GB8523441D0 - Substrate processing apparatus - Google Patents
Substrate processing apparatusInfo
- Publication number
- GB8523441D0 GB8523441D0 GB858523441A GB8523441A GB8523441D0 GB 8523441 D0 GB8523441 D0 GB 8523441D0 GB 858523441 A GB858523441 A GB 858523441A GB 8523441 A GB8523441 A GB 8523441A GB 8523441 D0 GB8523441 D0 GB 8523441D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- processing apparatus
- substrate processing
- substrate
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB858523441A GB8523441D0 (en) | 1985-09-23 | 1985-09-23 | Substrate processing apparatus |
EP86307273A EP0217616A3 (en) | 1985-09-23 | 1986-09-22 | Substrate processing apparatus |
JP22405686A JPS63114967A (en) | 1985-09-23 | 1986-09-22 | Substrate treatment apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB858523441A GB8523441D0 (en) | 1985-09-23 | 1985-09-23 | Substrate processing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB8523441D0 true GB8523441D0 (en) | 1985-10-30 |
Family
ID=10585595
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB858523441A Pending GB8523441D0 (en) | 1985-09-23 | 1985-09-23 | Substrate processing apparatus |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS63114967A (en) |
GB (1) | GB8523441D0 (en) |
-
1985
- 1985-09-23 GB GB858523441A patent/GB8523441D0/en active Pending
-
1986
- 1986-09-22 JP JP22405686A patent/JPS63114967A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS63114967A (en) | 1988-05-19 |
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