11-22 Alignment techniques Pending GB8528826D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB858528826A GB8528826D0 (en) 1985-11-22 1985-11-22 Alignment techniques
GB8627434A GB2183364B (en) 1985-11-22 1986-11-17 Alignment using gratings having varying stripe pitch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB858528826A GB8528826D0 (en) 1985-11-22 1985-11-22 Alignment techniques

Publications (1)

Publication Number Publication Date
GB8528826D0 true GB8528826D0 (en) 1985-12-24

Family

ID=10588637

Family Applications (2)

Application Number Title Priority Date Filing Date
GB858528826A Pending GB8528826D0 (en) 1985-11-22 1985-11-22 Alignment techniques
GB8627434A Expired GB2183364B (en) 1985-11-22 1986-11-17 Alignment using gratings having varying stripe pitch

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB8627434A Expired GB2183364B (en) 1985-11-22 1986-11-17 Alignment using gratings having varying stripe pitch

Country Status (1)

Country Link
GB (2) GB8528826D0 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5189494A (en) * 1988-11-07 1993-02-23 Masato Muraki Position detecting method and apparatus
CA2078930C (en) * 1991-09-24 1999-08-03 Raphael L. Levien Register mark
US6522411B1 (en) 1999-05-25 2003-02-18 Massachusetts Institute Of Technology Optical gap measuring apparatus and method having two-dimensional grating mark with chirp in one direction
US6660997B2 (en) 2001-04-26 2003-12-09 Creo Srl Absolute position Moiré type encoder for use in a control system
US7863763B2 (en) 2005-11-22 2011-01-04 Asml Netherlands B.V. Binary sinusoidal sub-wavelength gratings as alignment marks

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1174781A (en) * 1966-01-20 1969-12-17 Ass Eng Ltd Improvements in Positioning Systems
NL6804512A (en) * 1968-03-30 1969-10-02
US4193687A (en) * 1978-06-05 1980-03-18 Rockwell International Corporation High resolution alignment technique and apparatus
US4703434A (en) * 1984-04-24 1987-10-27 The Perkin-Elmer Corporation Apparatus for measuring overlay error

Also Published As

Publication number Publication date
GB8627434D0 (en) 1986-12-17
GB2183364B (en) 1989-10-04
GB2183364A (en) 1987-06-03

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