GB8412312D0 - Measurement apparatus - Google Patents

Measurement apparatus

Info

Publication number
GB8412312D0
GB8412312D0 GB848412312A GB8412312A GB8412312D0 GB 8412312 D0 GB8412312 D0 GB 8412312D0 GB 848412312 A GB848412312 A GB 848412312A GB 8412312 A GB8412312 A GB 8412312A GB 8412312 D0 GB8412312 D0 GB 8412312D0
Authority
GB
United Kingdom
Prior art keywords
measurement apparatus
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB848412312A
Other versions
GB2146116B (en
GB2146116A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP8375683A external-priority patent/JPS59208409A/en
Priority claimed from JP8637883A external-priority patent/JPS59211810A/en
Priority claimed from JP20727783A external-priority patent/JPS60100007A/en
Priority claimed from JP20727583A external-priority patent/JPS60100006A/en
Priority claimed from JP7977584A external-priority patent/JPS60224044A/en
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Publication of GB8412312D0 publication Critical patent/GB8412312D0/en
Publication of GB2146116A publication Critical patent/GB2146116A/en
Application granted granted Critical
Publication of GB2146116B publication Critical patent/GB2146116B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/04—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by beating two waves of a same source but of different frequency and measuring the phase shift of the lower frequency obtained
GB08412312A 1983-05-13 1984-05-14 Surface condition measurement apparatus Expired GB2146116B (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP8375683A JPS59208409A (en) 1983-05-13 1983-05-13 Surface-roughness measuring device utilizing optical heterodyne interference method
JP8637883A JPS59211810A (en) 1983-05-17 1983-05-17 Fine angle measuring apparatus by light heterodyne interference method
JP20727783A JPS60100007A (en) 1983-11-04 1983-11-04 Measuring device of surface by optical heterodyne interference method
JP20727583A JPS60100006A (en) 1983-11-04 1983-11-04 Measuring device for surface by optical heterodyne interference method
JP7977584A JPS60224044A (en) 1984-04-20 1984-04-20 Surface inspecting device by light heterodyne interference method

Publications (3)

Publication Number Publication Date
GB8412312D0 true GB8412312D0 (en) 1984-06-20
GB2146116A GB2146116A (en) 1985-04-11
GB2146116B GB2146116B (en) 1986-09-17

Family

ID=27524805

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08412312A Expired GB2146116B (en) 1983-05-13 1984-05-14 Surface condition measurement apparatus

Country Status (1)

Country Link
GB (1) GB2146116B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4627730A (en) * 1984-07-06 1986-12-09 The Board Of Trustees Of The Leland Stanford Junior University Optical scanning microscope
GB8603563D0 (en) * 1986-02-13 1986-03-19 Pilkington Brothers Plc Surface measurement
GB8807817D0 (en) * 1988-03-31 1988-05-05 See C W Optical measuring apparatus & method
GB2254693B (en) * 1991-04-12 1995-10-25 British Tech Group Methods of and apparatus for measuring using acousto-optic devices
US5583643A (en) * 1991-04-12 1996-12-10 British Technology Group Ltd. Methods of and apparatus for measurement using acousto-optic devices
US5523839A (en) * 1994-02-28 1996-06-04 Minnesota Mining & Manufacturing Differential optical interferometric profilomenty for real time manufacturing control
GB2372097A (en) * 2001-02-07 2002-08-14 Image Automation Ltd Multiple beam interferometer

Also Published As

Publication number Publication date
GB2146116B (en) 1986-09-17
GB2146116A (en) 1985-04-11

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Legal Events

Date Code Title Description
746 Register noted 'licences of right' (sect. 46/1977)

Effective date: 19960319

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20030514