GB2491290B - Apparatus for forming films on substrates - Google Patents

Apparatus for forming films on substrates

Info

Publication number
GB2491290B
GB2491290B GB201214883A GB201214883A GB2491290B GB 2491290 B GB2491290 B GB 2491290B GB 201214883 A GB201214883 A GB 201214883A GB 201214883 A GB201214883 A GB 201214883A GB 2491290 B GB2491290 B GB 2491290B
Authority
GB
United Kingdom
Prior art keywords
doctor blade
substrates
forming films
flexible coupling
axes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB201214883A
Other versions
GB2491290A (en
GB201214883D0 (en
Inventor
Stephen Mark Lambert
Dennis Mullins
Cuong Manh Ta
Peter Wing Leung
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Symyx Solutions Inc
Original Assignee
Symyx Solutions Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Symyx Solutions Inc filed Critical Symyx Solutions Inc
Priority to GB201214883A priority Critical patent/GB2491290B/en
Publication of GB201214883D0 publication Critical patent/GB201214883D0/en
Publication of GB2491290A publication Critical patent/GB2491290A/en
Application granted granted Critical
Publication of GB2491290B publication Critical patent/GB2491290B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/023—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface
    • B05C11/028—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface with a body having a large flat spreading or distributing surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/04—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with blades
    • B05C11/041—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with blades characterised by means for positioning, loading, or deforming the blades
    • B05C11/042—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with blades characterised by means for positioning, loading, or deforming the blades allowing local positioning, loading or deforming along the blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277—Apparatus
    • B01J2219/00351—Means for dispensing and evacuation of reagents
    • B01J2219/00436—Maskless processes
    • B01J2219/00443—Thin film deposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/0068—Means for controlling the apparatus of the process
    • B01J2219/00686—Automatic
    • B01J2219/00689—Automatic using computers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/0068—Means for controlling the apparatus of the process
    • B01J2219/00686—Automatic
    • B01J2219/00691—Automatic using robots
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00718—Type of compounds synthesised
    • B01J2219/00756—Compositions, e.g. coatings, crystals, formulations

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Coating Apparatus (AREA)

Abstract

Apparatus for forming films on substrates. comprising a doctor blade 233, a programmable robot (29, figure 1) for moving the doctor blade along X, Y and Z axes, the X and Y-axes being generally horizontal and the Z axis being generally vertical, and a flexible coupling 239 for coupling the doctor blade to the robot, said flexible coupling being configured for exerting a downward force on the doctor blade as it moves along a substrate during the formation of a film on the substrate. The flexible coupling may comprise a spring (251, figure 14). Also disclosed is a method of using such apparatus.
GB201214883A 2012-08-21 2012-08-21 Apparatus for forming films on substrates Expired - Fee Related GB2491290B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB201214883A GB2491290B (en) 2012-08-21 2012-08-21 Apparatus for forming films on substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB201214883A GB2491290B (en) 2012-08-21 2012-08-21 Apparatus for forming films on substrates

Publications (3)

Publication Number Publication Date
GB201214883D0 GB201214883D0 (en) 2012-10-03
GB2491290A GB2491290A (en) 2012-11-28
GB2491290B true GB2491290B (en) 2013-01-16

Family

ID=47017090

Family Applications (1)

Application Number Title Priority Date Filing Date
GB201214883A Expired - Fee Related GB2491290B (en) 2012-08-21 2012-08-21 Apparatus for forming films on substrates

Country Status (1)

Country Link
GB (1) GB2491290B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110049825B (en) * 2016-10-20 2021-11-05 普罗默特克有限责任公司 Station for applying fluid substances to stone material

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030224105A1 (en) * 2002-05-30 2003-12-04 Symyx Technologies, Inc. Apparatus and methods for forming films on substrates

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030224105A1 (en) * 2002-05-30 2003-12-04 Symyx Technologies, Inc. Apparatus and methods for forming films on substrates

Also Published As

Publication number Publication date
GB2491290A (en) 2012-11-28
GB201214883D0 (en) 2012-10-03

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20160507