GB2619340A - Vacuum component and vacuum apparatus - Google Patents
Vacuum component and vacuum apparatus Download PDFInfo
- Publication number
- GB2619340A GB2619340A GB2208125.1A GB202208125A GB2619340A GB 2619340 A GB2619340 A GB 2619340A GB 202208125 A GB202208125 A GB 202208125A GB 2619340 A GB2619340 A GB 2619340A
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- United Kingdom
- Prior art keywords
- vacuum
- layer
- material layer
- component according
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- 239000000463 material Substances 0.000 claims abstract description 85
- 238000010438 heat treatment Methods 0.000 claims abstract description 55
- 239000012774 insulation material Substances 0.000 claims description 15
- 239000012212 insulator Substances 0.000 claims description 11
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- 229920003023 plastic Polymers 0.000 claims description 2
- 229910052729 chemical element Inorganic materials 0.000 claims 1
- 229910000986 non-evaporable getter Inorganic materials 0.000 abstract description 62
- 230000004888 barrier function Effects 0.000 abstract description 8
- 239000000919 ceramic Substances 0.000 abstract description 8
- 238000009413 insulation Methods 0.000 abstract description 4
- 238000010943 off-gassing Methods 0.000 description 17
- 239000000615 nonconductor Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000007872 degassing Methods 0.000 description 4
- -1 spine! Chemical compound 0.000 description 4
- 229910007727 Zr V Inorganic materials 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 229920002430 Fibre-reinforced plastic Polymers 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000005328 electron beam physical vapour deposition Methods 0.000 description 2
- 238000001652 electrophoretic deposition Methods 0.000 description 2
- 238000007732 electrostatic spray assisted vapour deposition Methods 0.000 description 2
- 229910000953 kanthal Inorganic materials 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000013021 overheating Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229910002059 quaternary alloy Inorganic materials 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- BNGXYYYYKUGPPF-UHFFFAOYSA-M (3-methylphenyl)methyl-triphenylphosphanium;chloride Chemical compound [Cl-].CC1=CC=CC(C[P+](C=2C=CC=CC=2)(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 BNGXYYYYKUGPPF-UHFFFAOYSA-M 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000570 Cupronickel Inorganic materials 0.000 description 1
- 102000006391 Ion Pumps Human genes 0.000 description 1
- 108010083687 Ion Pumps Proteins 0.000 description 1
- 229920000106 Liquid crystal polymer Polymers 0.000 description 1
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 1
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 229920002873 Polyethylenimine Polymers 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000002939 deleterious effect Effects 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 239000003623 enhancer Substances 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000011151 fibre-reinforced plastic Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000004611 light stabiliser Substances 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- CKFGINPQOCXMAZ-UHFFFAOYSA-N methanediol Chemical compound OCO CKFGINPQOCXMAZ-UHFFFAOYSA-N 0.000 description 1
- 229910021343 molybdenum disilicide Inorganic materials 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002574 poison Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000011160 polymer matrix composite Substances 0.000 description 1
- 229920013657 polymer matrix composite Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229940124543 ultraviolet light absorber Drugs 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
- F16L53/30—Heating of pipes or pipe systems
- F16L53/35—Ohmic-resistance heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/42—Heating elements having the shape of rods or tubes non-flexible
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
- F04B37/04—Selection of specific absorption or adsorption materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/42—Heating elements having the shape of rods or tubes non-flexible
- H05B3/44—Heating elements having the shape of rods or tubes non-flexible heating conductor arranged within rods or tubes of insulating material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/16—Vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/18—Vacuum control means
- H01J2237/182—Obtaining or maintaining desired pressure
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/013—Heaters using resistive films or coatings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/022—Heaters specially adapted for heating gaseous material
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Thermal Insulation (AREA)
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Physical Vapour Deposition (AREA)
Abstract
A vacuum component for a vacuum apparatus, such as a tube 10, comprises a wall element 12 having an outer surface 14 outside the vacuum and an inner surface 16 inside the vacuum, a layer heating element 20, such as a metallic or ceramic resistive heater, connected to the outer surface, and a non-evaporable getter (NEG) material layer 26 connected to the inner surface at a position corresponding to the position of the heating element. The NEG material layer may comprise a dense NEG material layer 28 and a columnar NEG material layer 30, which layers may cover the complete inner surface of the component. Thermal insulation may be included to provide a thermal barrier to prevent heat from the heating element spreading to other components of the vacuum apparatus.
Description
Intellectual Property Office Application No G132208125.1 RTM Date:23 November 2022 The following term is a registered trade mark and should be read as such wherever it occurs in this document:
KANTHAL
Intellectual Property Office is an operating name of the Patent Office www.gov.uk /ipo
VACUUM COMPONENT AND VACUUM APPARATUS
The present invention relates to a vacuum component for a vacuum apparatus and a vacuum apparatus having such a vacuum component.
When objects are placed under vacuum, gas embedded within the material and on the surface, evolves from their surfaces. The generation of gas by this process is known as outgassing. Outgassing becomes a progressively significant proportion of the total gas load once a vacuum chamber is roughed down to below 0.1 mbar. For ultra-high vacuum systems (10-7 mbar or less), outgassing is the most important factor influencing degassing and the time to ultimate pressure.
Outgassing can be reduced by eliminating elastomer, hydrocarbon oil and greases from the vacuum pumps; avoiding other materials known to have poor outgassing performance, such as mild steel or porous surfaces; and using clean-room techniques to avoid contamination.
Traditional heat sources may comprise wire heating elements built into the 5 vacuum system or a component thereof or tapes, cables and bands that are attached to or wound round the system's external surfaces, which are in turn covered in lagging or other insulation.
Traditional heating methods of this type have been found to present certain disadvantages. For instance, when a heating cable is employed it may be difficult to achieve uniform contact between heat source and the surface: resulting in variable surface temperatures and poor heat transfer.
Depending on the specifics of the system, cold spots may not degas adequately, or conversely may facilitate condensation or sublimation, which in turn may have a deleterious effect on the overall system pressure and/or performance. Quilted jacket heaters ameliorate some of these problems. -2 -
In certain applications it is desirable to provide supplementary pumping and measures how to reduce outgassing from pipework in narrow tubes and inaccessible locations. One example of this being SEM columns where in some circumstance the system is pumped down with a TMP which is then turned off to minimise vibrations and then mechanically passive pumps in the form of NEG (Non Evaporable Getter) or Ion pumps are employed to maintain high vacuum/low pressures during measurement. In many cases access is restricted, and the passive pumps are connected at some distance from the column via long thin tubes reducing the pump performance of those pumps.
Prior to use, any NEG material must be activated by heating it to relatively high temperatures above 200°C in a low pressure (<1E-6mbar) environment. However, conventional heating is sometimes not possible in inaccessible areas of the vacuum apparatus and usually the heat is not localized to the NEG material alone. This non-localisation of the high temperature region causes excessive outgassing from other components which may partially saturate or poison the NEG coating during the cooldown cycle.
The use of a multilayer heater coating deposited on an external surface of vacuum components has been previously described in GB2569996A to initiate out-gassing of the vacuum components prior use. However, even when heating up the vacuum component initially for degassing, the material to be used by the vacuum apparatus is limited such that use of porous material in the vacuum apparatus is usually not possible.
In addition, even for usual vacuum materials such as stainless steel or aluminium, outgassing is a time-consuming process. Furthermore, accumulation of contaminants over time in these materials is possible and thus, the process of outgassing must be repeated. This again causes the problems if a passive pump is used since the material of the passive pump might be saturated or poisoned. -3 -
Thus, it is an object of the present invention to provide a vacuum component for a vacuum apparatus for generating and maintaining an ultra-high vacuum.
The problem is solved by a vacuum component according to claim 1 and a vacuum apparatus according to claim 15.
According to the present invention the vacuum component for a vacuum apparatus comprises a wall element having an outer surface outside the vacuum and an inner surface inside the vacuum. Thus, the outer surface may exhibit ambient pressure wherein the inner surface may exhibit vacuum and is an interior surface of the vacuum component and/or the vacuum apparatus. Further, a layer heating element is connected to the outer surface to heat the vacuum component. According to the present invention an NEG material layer is connected to the inner surface at a position corresponding to the position of the layer heating element. Thus, the area covered by the layer heating element at least partially and preferably fully overlaps with the area covered by the NEG material layer at opposite sides of the wall element. By the layer heating element, the NEG material layer can be activated. Thus, with the direct combination of the layer heating element and the NEG material layer, a passive vacuum pump inside the vacuum component is provided which can be activated. At the same time the NEG material layer may act as barrier layer to the material of the wall element preventing excessive outgassing of the wall element. Thus, by the layer heating element initial degassing of the wall element of the vacuum component can be reduced. In addition, due to overlap of the layer heating element and the NEG material layer the heat is localized to the NEG material layer preventing overheating of other components of the vacuum apparatus. Therein, the layer heating element may provide a homogenous heating allowing a homogenous activation of the NEG material.
Preferably, the heating element is a resistive heater or a conductive heater. -4 -
Preferably, the layer heating element is built according to GB 2569996, wherein the content of this application is fully incorporated herein by reference.
Preferably, the layer heating element covers the complete or almost complete outer surface of the vacuum component. Thereby, homogenous heating of the wall element of the vacuum component is provided and degassing of the vacuum component is possible.
Preferably, the heating element comprises a heating layer coated onto the outer surface and preferably separated from the vacuum component by an electrical insulator layer. Thus, starting from the outer surface first there may be an electrical insulator layer followed by a heating layer built as resistive heating layer or conductive heating layer.
Preferably, the NEG material layer covers the complete or almost complete inner surface of the vacuum component. Thus, the complete or almost complete inner surface of the vacuum component is either used for passive pumping and/or a complete barrier is provided preventing or minimizing outgassing of the vacuum component.
Preferably, the NEG material layer has a thickness between 100nm and 1000nm, more preferably between 300nm and 1000nm and most preferably between 400nm and 600nm.
Preferably, the NEG material layer is a quaternary alloy based for example on Ti-Zr-Hf-V but could also be any tertiary alloy such as Hf-Zr-V, Ti-Zr-Hf, Ti-HfV, Ti-Zr-V, a binary alloy for example Zr-V or single element for example Zirconium. The quaternary alloy Ti-Zr-Hf-V might be preferred as it has improved pumping speed at relatively low activation temperatures (150°C to 200°C). -5 -
Preferably, the NEG material layer comprises a dense NEG material layer acting as a barrier layer. Additionally, or alternatively the NEG material layer comprises a columnar NEG material layer providing an increased surface due to the surface structure of the columnar NEG material layer in order to increase pump performance of the NEG material.
Preferably, the NEG material layer comprises at least two layers starting from the inner surface of the wall element. A first layer is a dense NEG material layer acting as a barrier and a second layer is a columnar NEG material layer. Thus, by the combination of these two layers at the same time outgassing of the wall element of the vacuum component is prevented or minimized and sufficient pump performance of the NEG material is enabled.
Preferably, the NEG material layer and/or the layer heating element are partially and preferably fully surrounded by one or more thermal insulators. By the thermal insulators overheating of other components of the vacuum apparatus connected to the vacuum component are prevented. At the same time unintentional outgassing of those parts are also prevented or minimized. At the same time the heat generated by the layer heating element is localized to NEG material layer enhancing efficiency of the activation of the NEG material layer.
Preferably, the one or more of the thermal insulators are a thermal mass. The thermal mass might be one or more flanges if the vacuum component is a pipe. By the flanges additional material is present having an increased heat capacity compared to the wall element reducing heat transfer. At the same time due to the increased surface of the flanges, cooling of the thermal masses is enabled. Therein, in particular thermal masses may have a roughened outer surface or cooling fins at the outer surface to be able to efficiently dissipate heat to the ambient. -6 -
Preferably, the one or more thermal insulators are a thinned wall section. By the thinned wall section heat conduction is reduced. Therein, the thinned wall section may have a wall thickness compared to the wall element of less than 80%, preferably less than 60% and more preferably less than 40%. The lower limit is only set by the stability of the vacuum component.
Preferably, the one or more thermal insulator is an insulation material with lower heat conductivity compared to the material of the component and/or the wall element.
Preferably, the thermal insulation material is a ceramic material or plastic, wherein the thermal insulation material at the inner surface is preferably covered by the NEG material layer.
Preferably, the vacuum component is built as a tube.
Further, the present invention relates to a vacuum apparatus comprising at least one vessel containing a vacuum and at least one vacuum pump connected to the vessel. Therein, the vacuum pump may be built as turbomolecular vacuum pump. Further, the vacuum apparatus comprises a vacuum component as described above. In particular, the vacuum component is a tube connecting the vessel with the vacuum pump.
In the following the present invention is described in more detail with reference to the accompanying figures.
The figures show: Figure 1 a first embodiment of the present invention, Figure 2 a further embodiment of the present invention, -7 -Figure 3 a further embodiment of the present invention and Figure 4 a detailed view of the present invention.
Referring to figure 1 showing a vacuum component according to the present invention built as tube 10. The tube 10 has a wall element 12 having an outer surface 14 and an inner surface 16. By the wall element an inner volume 18 is defined. In the mounted state a vacuum is presented in the inner volume 18. Although, figure 1 shows the vacuum component of the present invention as a tube, other vacuum components of a vacuum apparatus can also be used. For example, an SEM column could be used as vacuum component.
The outer surface 14 of the tube 10 is covered by a layer heating element 20. Therein, the layer heating element may be directly coated onto the outer surface of the tube 10. Therein, the layer heating element may be built according to GB 2569996. As detailed shown in figure 4, the layer heating element 20 may comprise at least one electrical insulator layer 22 directly connected to the wall element 12 of the tube 10. On top of the electrical insulator layer 22, a heating layer 24 is built preferably by coating. The heater layer 24 may be built as conductive heater layer or resistive heater layer. Therein, the electrical insulator layer 22 may comprise a material selective from the group consisting of a ceramic, a polymer or a polymer matrix composite. Therein, the ceramic may be selective from the group consisting silicone carbonite, or a nitrate, alumina, aluminum nitrate, spine!, mullite. Alternatively, the electrical insulator layer 22 may be a polymer selected from the group of liquid crystal polymers, including aromatic polyamides and aromatic polyesters, aromatic polyimides, polyamides, polysulpones, polyethylenimines, and polyether ether ketone (PEEK), or derivatives or copolymers thereof. A preferred polyimide may comprise poly(4,4'-oxydiphenylenepyromellitimide). Alternatively, polyamide nylon resins or polybutylene terephthalate resins may be selected. The polymers may additionally -8 -include one or more from the group consisting antistatics, antioxidants, mould release agents, flameproofing agents, lubricants, colorants, flow enhancers, fillers, including nanofillers, light stabilizers and ultraviolet light absorbers, pigments, and plasticisers. In embodiments, the polymer may be a composite comprising a polymer 30 matrix and a dispersed phase which increases the temperature resistance of the polymer matrix: glass fibre reinforced polymers and carbon fibre reinforced polymers are particularly preferred.
Preferably, the heater layer 24 is metallic or ceramic. Preferably, the heater layer 24 is metallic comprise a material selected from the group consisting of nichrome, titanium alloys, kanthal, cupronickel, platinum, iridium, rhenium, palladium, rhodium, gold, copper, silver, tungsten and alloys thereof. Alternatively, heater layer 24 is ceramic and selected from the group consisting of molybdenum disilicide or a positive temperature coefficient ceramic, such as barium titanate or lead titanate.
Preferably, the insulation layer 22, heater layer 24 and/or any further outer insulation layer (not shown) are deposited using one or more of the techniques selected from the group consisting of high velocity oxygen fuel (HVOF), electrophoretic deposition (EPD), low temperature deposition (LPD), electron beam physical vapour deposition (EBPVD), air plasma spray (APS), electrostatic spray assisted vapour deposition (ESAVD), direct vapour deposition, and combinations thereof.
According to the present invention, an NEG material layer 26 is connected to the inner surface 16 of the wall element. Therein, the NEG material layer 26 may comprise a first layer 28 built as dense NEG material layer acting as a barrier to prevent or minimize outgassing of the wall element 12. Therein, the dense NEG material layer 28 is directly connected onto the inner surface of the wall element. The dense NEG material layer may be built by coating. The NEG material layer 26 may comprise a second NEG material layer built as columnar -9 -NEG material layer 30, wherein by the columnar NEG material layer an increased surface is provided in order to enhance pump performance of the NEG material layer. Although figure 1 shows that the NEG material layer 26 has a first NEG material layer and a second layer, the NEG material layer 26 may only comprise one NEG material layer, either a dense NEG material layer or columnar NEG material layer) or may comprise more than two NEG material layers stacked above each other.
Therein, it is shown that the layer heating element 20 covers almost the complete outer surface of the wall element. In addition, the position of the layer heating element 20 corresponds to the position of the NEG material layer 26 at opposite sides of the wall element. Thus, homogenous heating of the NEG material layer is possible. In addition, the NEG material layer extends over the complete or almost complete inner surface of the pipe 10 in order to efficiently prevent outgassing of the pipe 10 into the vacuum and/or increase pump efficiency of the NEG material layer.
The pipe 10 has a first end 32 and a second end 34, wherein at the first end 32 and the second end 34 flanges 36 are connected to connect the pipe for example to a vessel or a vacuum pump. By the flanges 36 a thermal mass is provided limiting the heat provided by the layer heating element 20. At the same time by the flanges 36 the external surface is increased in order to allow efficient heat dissipation by the flanges 36. Thus, by the flanges 36 a thermal barrier is provided preventing heat from the layer heating element 20 to spread to components attached to the first end 32 or the second end 34 of the tube 10. Thus, the heat of the layer heating element 20 is localized to the pipe 10, thereby providing homogeneous and efficient heating of the NEG material layer 26.
In the following it is referred to the figure 2, wherein same or similar elements are denoted with identical reference signs. In the embodiment of figure 2, the layer heating element 20 is limited by thermal insulators built as thinned wall -10 -sections 38. The thinned wall sections are built as conferential grooves in the wall element 12. Thus, by the thinned wall section 38 heat conductivity across these sections is reduced confining the heat produced by the layer heating element 20. Thus, efficient and homogenous heating of the NEG material layer 26 is provided. Therein, the thickness of the wall in the thinned wall section 38 may have less than 80%, more preferably less than 60% and most preferably less than 50% of the wall thickness of the remaining wall element 12.
Referring to figure 3, wherein same or similar elements are denoted with identical reference signs. In the embodiment of figure 3, the layer heating element 20 is limited by insulators built by an insulation material 40. In particular, the insulation material 40 may be a ceramic such as aluminium oxide but is not limited to this specific choice. In particular, the insulation material 40 is selected to have a reduced heat conductivity compared to the material of the wall element 12. Thus, heat conduction across the insulation material 40 is prevented or reduced. Heat of the layer heating element 20 is confined to the component 10 in order to provide efficient and homogenous heating of the NEG material layer. Therein, it is noted that the inner surface of the insulation material 40 extends to the inner surface of the wall element 12. Thus, part of the inner surface of the component 10 is built by the material of the insulation material 40. In order to prevent outgassing or even leakage via the insulation material, which might be porous ceramic, the insulation material 40 is coated by at least one NEG material layer and preferably by a dense material layer as barrier.
Reference list 12 wall element 14 outer surface 16 inner surface 18 interior volume layer heating element 22 electrical insulator layer 24 heater layer 26 NEG material layer 28 dense NEG material layer columnar NEG material layer 32 first end 34 second end 36 flange 38 thinned wall section insulation material
Claims (15)
- -12 -CLAIMS1. Vacuum component for a vacuum apparatus, comprising a wall element having an outer surface outside the vacuum and an inner surface inside the vacuum, a layer heating element connected to the outer surface, and an NEG material layer connected to the inner surface at a position corresponding to position of the heating element.
- 2. Vacuum component according to claim 1, wherein the layer heating ele-ment is a resistive heater or conductive heater.
- 3. Vacuum component according to claims 1 or 2, wherein the layer heating element covers the complete outer surface.
- 4. Vacuum component according to any of claims 1 to 3, wherein the heating element comprises a heating layer coated on the outer surface.
- 5. Vacuum component according to any of claims 1 to 4, wherein the NEG material layer covers the complete inner surface.
- 6. Vacuum component according to any of claims 1 to 5, wherein the NEG material layer is between 100nm to 1000nm thick, preferably between 300nm and 1000nm thick and most preferably between 400nm and 600nm thick.
- -13 - 7. Vacuum component according to any of claims 1 to 6, wherein the NEG material layer comprises a dense NEG material layer and/or a columnar NEG material layer.
- 8. Vacuum component according to any of claims 1 to 7, wherein the NEG material layer comprises at least two layers starting from the inner surface, wherein a first layer is a dense NEG material layer and a second layer is a columnar NEG material layer.
- 9. Vacuum component according to any of claims 1 to 8, wherein NEG material layer and/or the layer heating element are partially and preferably fully surrounded by one or more thermal insulators.
- 10. Vacuum component according to any of claims 1 to 9, wherein the one or more thermal insulators are a thermal mass, wherein preferably the thermal mass is a flange.
- 11. Vacuum component according to any of claims 1 to 10, wherein the one or more thermal insulators are a thinned wall section.
- 12. Vacuum component according to any of claims 1 to 11, wherein the one or more thermal insulator is an insulation material with low heat conductivity compared to the material of the component.
- 13. Vacuum component according to claim 12, wherein the thermal insulation material is a ceramic material or plastic, wherein preferably the thermal insulation material at the inner surface is covered by the NEG material layer.
- 14. Vacuum component according to any of claims 1 to 13 built as tube.-14 -
- 15. Vacuum apparatus comprising at least one vessel and at least one vacuum pump, preferably built as turbomolecular pump, wherein the vacuum apparatus further comprises a vacuum component according to any of claims 1 to 14.
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2208125.1A GB2619340A (en) | 2022-06-01 | 2022-06-01 | Vacuum component and vacuum apparatus |
FR2305288A FR3136263B3 (en) | 2022-06-01 | 2023-05-26 | VACUUM COMPONENT AND VACUUM DEVICE |
DE202023102974.4U DE202023102974U1 (en) | 2022-06-01 | 2023-05-30 | Vacuum component and vacuum device |
CZ2023-41026U CZ37705U1 (en) | 2022-06-01 | 2023-05-31 | A vacuum component and a vacuum apparatus |
CN202321374747.4U CN220435043U (en) | 2022-06-01 | 2023-06-01 | Vacuum component and vacuum apparatus |
JP2023004072U JP3246256U (en) | 2022-06-01 | 2023-11-10 | Vacuum components and equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2208125.1A GB2619340A (en) | 2022-06-01 | 2022-06-01 | Vacuum component and vacuum apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
GB202208125D0 GB202208125D0 (en) | 2022-07-13 |
GB2619340A true GB2619340A (en) | 2023-12-06 |
Family
ID=82324107
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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GB2208125.1A Pending GB2619340A (en) | 2022-06-01 | 2022-06-01 | Vacuum component and vacuum apparatus |
Country Status (6)
Country | Link |
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JP (1) | JP3246256U (en) |
CN (1) | CN220435043U (en) |
CZ (1) | CZ37705U1 (en) |
DE (1) | DE202023102974U1 (en) |
FR (1) | FR3136263B3 (en) |
GB (1) | GB2619340A (en) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03222876A (en) * | 1990-01-26 | 1991-10-01 | Jeol Ltd | Compound pump |
US20070102650A1 (en) * | 2005-11-10 | 2007-05-10 | Souichi Katagiri | Charged particle beam apparatus |
US20090294697A1 (en) * | 2008-05-28 | 2009-12-03 | Hitachi High-Technologies Corporation | Charged particle beam apparatus |
JP2012225337A (en) * | 2011-04-08 | 2012-11-15 | Shinku Jikkenshitsu:Kk | Non-evaporating type getter pump |
WO2014132758A1 (en) * | 2013-02-28 | 2014-09-04 | 株式会社 日立ハイテクノロジーズ | Orbitron pump and electron beam device using orbitron pump |
GB2518167A (en) * | 2013-09-11 | 2015-03-18 | Ricardo Uk Ltd | A getter |
GB2569996A (en) * | 2018-01-09 | 2019-07-10 | Edwards Ltd | Heated vacuum system |
GB2584428A (en) * | 2019-05-29 | 2020-12-09 | Edwards Ltd | A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber |
-
2022
- 2022-06-01 GB GB2208125.1A patent/GB2619340A/en active Pending
-
2023
- 2023-05-26 FR FR2305288A patent/FR3136263B3/en active Active
- 2023-05-30 DE DE202023102974.4U patent/DE202023102974U1/en active Active
- 2023-05-31 CZ CZ2023-41026U patent/CZ37705U1/en active IP Right Grant
- 2023-06-01 CN CN202321374747.4U patent/CN220435043U/en active Active
- 2023-11-10 JP JP2023004072U patent/JP3246256U/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03222876A (en) * | 1990-01-26 | 1991-10-01 | Jeol Ltd | Compound pump |
US20070102650A1 (en) * | 2005-11-10 | 2007-05-10 | Souichi Katagiri | Charged particle beam apparatus |
US20090294697A1 (en) * | 2008-05-28 | 2009-12-03 | Hitachi High-Technologies Corporation | Charged particle beam apparatus |
JP2012225337A (en) * | 2011-04-08 | 2012-11-15 | Shinku Jikkenshitsu:Kk | Non-evaporating type getter pump |
WO2014132758A1 (en) * | 2013-02-28 | 2014-09-04 | 株式会社 日立ハイテクノロジーズ | Orbitron pump and electron beam device using orbitron pump |
GB2518167A (en) * | 2013-09-11 | 2015-03-18 | Ricardo Uk Ltd | A getter |
GB2569996A (en) * | 2018-01-09 | 2019-07-10 | Edwards Ltd | Heated vacuum system |
GB2584428A (en) * | 2019-05-29 | 2020-12-09 | Edwards Ltd | A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber |
Also Published As
Publication number | Publication date |
---|---|
FR3136263B3 (en) | 2024-06-07 |
JP3246256U (en) | 2024-04-03 |
GB202208125D0 (en) | 2022-07-13 |
DE202023102974U1 (en) | 2023-09-30 |
FR3136263A3 (en) | 2023-12-08 |
CN220435043U (en) | 2024-02-02 |
CZ37705U1 (en) | 2024-02-20 |
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