GB2460060B - MEMS device and process - Google Patents

MEMS device and process

Info

Publication number
GB2460060B
GB2460060B GB0808746A GB0808746A GB2460060B GB 2460060 B GB2460060 B GB 2460060B GB 0808746 A GB0808746 A GB 0808746A GB 0808746 A GB0808746 A GB 0808746A GB 2460060 B GB2460060 B GB 2460060B
Authority
GB
United Kingdom
Prior art keywords
mems device
mems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB0808746A
Other versions
GB2460060A (en
GB0808746D0 (en
Inventor
Richard Ian Laming
Colin Robert Jenkins
Tsjerk Hans Hoekstra
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cirrus Logic International UK Ltd
Original Assignee
Wolfson Microelectronics PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wolfson Microelectronics PLC filed Critical Wolfson Microelectronics PLC
Priority to GB1013806A priority Critical patent/GB2470506B/en
Priority to GB0808746A priority patent/GB2460060B/en
Publication of GB0808746D0 publication Critical patent/GB0808746D0/en
Publication of GB2460060A publication Critical patent/GB2460060A/en
Application granted granted Critical
Publication of GB2460060B publication Critical patent/GB2460060B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0027—Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/07—Interconnects
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
GB0808746A 2008-05-14 2008-05-14 MEMS device and process Active GB2460060B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB1013806A GB2470506B (en) 2008-05-14 2008-05-14 Mems device and process
GB0808746A GB2460060B (en) 2008-05-14 2008-05-14 MEMS device and process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0808746A GB2460060B (en) 2008-05-14 2008-05-14 MEMS device and process

Publications (3)

Publication Number Publication Date
GB0808746D0 GB0808746D0 (en) 2008-06-18
GB2460060A GB2460060A (en) 2009-11-18
GB2460060B true GB2460060B (en) 2010-10-27

Family

ID=39571328

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0808746A Active GB2460060B (en) 2008-05-14 2008-05-14 MEMS device and process

Country Status (1)

Country Link
GB (1) GB2460060B (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007143129A2 (en) * 2006-06-04 2007-12-13 Robert Bosch Gmbh Microelectromechanical systems having stored charge and methods for fabricating and using same
WO2007143058A2 (en) * 2006-06-04 2007-12-13 Robert Bosch Gmbh Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same
EP1916222A2 (en) * 2006-10-24 2008-04-30 Seiko Epson Corporation MEMS device with reduced parasitic capacitance

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007143129A2 (en) * 2006-06-04 2007-12-13 Robert Bosch Gmbh Microelectromechanical systems having stored charge and methods for fabricating and using same
WO2007143058A2 (en) * 2006-06-04 2007-12-13 Robert Bosch Gmbh Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same
EP1916222A2 (en) * 2006-10-24 2008-04-30 Seiko Epson Corporation MEMS device with reduced parasitic capacitance

Also Published As

Publication number Publication date
GB2460060A (en) 2009-11-18
GB0808746D0 (en) 2008-06-18

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20150820 AND 20150826