FR3136263B3 - VACUUM COMPONENT AND VACUUM DEVICE - Google Patents

VACUUM COMPONENT AND VACUUM DEVICE Download PDF

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Publication number
FR3136263B3
FR3136263B3 FR2305288A FR2305288A FR3136263B3 FR 3136263 B3 FR3136263 B3 FR 3136263B3 FR 2305288 A FR2305288 A FR 2305288A FR 2305288 A FR2305288 A FR 2305288A FR 3136263 B3 FR3136263 B3 FR 3136263B3
Authority
FR
France
Prior art keywords
vacuum
component
layer
heating element
vacuum device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2305288A
Other languages
French (fr)
Other versions
FR3136263A3 (en
Inventor
Paul David Smith
Peter Charles Lamb
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of FR3136263A3 publication Critical patent/FR3136263A3/en
Application granted granted Critical
Publication of FR3136263B3 publication Critical patent/FR3136263B3/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/42—Heating elements having the shape of rods or tubes non-flexible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
    • F16L53/30—Heating of pipes or pipe systems
    • F16L53/35—Ohmic-resistance heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F04B37/04—Selection of specific absorption or adsorption materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/42—Heating elements having the shape of rods or tubes non-flexible
    • H05B3/44—Heating elements having the shape of rods or tubes non-flexible heating conductor arranged within rods or tubes of insulating material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/16—Vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/182—Obtaining or maintaining desired pressure
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/013—Heaters using resistive films or coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/022—Heaters specially adapted for heating gaseous material

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Furnace Details (AREA)
  • Thermal Insulation (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Composant pour le vide pour un appareil à vide, comprenant un élément formant paroi (12) ayant une surface extérieure (14) à l'extérieur du vide et une surface intérieure (16) à l'intérieur du vide, un élément chauffant sous forme de couche (20) connecté à la surface extérieure (14), et une couche de matériau NEG (26) connectée à la surface intérieure (16) à une position correspondant à la position de l'élément chauffant. Fig. 1Vacuum component for a vacuum apparatus, comprising a wall element (12) having an outer surface (14) outside the vacuum and an inner surface (16) inside the vacuum, a heating element in the form of layer (20) connected to the outer surface (14), and a layer of NEG material (26) connected to the inner surface (16) at a position corresponding to the position of the heating element. Fig. 1

FR2305288A 2022-06-01 2023-05-26 VACUUM COMPONENT AND VACUUM DEVICE Active FR3136263B3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB2208125.1A GB2619340A (en) 2022-06-01 2022-06-01 Vacuum component and vacuum apparatus
GB2208125.1 2022-06-01

Publications (2)

Publication Number Publication Date
FR3136263A3 FR3136263A3 (en) 2023-12-08
FR3136263B3 true FR3136263B3 (en) 2024-06-07

Family

ID=82324107

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2305288A Active FR3136263B3 (en) 2022-06-01 2023-05-26 VACUUM COMPONENT AND VACUUM DEVICE

Country Status (6)

Country Link
JP (1) JP3246256U (en)
CN (1) CN220435043U (en)
CZ (1) CZ37705U1 (en)
DE (1) DE202023102974U1 (en)
FR (1) FR3136263B3 (en)
GB (1) GB2619340A (en)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03222876A (en) * 1990-01-26 1991-10-01 Jeol Ltd Compound pump
JP4977399B2 (en) * 2005-11-10 2012-07-18 株式会社日立ハイテクノロジーズ Charged particle beam equipment
JP5514472B2 (en) * 2008-05-28 2014-06-04 株式会社日立ハイテクノロジーズ Charged particle beam equipment
JP2012225337A (en) * 2011-04-08 2012-11-15 Shinku Jikkenshitsu:Kk Non-evaporating type getter pump
WO2014132758A1 (en) * 2013-02-28 2014-09-04 株式会社 日立ハイテクノロジーズ Orbitron pump and electron beam device using orbitron pump
GB2518167A (en) * 2013-09-11 2015-03-18 Ricardo Uk Ltd A getter
GB2569996A (en) * 2018-01-09 2019-07-10 Edwards Ltd Heated vacuum system
GB2584428B (en) * 2019-05-29 2021-11-03 Edwards Ltd A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber

Also Published As

Publication number Publication date
GB2619340A (en) 2023-12-06
FR3136263A3 (en) 2023-12-08
GB202208125D0 (en) 2022-07-13
CN220435043U (en) 2024-02-02
DE202023102974U1 (en) 2023-09-30
CZ37705U1 (en) 2024-02-20
JP3246256U (en) 2024-04-03

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