GB2470506B - Mems device and process - Google Patents

Mems device and process

Info

Publication number
GB2470506B
GB2470506B GB1013806A GB201013806A GB2470506B GB 2470506 B GB2470506 B GB 2470506B GB 1013806 A GB1013806 A GB 1013806A GB 201013806 A GB201013806 A GB 201013806A GB 2470506 B GB2470506 B GB 2470506B
Authority
GB
United Kingdom
Prior art keywords
mems device
mems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1013806A
Other versions
GB201013806D0 (en
GB2470506A (en
Inventor
Richard Ian Laming
Colin Robert Jenkins
Tsjerk Hoekstra
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cirrus Logic International UK Ltd
Original Assignee
Wolfson Microelectronics PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wolfson Microelectronics PLC filed Critical Wolfson Microelectronics PLC
Priority to GB1013806A priority Critical patent/GB2470506B/en
Priority claimed from GB0808746A external-priority patent/GB2460060B/en
Publication of GB201013806D0 publication Critical patent/GB201013806D0/en
Publication of GB2470506A publication Critical patent/GB2470506A/en
Application granted granted Critical
Publication of GB2470506B publication Critical patent/GB2470506B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0027—Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/06—Arranging circuit leads; Relieving strain on circuit leads
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
GB1013806A 2008-05-14 2008-05-14 Mems device and process Active GB2470506B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1013806A GB2470506B (en) 2008-05-14 2008-05-14 Mems device and process

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1013806A GB2470506B (en) 2008-05-14 2008-05-14 Mems device and process
GB0808746A GB2460060B (en) 2008-05-14 2008-05-14 MEMS device and process

Publications (3)

Publication Number Publication Date
GB201013806D0 GB201013806D0 (en) 2010-09-29
GB2470506A GB2470506A (en) 2010-11-24
GB2470506B true GB2470506B (en) 2011-03-30

Family

ID=42938097

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1013806A Active GB2470506B (en) 2008-05-14 2008-05-14 Mems device and process

Country Status (1)

Country Link
GB (1) GB2470506B (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1004882A2 (en) * 1998-11-25 2000-05-31 Hitachi, Ltd. Inertia sensor and method of fabricating the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1004882A2 (en) * 1998-11-25 2000-05-31 Hitachi, Ltd. Inertia sensor and method of fabricating the same

Also Published As

Publication number Publication date
GB201013806D0 (en) 2010-09-29
GB2470506A (en) 2010-11-24

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20150820 AND 20150826