GB2577203A - Shape memory alloy actuators and methods thereof - Google Patents
Shape memory alloy actuators and methods thereof Download PDFInfo
- Publication number
- GB2577203A GB2577203A GB1917208.9A GB201917208A GB2577203A GB 2577203 A GB2577203 A GB 2577203A GB 201917208 A GB201917208 A GB 201917208A GB 2577203 A GB2577203 A GB 2577203A
- Authority
- GB
- United Kingdom
- Prior art keywords
- actuator
- buckle
- shape memory
- memory alloy
- bimorph
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
- F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
- F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
- F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
- F03G7/065—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like using a shape memory element
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
- G02B27/646—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image compensating for small deviations, e.g. due to vibration or shake
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
- F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
- F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
- F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
- G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
- G02B7/09—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted for automatic focusing or varying magnification
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B3/00—Focusing arrangements of general interest for cameras, projectors or printers
- G03B3/10—Power-operated focusing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
- G03B2205/0007—Movement of one or more optical elements for control of motion blur
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
- G03B2205/0046—Movement of one or more optical elements for zooming
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
- G03B2205/0053—Driving means for the movement of one or more optical element
- G03B2205/0076—Driving means for the movement of one or more optical element using shape memory alloys
Abstract
SMA actuators and related methods are described. One embodiment of an actuator includes a base; a plurality of buckle arms; and at least a first shape memory alloy wire coupled with a pair of buckle arms of the plurality of buckle arms. Another embodiment of an actuator includes a base and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator attached to the base.
Claims (39)
1. An actuator including: a base; a plurality of buckle arms; and at least a first shape memory alloy wire coupled with a pair of buckle arms of the plurality of buckle arms.
2. The actuator of claim 1, wherein the pair of buckle arms of the plurality of buckle arms are coupled together with a center portion.
3. The actuator of claim 2, wherein the pair of buckle arms are configured to move in a positive z-direction when the shape alloy wire is actuated.
4. The actuator of claim 1, wherein a first end of the shape memory alloy wire is attached to first buckle arm of the pair of buckle arms and a second end of the shape memory alloy wire is attached to a second buckle arm.
5. The actuator of claim 4, wherein the shape memory allow wire is attached to the first buckle arm by a first crimp and is attached to the second buckle arm by a second crimp.
6. The actuator of claim 2, wherein the center portion is configured to receive a portion of a lens carriage.
7. The actuator of claim 1 included in an autofocus system.
8. The actuator of claim 1 configured as a micro-fluidic pump.
9. An autofocus system including more than one actuator according to claim 1.
10. A micro-fluidic pump including more than one actuator according to claim 1.
11. An actuator including: a base; and at least one bimorph actuator including an shape memory alloy material, the bimorph actuator attached to the base.
12. The actuator of claim 11, wherein a first end of the shape memory alloy material is attached to a first end of the bimorph actuator and a second end is attached to a second end of the bimorph actuator.
13. The actuator of claim 12, wherein the second end of the bimorph actuator is configured to move in a z-direction when the shape memory alloy material is actuated.
14. The actuator of claim 11, wherein the shape memory alloy material is a shape memory allow wire.
15. The actuator of claim 11, wherein the shape memory allow material is a shape memory allow ribbon.
16. The actuator of claim 11 included in an autofocus system.
17. The actuator of claim 11 configured as a micro-fluidic pump.
18. An autofocus system including more than one actuator according to claim 11.
19. A micro-fluidic pump including more than one actuator according to claim II.
20. An actuator comprising: a beam; a first end pad electrically coupled to the beam; a second end pad electrically coupled to the beam; a center feed arranged between the first end pad and the second end pad; and a shape memory alloy material coupled with the first end pad, the second end pad, and the center feed, the center feed configured to be electrically isolated from the beam and electrically coupled to a contact layer.
21. An actuator comprising: a first buckle actuator; a second buckle actuator; and a lens carriage.
22. The actuator of claim 21, wherein the first buckle actuator is configured to move the lens carriage in a negative z-direction.
23. The actuator of claim 22, wherein the second buckle actuator is configured to move the lens carriage in a positive z-direction.
24. The actuator of claim 21, wherein the first buckle actuator includes a first base and the second buckle actuator includes a second base, the first buckle actuator includes a first pair of buckle arms and a second pair of buckle arms attached to the first base, the second buckle actuator includes a third pair of buckle arms and a fourth pair of buckle arms.
25. The actuator of claim 24, wherein the lens carriage is arranged between the first buckle actuator and the second buckle actuator.
26. The actuator of claim 25, wherein the first base and the second base face toward each other.
27. The actuator of claim 26, wherein the first buckle actuator and the second buckle actuator are configured to tilt the lens carriage with respect to an axis.
28. The actuator of claim 2, wherein the center portion is a laminated hammock.
29. A liquid lens comprising: a circuit including at least one shape memory alloy actuator; a shaping ring; a flexible membrane; a lens, and a liquid retaining ring, the lens configured on a side of the liquid retaining ring opposite the flexible membrane, the liquid retaining ring configured to retain liquid between the lens and the membrane, the shape memory alloy actuator configured to push the shaping ring located on the flexible membrane to change the shape of the membrane to shape the liquid.
30. The liquid lens of claim 29, wherein the shape memory alloy actuator includes a shape memory alloy wire.
31. The liquid lens of claim 29, wherein the shape memory alloy includes a shape memory alloy ribbon.
32. The actuator of claim 11 including at least four bimorph actuators, two of the bimorph actuators configured to move an object in a negative z-direction and two of the bimorph actuators configured to move an object in a positive z-direction.
33. The actuator of claim 11 including at least 8 bimorph actuators, the 8 bimorph actuators configured to move an object in a direction of 5 axis.
34. The actuator of claim 33 including 12 bimorph actuators.
35. The actuator of claim 33 including 4 side mounted bimorph actuators to move the object in an x direction and a y direction.
36. The actuator of claim 33 configured as a box bimorph autofocus.
37. The actuator of claim 35 including 2 top mounted bimorph actuators and 2 bottom mounted bimorph actuators.
38. The actuator of claim 35 including 4 top mounted bimorph actuators and 4 bottom mounted bimorph actuators.
39. The actuator of claim 11 including at least four bimorph actuators, two of the bimorph actuators configured to move an object in a x-direction and two of the bimorph actuators configured to move an object in a y-direction.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2206304.4A GB2602950B (en) | 2017-05-05 | 2018-05-04 | Shape memory alloy actuators and methods thereof |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762502568P | 2017-05-05 | 2017-05-05 | |
US201862650991P | 2018-03-30 | 2018-03-30 | |
PCT/US2018/031256 WO2018204888A1 (en) | 2017-05-05 | 2018-05-04 | Shape memory alloy actuators and methods thereof |
US15/971,995 US10920755B2 (en) | 2017-05-05 | 2018-05-04 | Shape memory alloy actuators and methods thereof |
Publications (3)
Publication Number | Publication Date |
---|---|
GB201917208D0 GB201917208D0 (en) | 2020-01-08 |
GB2577203A true GB2577203A (en) | 2020-03-18 |
GB2577203B GB2577203B (en) | 2022-08-03 |
Family
ID=69137287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1917208.9A Active GB2577203B (en) | 2017-05-05 | 2018-05-04 | Shape memory alloy actuators and methods thereof |
Country Status (2)
Country | Link |
---|---|
CN (3) | CN113589544B (en) |
GB (1) | GB2577203B (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10920755B2 (en) | 2017-05-05 | 2021-02-16 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11105319B2 (en) | 2017-05-05 | 2021-08-31 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11306706B2 (en) | 2017-05-05 | 2022-04-19 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
GB2600825A (en) * | 2020-10-12 | 2022-05-11 | Hutchinson Technology | Shape memory alloy actuators and methods thereof |
US11333134B2 (en) | 2017-05-05 | 2022-05-17 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11448853B2 (en) | 2017-05-05 | 2022-09-20 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11815794B2 (en) | 2017-05-05 | 2023-11-14 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11859598B2 (en) | 2021-06-10 | 2024-01-02 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2576173A (en) * | 2018-08-07 | 2020-02-12 | Cambridge Mechatronics Ltd | Tuneable fluid lens |
CN115722781A (en) * | 2021-09-01 | 2023-03-03 | 广东海德亚科技有限公司 | Shape memory alloy wire welding assembly, welding method and fixed connection product |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070280668A1 (en) * | 2006-05-30 | 2007-12-06 | Konica Minolta Opto, Inc. | Driving device, driving mechanism, and image sensing apparatus |
US20110102920A1 (en) * | 2008-01-24 | 2011-05-05 | San-Woei Shyu | Lens displacement mechanism using shaped memory alloy |
US20110249131A1 (en) * | 2008-09-12 | 2011-10-13 | Richard Topliss | Optical image stabilisation comprising shape memory alloy actuators |
US20130002933A1 (en) * | 2010-02-26 | 2013-01-03 | Cambridge Mechatronics Limited | Sma actuation apparatus |
US20150346507A1 (en) * | 2012-02-16 | 2015-12-03 | Cambridge Mechatronics Limited | Shape memory alloy actuation apparatus |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0456950A1 (en) * | 1990-05-16 | 1991-11-21 | CONTRAVES ITALIANA S.p.A. | Actuator for restraint/release (R/R) devices, particularly for space applications |
JP2000137155A (en) * | 1998-11-02 | 2000-05-16 | Fuji Photo Film Co Ltd | Fixed-focus camera |
KR20020018655A (en) * | 1999-03-26 | 2002-03-08 | 알. 숀 미너스 | Bistable micro-switch and method of manufacturing the same |
US6624730B2 (en) * | 2000-03-28 | 2003-09-23 | Tini Alloy Company | Thin film shape memory alloy actuated microrelay |
US6367252B1 (en) * | 2000-07-05 | 2002-04-09 | Jds Uniphase Corporation | Microelectromechanical actuators including sinuous beam structures |
US7372348B2 (en) * | 2004-08-20 | 2008-05-13 | Palo Alto Research Center Incorporated | Stressed material and shape memory material MEMS devices and methods for manufacturing |
US7773119B2 (en) * | 2006-04-28 | 2010-08-10 | Konica Minolta Opto, Inc. | Drive apparatus, image pickup unit and image pickup apparatus |
GB2457860B (en) * | 2007-02-12 | 2010-06-30 | Cambridge Mechatronics Ltd | Shape memory alloy actuation apparatus |
JP4544331B2 (en) * | 2008-04-04 | 2010-09-15 | ソニー株式会社 | Conversion lens device and imaging device |
US20110026148A1 (en) * | 2008-04-08 | 2011-02-03 | Konica Minolta Holdings, Inc. | Actuator array sheet |
KR100984333B1 (en) * | 2008-07-18 | 2010-09-30 | 국방과학연구소 | Electromechanical Transducer and Manufacturing Method of the Same |
WO2010089529A1 (en) * | 2009-02-09 | 2010-08-12 | Cambridge Mechatronics Limited | Optical image stabilisation |
US8282004B2 (en) * | 2009-04-29 | 2012-10-09 | Hand Held Products, Inc. | Focusing apparatus and terminal comprising variable focus lens assembly |
JP5211015B2 (en) * | 2009-11-04 | 2013-06-12 | 日立マクセル株式会社 | Imaging device |
KR101893229B1 (en) * | 2010-08-09 | 2018-08-29 | 캠브리지 메카트로닉스 리미티드 | Camera apparatus |
US8803256B2 (en) * | 2010-11-15 | 2014-08-12 | DigitalOptics Corporation MEMS | Linearly deployed actuators |
GB201205394D0 (en) * | 2012-03-27 | 2012-05-09 | Adlens Ltd | Improvements in or relating to deformable non-round membrane assemblies |
JP5967366B2 (en) * | 2012-09-11 | 2016-08-10 | Smk株式会社 | Flat shape memory cable body and driving device using the same |
ITMI20121988A1 (en) * | 2012-11-22 | 2014-05-23 | Getters Spa | ACTUATOR ELEMENT WITH IMPROVED FATIGUE RESISTANCE MADE OF A FORM MEMORY LEAGUE |
US9744055B2 (en) * | 2014-04-10 | 2017-08-29 | The University Of Akron | Antagonistically actuated shape memory alloy manipulator |
EP3194768A1 (en) * | 2014-09-15 | 2017-07-26 | Koninklijke Philips N.V. | Heat sensitive actuator device |
-
2018
- 2018-05-04 CN CN202111072217.XA patent/CN113589544B/en active Active
- 2018-05-04 CN CN201880029763.5A patent/CN110709757B/en active Active
- 2018-05-04 CN CN202111072378.9A patent/CN113589545B/en active Active
- 2018-05-04 GB GB1917208.9A patent/GB2577203B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070280668A1 (en) * | 2006-05-30 | 2007-12-06 | Konica Minolta Opto, Inc. | Driving device, driving mechanism, and image sensing apparatus |
US20110102920A1 (en) * | 2008-01-24 | 2011-05-05 | San-Woei Shyu | Lens displacement mechanism using shaped memory alloy |
US20110249131A1 (en) * | 2008-09-12 | 2011-10-13 | Richard Topliss | Optical image stabilisation comprising shape memory alloy actuators |
US20130002933A1 (en) * | 2010-02-26 | 2013-01-03 | Cambridge Mechatronics Limited | Sma actuation apparatus |
US20150346507A1 (en) * | 2012-02-16 | 2015-12-03 | Cambridge Mechatronics Limited | Shape memory alloy actuation apparatus |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11448853B2 (en) | 2017-05-05 | 2022-09-20 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11668288B2 (en) | 2017-05-05 | 2023-06-06 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11199183B2 (en) | 2017-05-05 | 2021-12-14 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11306706B2 (en) | 2017-05-05 | 2022-04-19 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11892759B2 (en) | 2017-05-05 | 2024-02-06 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11333134B2 (en) | 2017-05-05 | 2022-05-17 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11105319B2 (en) | 2017-05-05 | 2021-08-31 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US10920755B2 (en) | 2017-05-05 | 2021-02-16 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11815794B2 (en) | 2017-05-05 | 2023-11-14 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11686294B2 (en) | 2017-05-05 | 2023-06-27 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11867160B2 (en) | 2017-05-05 | 2024-01-09 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
GB2600825B (en) * | 2020-10-12 | 2023-01-11 | Hutchinson Technology | Shape memory alloy actuators and methods thereof |
GB2600825A (en) * | 2020-10-12 | 2022-05-11 | Hutchinson Technology | Shape memory alloy actuators and methods thereof |
US11859598B2 (en) | 2021-06-10 | 2024-01-02 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
Also Published As
Publication number | Publication date |
---|---|
GB2577203B (en) | 2022-08-03 |
CN113589544B (en) | 2023-06-16 |
CN113589544A (en) | 2021-11-02 |
CN110709757B (en) | 2022-11-22 |
GB201917208D0 (en) | 2020-01-08 |
CN113589545A (en) | 2021-11-02 |
CN113589545B (en) | 2023-11-21 |
CN110709757A (en) | 2020-01-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB2577203A (en) | Shape memory alloy actuators and methods thereof | |
KR102565644B1 (en) | Shape memory alloy actuator and method | |
US11105319B2 (en) | Shape memory alloy actuators and methods thereof | |
US11686294B2 (en) | Shape memory alloy actuators and methods thereof | |
US20180176472A1 (en) | Multi-aperture imaging device, method for producing the same and imaging system | |
GB2596673A (en) | Shape memory alloy actuators and methods thereof | |
US11306706B2 (en) | Shape memory alloy actuators and methods thereof | |
US11448853B2 (en) | Shape memory alloy actuators and methods thereof | |
US20150062719A1 (en) | Shape-variable optical element | |
CN102928950A (en) | Micro lens based on micro-electromechanical system (MEMS) | |
CN216342609U (en) | Piezoelectric bimorph actuator and actuator | |
CN105676448B (en) | A kind of focusing micro mirror and a kind of focus control | |
CN103472563B (en) | Mobile lens Automatic zoom lens focusing device based on IPMC driver | |
CN202886707U (en) | Micro lens based on MEMS (micro electro mechanical system) | |
CN101320187B (en) | Electrostatic driven F-P cavity MEMS wavelength tunable filter | |
CN201107844Y (en) | Flat-plate shrapnel and voice coil motor using the same | |
CN202661714U (en) | Bimorph deformable mirror | |
WO2018074084A1 (en) | Semiconductor device, display apparatus, and electronic equipment | |
TWI437272B (en) | Deformable lens | |
KR20150001783U (en) | Electroactive polymer matrix and electroactive polymer matrix system including the same | |
CN106458569A (en) | Micromirror arrangement and method for producing same | |
JP2016143825A5 (en) | ||
KR20150055712A (en) | Road surface adaptive adjustable driving wheel using electroactive polymer |