GB8528826D0 - Alignment techniques - Google Patents
Alignment techniquesInfo
- Publication number
- GB8528826D0 GB8528826D0 GB858528826A GB8528826A GB8528826D0 GB 8528826 D0 GB8528826 D0 GB 8528826D0 GB 858528826 A GB858528826 A GB 858528826A GB 8528826 A GB8528826 A GB 8528826A GB 8528826 D0 GB8528826 D0 GB 8528826D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- alignment techniques
- alignment
- techniques
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB858528826A GB8528826D0 (en) | 1985-11-22 | 1985-11-22 | Alignment techniques |
GB8627434A GB2183364B (en) | 1985-11-22 | 1986-11-17 | Alignment using gratings having varying stripe pitch |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB858528826A GB8528826D0 (en) | 1985-11-22 | 1985-11-22 | Alignment techniques |
Publications (1)
Publication Number | Publication Date |
---|---|
GB8528826D0 true GB8528826D0 (en) | 1985-12-24 |
Family
ID=10588637
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB858528826A Pending GB8528826D0 (en) | 1985-11-22 | 1985-11-22 | Alignment techniques |
GB8627434A Expired GB2183364B (en) | 1985-11-22 | 1986-11-17 | Alignment using gratings having varying stripe pitch |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8627434A Expired GB2183364B (en) | 1985-11-22 | 1986-11-17 | Alignment using gratings having varying stripe pitch |
Country Status (1)
Country | Link |
---|---|
GB (2) | GB8528826D0 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5189494A (en) * | 1988-11-07 | 1993-02-23 | Masato Muraki | Position detecting method and apparatus |
CA2078930C (en) * | 1991-09-24 | 1999-08-03 | Raphael L. Levien | Register mark |
US6522411B1 (en) | 1999-05-25 | 2003-02-18 | Massachusetts Institute Of Technology | Optical gap measuring apparatus and method having two-dimensional grating mark with chirp in one direction |
US6660997B2 (en) | 2001-04-26 | 2003-12-09 | Creo Srl | Absolute position Moiré type encoder for use in a control system |
US7863763B2 (en) | 2005-11-22 | 2011-01-04 | Asml Netherlands B.V. | Binary sinusoidal sub-wavelength gratings as alignment marks |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1174781A (en) * | 1966-01-20 | 1969-12-17 | Ass Eng Ltd | Improvements in Positioning Systems |
NL6804512A (en) * | 1968-03-30 | 1969-10-02 | ||
US4193687A (en) * | 1978-06-05 | 1980-03-18 | Rockwell International Corporation | High resolution alignment technique and apparatus |
US4703434A (en) * | 1984-04-24 | 1987-10-27 | The Perkin-Elmer Corporation | Apparatus for measuring overlay error |
-
1985
- 1985-11-22 GB GB858528826A patent/GB8528826D0/en active Pending
-
1986
- 1986-11-17 GB GB8627434A patent/GB2183364B/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB8627434D0 (en) | 1986-12-17 |
GB2183364B (en) | 1989-10-04 |
GB2183364A (en) | 1987-06-03 |
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