GB2558195A - Cavity with silicon on insulator MEMS pressure sensing device with an extended shallow polygon cavity - Google Patents
Cavity with silicon on insulator MEMS pressure sensing device with an extended shallow polygon cavity Download PDFInfo
- Publication number
- GB2558195A GB2558195A GB1617888.1A GB201617888A GB2558195A GB 2558195 A GB2558195 A GB 2558195A GB 201617888 A GB201617888 A GB 201617888A GB 2558195 A GB2558195 A GB 2558195A
- Authority
- GB
- United Kingdom
- Prior art keywords
- pressure sensing
- cavity
- sensing device
- mems pressure
- csoi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0059—Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00158—Diaphragms, membranes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/005—Non square semiconductive diaphragm
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C10/00—Adjustable resistors
- H01C10/10—Adjustable resistors adjustable by mechanical pressure or force
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C10/00—Adjustable resistors
- H01C10/16—Adjustable resistors including plural resistive elements
- H01C10/20—Contact structure or movable resistive elements being ganged
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0264—Pressure sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0315—Cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/013—Etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/03—Bonding two components
- B81C2203/033—Thermal bonding
- B81C2203/036—Fusion bonding
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/283,777 US10221062B2 (en) | 2016-10-03 | 2016-10-03 | Cavity with silicon on insulator MEMS pressure sensing device with an extended shallow cross-shaped cavity |
Publications (2)
Publication Number | Publication Date |
---|---|
GB201617888D0 GB201617888D0 (en) | 2016-12-07 |
GB2558195A true GB2558195A (en) | 2018-07-11 |
Family
ID=57738062
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1617888.1A Withdrawn GB2558195A (en) | 2016-10-03 | 2016-10-21 | Cavity with silicon on insulator MEMS pressure sensing device with an extended shallow polygon cavity |
Country Status (4)
Country | Link |
---|---|
US (1) | US10221062B2 (de) |
CN (1) | CN107894294B (de) |
DE (1) | DE102017216418A1 (de) |
GB (1) | GB2558195A (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10302514B2 (en) * | 2016-12-18 | 2019-05-28 | Nxp Usa, Inc. | Pressure sensor having a multiple wheatstone bridge configuration of sense elements |
DE102019207963B4 (de) * | 2018-06-04 | 2023-11-09 | Vitesco Technologies USA, LLC (n.d.Ges.d.Staates Delaware) | Csoi - mems-druckerfassungselement mit spannungsausgleichern |
US11029227B2 (en) * | 2018-06-04 | 2021-06-08 | Vitesco Technologies USA, LLC | CSOI MEMS pressure sensing element with stress equalizers |
EP3833632A1 (de) | 2018-08-09 | 2021-06-16 | LPKF Laser & Electronics AG | Verfahren zur herstellung von mikrostrukturen |
CN109341907A (zh) * | 2018-11-29 | 2019-02-15 | 华景传感科技(无锡)有限公司 | 一种压力传感器 |
DE102019111634A1 (de) | 2019-05-06 | 2020-11-12 | Lpkf Laser & Electronics Ag | Verfahren zur Herstellung von Mikrostrukturen in einem Glassubstrat |
CN111076851B (zh) * | 2019-12-09 | 2022-03-29 | 中国科学院上海微系统与信息技术研究所 | 一种压力传感器及其制作方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7487681B1 (en) * | 2006-08-06 | 2009-02-10 | Silicon Microstructures Inc. | Pressure sensor adjustment using backside mask |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4236137A (en) | 1979-03-19 | 1980-11-25 | Kulite Semiconductor Products, Inc. | Semiconductor transducers employing flexure frames |
US5178016A (en) | 1989-11-15 | 1993-01-12 | Sensym, Incorporated | Silicon pressure sensor chip with a shear element on a sculptured diaphragm |
US5759870A (en) * | 1995-08-28 | 1998-06-02 | Bei Electronics, Inc. | Method of making a surface micro-machined silicon pressure sensor |
US6093579A (en) | 1998-06-01 | 2000-07-25 | Exar Corporation | Low pressure sensor with a thin boss and method of manufacture |
WO2001046665A1 (en) * | 1999-12-20 | 2001-06-28 | The Foxboro Company | Multivariate semiconductor pressure sensor with passageway |
EP1359402B1 (de) * | 2002-05-01 | 2014-10-01 | Infineon Technologies AG | Drucksensor |
US7111518B1 (en) | 2003-09-19 | 2006-09-26 | Silicon Microstructures, Inc. | Extremely low cost pressure sensor realized using deep reactive ion etching |
EP1953814B1 (de) * | 2005-11-25 | 2017-09-06 | Panasonic Intellectual Property Management Co., Ltd. | Kapselungsstruktur auf waferniveau und herstellungsverfahren dafür |
US7493822B2 (en) * | 2007-07-05 | 2009-02-24 | Honeywell International Inc. | Small gauge pressure sensor using wafer bonding and electrochemical etch stopping |
JP5687202B2 (ja) * | 2009-11-04 | 2015-03-18 | ローム株式会社 | 圧力センサおよび圧力センサの製造方法 |
US8616065B2 (en) * | 2010-11-24 | 2013-12-31 | Honeywell International Inc. | Pressure sensor |
US8881596B2 (en) | 2012-01-30 | 2014-11-11 | Continental Automotive Systems, Inc. | Semiconductor sensing device to minimize thermal noise |
US8590389B2 (en) * | 2012-02-10 | 2013-11-26 | Metrodyne Microsystems Corporation, R.O.C. | MEMS pressure sensor device and manufacturing method thereof |
US9511996B2 (en) * | 2012-07-31 | 2016-12-06 | Soitec | Methods of forming semiconductor structures including MEMS devices and integrated circuits on common sides of substrates, and related structures and devices |
US20150135853A1 (en) * | 2013-11-18 | 2015-05-21 | Mark P. McNeal | Mems pressure sensor field shield layout for surface charge immunity in oil filled packaging |
GB201412246D0 (en) | 2014-05-15 | 2014-08-20 | Continental Automotive Systems | Pressure sensor device with high sensitivity and high accuracy |
GB2532806A (en) * | 2014-11-25 | 2016-06-01 | Continental Automotive Systems Us Inc | Piezoresistive pressure sensor device |
US9725312B1 (en) * | 2016-02-05 | 2017-08-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Preconditioning to enhance hydrophilic fusion bonding |
-
2016
- 2016-10-03 US US15/283,777 patent/US10221062B2/en active Active
- 2016-10-21 GB GB1617888.1A patent/GB2558195A/en not_active Withdrawn
-
2017
- 2017-09-15 DE DE102017216418.2A patent/DE102017216418A1/de active Pending
- 2017-09-28 CN CN201710899010.7A patent/CN107894294B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7487681B1 (en) * | 2006-08-06 | 2009-02-10 | Silicon Microstructures Inc. | Pressure sensor adjustment using backside mask |
Non-Patent Citations (1)
Title |
---|
"A monolithic integration multifunctional MEMS sensor based on cavity SOI wafer" Zhang et al, Proc. IEEE sensors 2014, pages 1952-1955 * |
Also Published As
Publication number | Publication date |
---|---|
CN107894294A (zh) | 2018-04-10 |
US20180093881A1 (en) | 2018-04-05 |
CN107894294B (zh) | 2021-03-09 |
GB201617888D0 (en) | 2016-12-07 |
US10221062B2 (en) | 2019-03-05 |
DE102017216418A1 (de) | 2018-04-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |