GB8523441D0 - Substrate processing apparatus - Google Patents

Substrate processing apparatus

Info

Publication number
GB8523441D0
GB8523441D0 GB858523441A GB8523441A GB8523441D0 GB 8523441 D0 GB8523441 D0 GB 8523441D0 GB 858523441 A GB858523441 A GB 858523441A GB 8523441 A GB8523441 A GB 8523441A GB 8523441 D0 GB8523441 D0 GB 8523441D0
Authority
GB
United Kingdom
Prior art keywords
processing apparatus
substrate processing
substrate
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB858523441A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VG Instruments Group Ltd
Original Assignee
VG Instruments Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VG Instruments Group Ltd filed Critical VG Instruments Group Ltd
Priority to GB858523441A priority Critical patent/GB8523441D0/en
Publication of GB8523441D0 publication Critical patent/GB8523441D0/en
Priority to EP86307273A priority patent/EP0217616A3/en
Priority to JP22405686A priority patent/JPS63114967A/en
Pending legal-status Critical Current

Links

GB858523441A 1985-09-23 1985-09-23 Substrate processing apparatus Pending GB8523441D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB858523441A GB8523441D0 (en) 1985-09-23 1985-09-23 Substrate processing apparatus
EP86307273A EP0217616A3 (en) 1985-09-23 1986-09-22 Substrate processing apparatus
JP22405686A JPS63114967A (en) 1985-09-23 1986-09-22 Substrate treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB858523441A GB8523441D0 (en) 1985-09-23 1985-09-23 Substrate processing apparatus

Publications (1)

Publication Number Publication Date
GB8523441D0 true GB8523441D0 (en) 1985-10-30

Family

ID=10585595

Family Applications (1)

Application Number Title Priority Date Filing Date
GB858523441A Pending GB8523441D0 (en) 1985-09-23 1985-09-23 Substrate processing apparatus

Country Status (2)

Country Link
JP (1) JPS63114967A (en)
GB (1) GB8523441D0 (en)

Also Published As

Publication number Publication date
JPS63114967A (en) 1988-05-19

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