GB2473824A - Pump shaft and rotor materials selected for ease of disassembly - Google Patents

Pump shaft and rotor materials selected for ease of disassembly Download PDF

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Publication number
GB2473824A
GB2473824A GB0916708A GB0916708A GB2473824A GB 2473824 A GB2473824 A GB 2473824A GB 0916708 A GB0916708 A GB 0916708A GB 0916708 A GB0916708 A GB 0916708A GB 2473824 A GB2473824 A GB 2473824A
Authority
GB
United Kingdom
Prior art keywords
shaft
pump
pump member
contact surface
corrosion products
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB0916708A
Other versions
GB2473824B (en
GB0916708D0 (en
Inventor
Emmanuel Uzoma Okoroafor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB0916708.1A priority Critical patent/GB2473824B/en
Publication of GB0916708D0 publication Critical patent/GB0916708D0/en
Priority to TW099127474A priority patent/TWI583869B/en
Priority to US13/394,966 priority patent/US9695824B2/en
Priority to PCT/GB2010/051432 priority patent/WO2011036468A2/en
Priority to KR1020127007445A priority patent/KR101823698B1/en
Publication of GB2473824A publication Critical patent/GB2473824A/en
Application granted granted Critical
Publication of GB2473824B publication Critical patent/GB2473824B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0078—Fixing rotors on shafts, e.g. by clamping together hub and shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/08—Rotary pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/04—Preventing corrosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0436—Iron
    • F05C2201/0439—Cast iron
    • F05C2201/0442—Spheroidal graphite cast iron, e.g. nodular iron, ductile iron

Abstract

A pump member (rotor) 16 is mounted on a shaft 10. At least one of the contact surfaces 32, 34 is formed such that corrosion products 36, 38 of the surfaces are substantially incompatible, to prevent joining (welding) of the shaft to the rotor. This simplifies dismantling of the pump for maintenance. The pump may be a dry claw or roots vacuum pump and may be exposed to fluorine. The selected materials may be sintered Silicon Carbide, or a coating of fluoropolymer, diamond-like carbon (DLC), zinc, black oxide polymer film or an aluminised coating.

Description

PUMPS
The invention relates to pumps and particularly, but not exclusively, to dry pumps.
A dry pump is one in which there is no lubrication provided in the pumping chamber of a dry pump. Despite an absence of lubrication, dry pumps are often used to pump corrosive fluids. For example, dry pumps are used to control the process environment during semiconductor processing, a usage that involves pumping highly corrosive chemicals such as fluorine, chlorine, bromine and their reactive species. Corrosion of parts in the pumping chamber due to the lack of a protective lubricant can affect pumping performance and sometimes leads to seizure and, hence, pump failure.
In dry pumps that do not have integral shaft-rotors, i.e. the rotor member is mounted on the shaft, corrosion often results in joining, or welding, of the rotors to the shafts/sleeves.
This effect is particularly noticeable in low vacuum stages of a dry pump where there is more corrosion of the pump parts due to increased temperature and pressure resulting from gas compression.
The welding together of the rotors and sleeves/shafts makes it difficult to remove the rotors for maintenance or remanufacture. Often it is necessary to use torches, hammers and/or chisels to free the parts. This can result in damage to bearings, rotors and sleeves that then have to be replaced. This leads to increased component usage and labour time and a reduction in sustainability.
To reduce the corrosion problem, it is known to apply a graphite spray to the shaft/sleeve.
This has made loading (mounting) and removing for example Northey, or claw, rotors on the shaft/sleeve easier. It is also known to spray polytetrafluoroethylene (PTFE) on shafts/sleeves. The problem with using sprays or powders in this way is that highly corrosive gases such as fluorine quickly eat away the coating and so for pumps that may be used to pump such gases, alternative solutions are desirable.
The invention provides a pump shaft and a pump member mountable on said shaft for rotation therewith, said shaft and pump member having respective contact surfaces that contact when said pump member is mounted on said shaft and at least one of said contact surfaces being formed such that corrosion products thereof are substantially incompatible with the other contact surface so that joining of said shaft and pump member at said contact surfaces by corrosion is substantially prevented.
The invention also includes a pump shaft and a pump member mountable on said shaft for rotation therewith, said shaft and pump member having respective contact surfaces that contact when said pump member is mounted on said shaft and said contact surfaces being formed such that respective corrosion products thereof are substantially incompatible so that joining of said shaft and pump member at said contact surfaces by corrosion is substantially prevented.
The invention also includes a dry pump comprising a pumping chamber and having a first member at least partially disposed in said pumping chamber and a second member mounted on said first member in said pumping chamber, said first member having a first member contact surface that is in contact with a contact surface of said second pump member, one of said first and second member contact surfaces being formed such that corrosion products that form in use of said dry pump will be spatially incompatible with the other of said contact surfaces.
In order that the invention may be well understood, some embodiments thereof, which are given by way of example only, will now be described with reference to the drawings in which: Figure 1 is a schematic representation of a dry pump; Figure 2 is a schematic representation of corrosion layers between a shaft and rotor of a dry pump such as the dry pump of Figure 1; and Figure 3 is a schematic representation of a corrosion layer between a rotor and a coated surface of a shaft of a dry pump such as the dry pump of Figure 1.
Referring to Figure 1, a first shaft 10 and a second shaft 12 of a dry pump 14 are shown supporting respective rotors 16, 18 for example in a roots or claw pump. The rotors 16, 18 are a slide fit on the shafts 10, 12 and are secured to the shafts by keys or other suitable securing devices such that they rotate with the shafts. The rotors 16, 18 are located in a pumping chamber 20 that is in part defined by a head plate 22. The head plate 22 is fitted with roller bearings 24 that provide support for the shafts 10, 12 and seal systems 26 that prevent lubricants from entering the pumping chamber 20 and the escape of pumped fluids between the shafts and head plate. Respective sleeves 28, 30 are provided on the shafts 10, 12 within the pumping chamber 20. The pumping chamber 20 and rotors 16, 18 are configured such that rotation of the rotors causes fluids to be pumped through the pumping chamber. As explained in more detail below, the shafts 10, 12 have contact surfaces 32 that mate with respective contact surfaces 34 of the rotors 16, 18. In the illustrations, the contact surfaces 34 of the rotors 16, 18 are bores in which the contact surfaces 32 of the shafts 10, 12 are received.
Those skilled in the art will be familiar with the construction and operation of dry pumps such as claw and roots pumps. For that reason and since further description of a dry pump is not needed in order to understand the invention, other parts and operation of the dry pump will not be described herein.
Referring to Figures 2 and 3, an aspect of the invention resides in forming at least one contact surface 32, 34 of the shafts 10, 12 and rotors 16, 18 such that in the event of corrosion thereof, the corrosion product of that surface is incompatible with the other surface so that corrosion in the area between the contact surfaces should not cause the surfaces to join in such a way that it becomes difficult to remove the rotors from the shafts.
Referring to Figure 2, the contact surface 32 of the shaft 10 has corroded and a corrosion layer 36 has formed thereon. Similarly, the contact surface 34 of the rotor 16 has corroded and a corrosion layer 38 has formed thereon. The corrosion layers 36, 38 are incompatible so that they will generally not join or weld together. The result is that despite this corrosion, the shaft 10 and rotor 16 should be relatively easy to separate should it become desirable to dismantle them. In cases in which the gases to which the pump will be exposed will lead to the formation of corrosion layers primarily comprised of fluorides, the contact surfaces 32, 34 are formed such that the fluoride layers formed are chemically and spatially incompatible with one another so that generally they will not join together.
Referring to Figure 3, the contact surface 34 of the rotor 16 has corroded and a corrosion layer 38 has formed thereon. The contact surface of the shaft 10 comprises a coating 40 that is incompatible with the corrosion layer 38 so that generally they will not join or weld together. The result is that despite corrosion of the rotor contact surface 38, the shaft 10 and rotor 16 should be relatively easy to separate should it become desirable to dismantle them. In cases in which the gases to which the pump will be exposed will lead to the formation of a corrosion layer primarily comprised of fluorides, the coating of the shaft is formed is such that it is chemically and spatially incompatible with such the fluoride corrosion layer.
It will be understood that for ease of representation the thickness of the corrosion layers and coating shown in Figures 2 and 3 is considerably exaggerated.
Six specific embodiments will now be described in the context of pump usage in an environment in which the parts of the pumping chamber 20 will be exposed to chemicals that cause the formation of corrosion products that are primarily fluorides.
In a first embodiment, the shafts 10, 12 are made of sintered silicon carbide (SiC) and the rotors 16, 18 are made of a ferrous material, for example a cast iron such as spheroidal graphite cast iron. If the respective contact surfaces 32, 34 of the shafts 10, 12 and rotors 16, 18 corrode, the corrosion product of the SiC shafts will be incompatible with the iron fluoride corrosion product of the cast iron rotors. Further advantages of a SiC shaft include: i) high thermal conductivity; ii) low thermal expansion coefficient; iii) exceptional shock resistance; iv) SiC is not attacked by any acids, alkalis or molten salts up to temperatures around 800°C; and v) SiC forms a protective silicon oxide (Si02) coating at temperatures around 1200°C and can be used at temperatures up to around 1800°C.
In a second embodiment, the contact surfaces of the shafts 10, 12 or the rotors 16, 18 comprise a fluoropolymer coating and the mating contact surfaces are formed of a ferrous material such as cast iron, for example spheroidal graphite cast iron. In this case, the iron fluoride corrosion product of the ferrous contact surfaces is incompatible with the fluoropolymer and so there will be substantially no welding of the rotors 16, 18 to the shafts 10, 12.
In a third embodiment, the contact surfaces of the shafts 10, 12 comprise a diamond-like carbon coating and the mating contact surfaces of the rotors 16, 18 are formed of a ferrous material such as cast iron, for example spheroidal graphite cast iron. Diamond-like carbon coatings are films of amorphous carbon materials that display some of the properties of natural diamond. Diamond-like carbon coatings are used where improved hardness and wear resistance are required. Diamond-like carbon coatings may, for example, be applied by primary ion beam deposition of carbon atoms, by sputter deposition of carbon or deposition from an RF plasma.
If the diamond-like carbon coating does corrode, the corrosion products (carbon fluorides) are incompatible with the iron fluoride corrosion products of the contact surfaces of the rotors and so there will be substantially no welding between the shafts and rotors.
In a fourth embodiment, the contact surfaces of the shafts 10, 12 are aluminised and the contact surfaces of the rotors they mate with are formed of a ferrous material such as cast iron, for example spheroidal graphite cast iron. Aluminised products are produced by hot dipping a ferrous material in an aluminium-silicon alloy. This process produces a tight metallurgical bond between the ferrous substrate and the alloy coating, producing a part that shows good resistance to corrosion.
If the aluminised surfaces do corrode, the corrosion products are incompatible with the iron fluoride corrosion products of the contact surfaces of the rotors and so there will be substantially no welding between the shafts and rotors.
In a fifth embodiment, the contact surfaces of the shafts 10, 12 or rotors 16, 18 comprise a black oxide of iron and polymer film surface and the mating contact surfaces of the rotors are formed of a ferrous material such as cast iron, for example spheroidal graphite cast iron.
If the black oxide and polymer film surface does corrode, the corrosion products are incompatible with the iron fluoride corrosion products of the rotors and so there will be substantially no welding between the shafts and rotors. The corrosion products of the cast iron rotor will be incompatible with corrosion products of the coating. Similarly, the corrosion products of the cast iron rotor are incompatible with the black oxide/polymer film and vice versa.
In a sixth embodiment, the contact surfaces of the shafts 10, 12 or rotors 16, 18 comprise a zinc coating, for example a yellow zinc coating, and the mating contact surfaces of the rotors are formed of a ferrous material such as cast iron, for example spheroidal graphite cast iron. The yellow zinc coating is preferable compliant with hazardous substances regulations such as the European Union Restriction of Hazardous Substances Directive 2002/95.
If the zinc coated surfaces do corrode, the corrosion products (zinc fluorides) are incompatible with the iron fluoride corrosion products of the rotors and so there will be substantially no welding between the shafts and rotors.
In a seventh embodiment, the contact surfaces of the shafts 10, 12 or rotors 16, 18 comprise nickel plating and the other surface is iron. Nickel fluoride is not compatible with iron fluoride. Furthermore, nickel does not corrode significantly in fluorine.
It will be appreciated that although the shafts in the illustrated embodiment are solid shafts, the shafts may be tubular or part hollow.
It will be appreciated that the invention is not limited to the shafts and rotors of dry pumps. For example, the contact surfaces could be those of a shaft and sleeve of a dry pump. Alternatively, the contact surfaces could be surfaces of sleeves, shafts and/or rotors in any pump and particularly pumps that are intended to pump fluids that are likely to cause corrosion of the contact surfaces.
The materials selected for the described embodiments are for pumps suitable for pumping gases, such as fluorine, that will cause fluoride corrosion. It will be appreciated that for applications in which different corrosion products can be expected, the materials should be selected such that the corrosion products will be incompatible so that there will be substantially no joining of welding at the contact surfaces due to corrosion caused by the pump fluids the parts are intended to encounter so that the parts can be readily disassembled.

Claims (13)

  1. Claims 1. A pump shaft and a pump member mountable on said shaft for rotation therewith, said shaft and pump member having respective contact surfaces that contact when said pump member is mounted on said shaft and at least one of said contact surfaces being formed such that corrosion products thereof are substantially incompatible with the other contact surface so that joining of said shaft and pump member at said contact surfaces by corrosion is substantially prevented.
  2. 2. A pump shaft and pump member as claimed in claim 1, wherein said corrosion products comprise fluorides.
  3. 3. A pump shaft and a pump member as claimed in claim 1 or 2, wherein at least the contact surface of one of said shaft and pump member is made of sintered silicon carbide and at the least the contact surface of the other of said shaft and pump member is made of a material having corrosion products incompatible with the corrosion products of sintered silicon carbide.
  4. 4. A pump shaft and a pump member as claimed in claim 1 or 2, wherein at least the contact surface of one of said shaft and pump member has a fluoropolymer coating and at the least the contact surface of the other of said shaft and pump member is made of a material having corrosion products incompatible with said fluoropolymer coating.
  5. 5. A pump shaft and a pump member as claimed in claim 1 or 2, wherein at least the contact surface of one of said shaft and pump member has a diamond-like carbon coating and at the least the contact surface of the other of said shaft and pump member is made of a material having corrosion products incompatible with corrosion products of said diamond-like carbon coating.
  6. 6. A pump shaft and a pump member as claimed in claim 1 or 2, wherein at least the contact surface of one of said shaft and pump member is aluminised and at least the contact surface of the other of said shaft and pump member is made of a material having corrosion products incompatible with the corrosion products of said aluminised contact surface.
  7. 7. A pump shaft and a pump member as claimed in claim 1 or 2, wherein at least the contact surface of one of said shaft and pump member is zinc plated and at the least the contact surface of the other of said shaft and pump member is made of a material having corrosion products incompatible with the corrosion products of said zinc plated contact surface.
  8. 8. A pump shaft and a pump member as claimed in claim 1 or 2, wherein at least the contact surface of one of said shaft and pump member has a black oxide polymer film coating and at the least the contact surface of the other of said shaft and pump member is made of a material having corrosion products incompatible with the corrosion products of said black oxide polymer film coating.
  9. 9. A pump shaft and a pump member as claimed in any one of claims 3 to 7, wherein said material from which at least the contact surface of the other of said shaft and pump member is made is a ferrous material.
  10. 10. A pump shaft and a pump member as claimed in claim 9, wherein a corrosion product of said ferrous material is iron fluoride.
  11. 11. A pump shaft and a pump member as claimed in claim 9 or 10, wherein said ferrous material comprises spheroidal graphite cast iron.
  12. 12. A pump shaft and a pump member as claimed in any one of the preceding claims, wherein said pump member is a rotor and the contact surface thereof is defined by a bore in which the contact surface of said shaft is received when said rotor is mounted on said shaft.-10 -
  13. 13. A dry pump comprising a pump shaft and pump member as claimed in any one of the preceding claims, the pump member being mounted on said pump shaft such that said respective contact surfaces are in contact.
GB0916708.1A 2009-09-23 2009-09-23 Preventing pump parts joining by corrosion Active GB2473824B (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB0916708.1A GB2473824B (en) 2009-09-23 2009-09-23 Preventing pump parts joining by corrosion
TW099127474A TWI583869B (en) 2009-09-23 2010-08-17 Pumps
US13/394,966 US9695824B2 (en) 2009-09-23 2010-08-31 Pump with corrosion resistant shaft and rotor surfaces
PCT/GB2010/051432 WO2011036468A2 (en) 2009-09-23 2010-08-31 Pumps
KR1020127007445A KR101823698B1 (en) 2009-09-23 2010-08-31 Vacuum pump shaft/rotor assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0916708.1A GB2473824B (en) 2009-09-23 2009-09-23 Preventing pump parts joining by corrosion

Publications (3)

Publication Number Publication Date
GB0916708D0 GB0916708D0 (en) 2009-11-04
GB2473824A true GB2473824A (en) 2011-03-30
GB2473824B GB2473824B (en) 2015-12-23

Family

ID=41327466

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0916708.1A Active GB2473824B (en) 2009-09-23 2009-09-23 Preventing pump parts joining by corrosion

Country Status (5)

Country Link
US (1) US9695824B2 (en)
KR (1) KR101823698B1 (en)
GB (1) GB2473824B (en)
TW (1) TWI583869B (en)
WO (1) WO2011036468A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9957406B2 (en) 2011-07-21 2018-05-01 Tohoku University Method for smoothing a perfluoro alkoxy alkane film surface

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EP2672116B1 (en) * 2012-06-07 2017-10-18 Aktiebolaget SKF Cam follower roller device, notably for a fuel injection pump
US9909450B1 (en) 2013-03-13 2018-03-06 Us Synthetic Corporation Turbine assembly including at least one superhard bearing
CN107882741A (en) * 2017-11-07 2018-04-06 刘兴满 Corrosion-resistant acid alkali pump

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EP1055823A1 (en) * 1998-12-14 2000-11-29 Mitsubishi Denki Kabushiki Kaisha Vane type vacuum pump for automobiles
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EP1640611A1 (en) * 2003-06-11 2006-03-29 Matsushita Electric Industrial Co., Ltd. Vane rotary pneumatic pump
US20070297907A1 (en) * 2004-11-04 2007-12-27 Wolfgang Giebmanns Vacuum Pump Impeller

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US6371723B1 (en) * 2000-08-17 2002-04-16 Lloyd Grant System for coupling a shaft to an outer shaft sleeve
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010043876A1 (en) * 1998-06-15 2001-11-22 Dan Mekler Rotary machine
EP1055823A1 (en) * 1998-12-14 2000-11-29 Mitsubishi Denki Kabushiki Kaisha Vane type vacuum pump for automobiles
EP1640611A1 (en) * 2003-06-11 2006-03-29 Matsushita Electric Industrial Co., Ltd. Vane rotary pneumatic pump
US20070297907A1 (en) * 2004-11-04 2007-12-27 Wolfgang Giebmanns Vacuum Pump Impeller

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9957406B2 (en) 2011-07-21 2018-05-01 Tohoku University Method for smoothing a perfluoro alkoxy alkane film surface

Also Published As

Publication number Publication date
GB2473824B (en) 2015-12-23
TW201116719A (en) 2011-05-16
KR101823698B1 (en) 2018-01-30
WO2011036468A2 (en) 2011-03-31
US9695824B2 (en) 2017-07-04
KR20120081589A (en) 2012-07-19
GB0916708D0 (en) 2009-11-04
TWI583869B (en) 2017-05-21
US20120171033A1 (en) 2012-07-05
WO2011036468A3 (en) 2012-03-01

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